,,,,,,, ATHEFI,D,6/14/2021,152.570,152.570,152.570,0.000,54739 ATHEFI,D,6/15/2021,151.760,151.760,151.760,0.000,54739 ATHEFI,D,6/16/2021,150.380,150.380,150.380,0.000,54739 ATHEFI,D,6/17/2021,150.820,150.820,150.820,0.000,54739 ATHEFI,D,6/18/2021,149.680,149.680,149.680,0.000,54739 ATHEFI,D,6/22/2021,149.450,149.450,149.450,0.000,54739 ATHEFI,D,6/23/2021,150.550,150.550,150.550,0.000,54739 ATHEFI,D,6/24/2021,150.570,150.570,150.570,0.000,54739 ATHEFI,D,6/25/2021,151.580,151.580,151.580,0.000,54739 ATHEFI,D,6/28/2021,150.630,150.630,150.630,0.000,54739 ATHEFI,D,6/29/2021,149.210,149.210,149.210,0.000,54739 ATHEFI,D,6/30/2021,148.350,148.350,148.350,0.000,54739 ATHEFI,D,7/1/2021,148.800,148.800,148.800,0.000,54739 ATHEFI,D,7/2/2021,149.150,149.150,149.150,0.000,54739 ATHEFI,D,7/5/2021,147.490,147.490,147.490,0.000,54739 ATHEFI,D,7/6/2021,147.850,147.850,147.850,0.000,54739 ATHEFI,D,7/7/2021,147.820,147.820,147.820,0.000,54739 ATHEFI,D,7/9/2021,147.560,147.560,147.560,0.000,54739 ATHEFI,D,7/12/2021,147.130,147.130,147.130,0.000,54739 ATHEFI,D,7/13/2021,146.870,146.870,146.870,0.000,54739 ATHEFI,D,7/14/2021,147.280,147.280,147.280,0.000,54739 ATHEFI,D,7/15/2021,146.340,146.340,146.340,0.000,54739 ATHEFI,D,7/16/2021,146.690,146.690,146.690,0.000,54739 ATHEFI,D,7/19/2021,141.270,141.270,141.270,0.000,54739 ATHEFI,D,7/20/2021,142.380,142.380,142.380,0.000,54739 ATHEFI,D,7/21/2021,145.160,145.160,145.160,0.000,54739 ATHEFI,D,7/22/2021,145.950,145.950,145.950,0.000,54739 ATHEFI,D,7/23/2021,146.790,146.790,146.790,0.000,54739 ATHEFI,D,7/26/2021,148.070,148.070,148.070,0.000,54739 ATHEFI,D,7/27/2021,148.840,148.840,148.840,0.000,54739 ATHEFI,D,7/28/2021,149.480,149.480,149.480,0.000,54739 ATHEFI,D,7/29/2021,149.830,149.830,149.830,0.000,54739 ATHEFI,D,7/30/2021,150.570,150.570,150.570,0.000,54739 ATHEFI,D,8/2/2021,151.860,151.860,151.860,0.000,54739 ATHEFI,D,8/3/2021,151.010,151.010,151.010,0.000,54739 ATHEFI,D,8/4/2021,151.240,151.240,151.240,0.000,54739 ATHEFI,D,8/5/2021,152.030,152.030,152.030,0.000,54739 ATHEFI,D,8/6/2021,150.760,150.760,150.760,0.000,54739 ATHEFI,D,8/10/2021,151.830,151.830,151.830,0.000,54739 ATHEFI,D,8/11/2021,152.200,152.200,152.200,0.000,54739 ATHEFI,D,8/13/2021,152.090,152.090,152.090,0.000,54739 ATHEFI,D,8/16/2021,152.700,152.700,152.700,0.000,54739 ATHEFI,D,8/17/2021,152.740,152.740,152.740,0.000,54739 ATHEFI,D,8/19/2021,149.950,149.950,149.950,0.000,54739 ATHEFI,D,8/20/2021,150.910,150.910,150.910,0.000,54739 ATHEFI,D,8/23/2021,153.010,153.010,153.010,0.000,54739 ATHEFI,D,8/24/2021,154.540,154.540,154.540,0.000,54739 ATHEFI,D,8/25/2021,155.640,155.640,155.640,0.000,54739 ATHEFI,D,8/26/2021,155.280,155.280,155.280,0.000,54739 ATHEFI,D,8/27/2021,155.270,155.270,155.270,0.000,54739 ATHEFI,D,8/30/2021,157.130,157.130,157.130,0.000,54739 ATHEFI,D,8/31/2021,156.640,156.640,156.640,0.000,54739 ATHEFI,D,9/1/2021,156.010,156.010,156.010,0.000,54739 ATHEFI,D,9/2/2021,155.850,155.850,155.850,0.000,54739 ATHEFI,D,9/3/2021,156.120,156.120,156.120,0.000,54739 ATHEFI,D,9/6/2021,155.970,155.970,155.970,0.000,54739 ATHEFI,D,9/7/2021,155.460,155.460,155.460,0.000,54739 ATHEFI,D,9/8/2021,155.070,155.070,155.070,0.000,54739 ATHEFI,D,9/9/2021,153.840,153.840,153.840,0.000,54739 ATHEFI,D,9/10/2021,153.410,153.410,153.410,0.000,54739 ATHEFI,D,9/13/2021,154.310,154.310,154.310,0.000,54739 ATHEFI,D,9/14/2021,154.390,154.390,154.390,0.000,54739 ATHEFI,D,9/16/2021,155.000,155.000,155.000,0.000,54739 ATHEFI,D,9/17/2021,155.010,155.010,155.010,0.000,54739 ATHEFI,D,9/20/2021,151.320,151.320,151.320,0.000,54739 ATHEFI,D,9/21/2021,151.400,151.400,151.400,0.000,54739 ATHEFI,D,9/22/2021,152.520,152.520,152.520,0.000,54739 ATHEFI,D,9/23/2021,150.030,150.030,150.030,0.000,54739 ATHEFI,D,9/24/2021,148.860,148.860,148.860,0.000,54739 ATHEFI,D,9/27/2021,148.390,148.390,148.390,0.000,54739 ATHEFI,D,9/28/2021,145.860,145.860,145.860,0.000,54739 ATHEFI,D,9/29/2021,146.320,146.320,146.320,0.000,54739 ATHEFI,D,9/30/2021,146.170,146.170,146.170,0.000,54739 ATHEFI,D,10/1/2021,147.130,147.130,147.130,0.000,54739 ATHEFI,D,10/4/2021,147.010,147.010,147.010,0.000,54739 ATHEFI,D,10/5/2021,149.420,149.420,149.420,0.000,54739 ATHEFI,D,10/6/2021,148.230,148.230,148.230,0.000,54739 ATHEFI,D,10/7/2021,150.220,150.220,150.220,0.000,54739 ATHEFI,D,10/8/2021,150.610,150.610,150.610,0.000,54739 ATHEFI,D,10/11/2021,149.570,149.570,149.570,0.000,54739 ATHEFI,D,10/12/2021,149.530,149.530,149.530,0.000,54739 ATHEFI,D,10/13/2021,149.220,149.220,149.220,0.000,54739 ATHEFI,D,10/14/2021,149.650,149.650,149.650,0.000,54739 ATHEFI,D,10/15/2021,150.920,150.920,150.920,0.000,54739 ATHEFI,D,10/18/2021,150.620,150.620,150.620,0.000,54739 ATHEFI,D,10/19/2021,151.930,151.930,151.930,0.000,54739 ATHEFI,D,10/20/2021,153.780,153.780,153.780,0.000,54739 ATHEFI,D,10/21/2021,153.680,153.680,153.680,0.000,54739 ATHEFI,D,10/22/2021,154.180,154.180,154.180,0.000,54739 ATHEFI,D,10/25/2021,153.560,153.560,153.560,0.000,54739 ATHEFI,D,10/26/2021,153.750,153.750,153.750,0.000,54739 ATHEFI,D,10/27/2021,154.350,154.350,154.350,0.000,54739 ATHEFI,D,10/29/2021,153.570,153.570,153.570,0.000,54739 ATHEFI,D,11/1/2021,154.270,154.270,154.270,0.000,54739 ATHEFI,D,11/2/2021,153.960,153.960,153.960,0.000,54739 ATHEFI,D,11/3/2021,154.600,154.600,154.600,0.000,54739 ATHEFI,D,11/4/2021,154.680,154.680,154.680,0.000,54739 ATHEFI,D,11/5/2021,154.620,154.620,154.620,0.000,54739 ATHEFI,D,11/8/2021,157.170,157.170,157.170,0.000,54739 ATHEFI,D,11/9/2021,156.900,156.900,156.900,0.000,54739 ATHEFI,D,11/10/2021,157.330,157.330,157.330,0.000,54739 ATHEFI,D,11/11/2021,156.690,156.690,156.690,0.000,54739 ATHEFI,D,11/12/2021,156.170,156.170,156.170,0.000,54739 ATHEFI,D,11/15/2021,156.220,156.220,156.220,0.000,54739 ATHEFI,D,11/16/2021,155.350,155.350,155.350,0.000,54739 ATHEFI,D,11/17/2021,157.020,157.020,157.020,0.000,54739 ATHEFI,D,11/18/2021,157.450,157.450,157.450,0.000,54739 ATHEFI,D,11/19/2021,156.410,156.410,156.410,0.000,54739 ATHEFI,D,11/22/2021,155.040,155.040,155.040,0.000,54739 ATHEFI,D,11/23/2021,152.390,152.390,152.390,0.000,54739 ATHEFI,D,11/24/2021,151.860,151.860,151.860,0.000,54739 ATHEFI,D,11/25/2021,153.830,153.830,153.830,0.000,54739 ATHEFI,D,11/26/2021,147.180,147.180,147.180,0.000,54739 ATHEFI,D,11/29/2021,149.650,149.650,149.650,0.000,54739 ATHEFI,D,11/30/2021,149.440,149.440,149.440,0.000,54739 ATHEFI,D,12/1/2021,150.910,150.910,150.910,0.000,54739 ATHEFI,D,12/2/2021,150.210,150.210,150.210,0.000,54739 ATHEFI,D,12/3/2021,150.610,150.610,150.610,0.000,54739 ATHEFI,D,12/6/2021,150.610,150.610,150.610,0.000,54739 ATHEFI,D,12/7/2021,152.470,152.470,152.470,0.000,54739 ATHEFI,D,12/8/2021,152.740,152.740,152.740,0.000,54739 ATHEFI,D,12/9/2021,153.130,153.130,153.130,0.000,54739 ATHEFI,D,12/10/2021,153.130,153.130,153.130,0.000,54739 ATHEFI,D,12/13/2021,151.410,151.410,151.410,0.000,54739 ATHEFI,D,12/14/2021,150.540,150.540,150.540,0.000,54739 ATHEFI,D,12/15/2021,150.600,150.600,150.600,0.000,54739 ATHEFI,D,12/16/2021,152.490,152.490,152.490,0.000,54739 ATHEFI,D,12/17/2021,151.270,151.270,151.270,0.000,54739 ATHEFI,D,12/20/2021,149.690,149.690,149.690,0.000,54739 ATHEFI,D,12/21/2021,150.400,150.400,150.400,0.000,54739 ATHEFI,D,12/22/2021,150.260,150.260,150.260,0.000,54739 ATHEFI,D,12/23/2021,152.140,152.140,152.140,0.000,54739 ATHEFI,D,12/24/2021,151.920,151.920,151.920,0.000,54739 ATHEFI,D,12/28/2021,152.240,152.240,152.240,0.000,54739 ATHEFI,D,12/29/2021,152.340,152.340,152.340,0.000,54739 ATHEFI,D,12/30/2021,152.350,152.350,152.350,0.000,54739 ATHEFI,D,12/31/2021,152.980,152.980,152.980,0.000,55000 ATHEFI,D,1/1/2022,152.980,152.980,152.980,0.000,55000 ATHEFI,D,1/3/2022,153.680,153.680,153.680,0.000,55000 ATHEFI,D,1/4/2022,154.550,154.550,154.550,0.000,55000 ATHEFI,D,1/5/2022,154.290,154.290,154.290,0.000,55000 ATHEFI,D,1/7/2022,154.700,154.700,154.700,0.000,55000 ATHEFI,D,1/10/2022,156.100,156.100,156.100,0.000,55000 ATHEFI,D,1/11/2022,158.230,158.230,158.230,0.000,55000 ATHEFI,D,1/12/2022,161.240,161.240,161.240,0.000,55000 ATHEFI,D,1/13/2022,161.740,161.740,161.740,0.000,55000 ATHEFI,D,1/14/2022,160.940,160.940,160.940,0.000,55000 ATHEFI,D,1/17/2022,162.140,162.140,162.140,0.000,55000 ATHEFI,D,1/18/2022,160.570,160.570,160.570,0.000,55000 ATHEFI,D,1/19/2022,161.450,161.450,161.450,0.000,55083 ATHEFI,D,1/20/2022,162.200,162.200,162.200,0.000,55083 ATHEFI,D,1/21/2022,159.690,159.690,159.690,0.000,55083 ATHEFI,D,1/25/2022,155.340,155.340,155.340,0.000,55083 ATHEFI,D,1/26/2022,158.400,158.400,158.400,0.000,55083 ATHEFI,D,1/27/2022,158.600,158.600,158.600,0.000,55083 ATHEFI,D,1/28/2022,157.160,157.160,157.160,0.000,55083 ATHEFI,D,1/31/2022,159.230,159.230,159.230,0.000,55083 ATHEFI,D,2/1/2022,161.230,161.230,161.230,0.000,55083 ATHEFI,D,2/2/2022,161.920,161.920,161.920,0.000,55083 ATHEFI,D,2/3/2022,160.630,160.630,160.630,0.000,55083 ATHEFI,D,2/4/2022,160.790,160.790,160.790,0.000,55083 ATHEFI,D,2/7/2022,159.370,159.370,159.370,0.000,55083 ATHEFI,D,2/8/2022,159.330,159.330,159.330,0.000,55083 ATHEFI,D,2/9/2022,161.700,161.700,161.700,0.000,55083 ATHEFI,D,2/10/2022,162.180,162.180,162.180,0.000,55083 ATHEFI,D,2/11/2022,163.410,163.410,163.410,0.000,55083 ATHEFI,D,2/14/2022,160.110,160.110,160.110,0.000,56613 ATHEFI,D,2/15/2022,162.050,162.050,162.050,0.000,56613 ATHEFI,D,2/16/2022,162.810,162.810,162.810,0.000,56613 ATHEFI,D,2/17/2022,161.300,161.300,161.300,0.000,56613 ATHEFI,D,2/18/2022,161.510,161.510,161.510,0.000,56613 ATHEFI,D,2/21/2022,160.950,160.950,160.950,0.000,56613 ATHEFI,D,2/22/2022,159.690,159.690,159.690,0.000,56613 ATHEFI,D,2/24/2022,149.730,149.730,149.730,0.000,56613 ATHEFI,D,2/25/2022,156.500,156.500,156.500,0.000,56613 ATHEFI,D,2/28/2022,151.120,151.120,151.120,0.000,56613 ATHEFI,D,3/1/2022,147.170,147.170,147.170,0.000,56613 ATHEFI,D,3/2/2022,145.080,145.080,145.080,0.000,56613 ATHEFI,D,3/3/2022,146.610,146.610,146.610,0.000,56613 ATHEFI,D,3/4/2022,140.730,140.730,140.730,0.000,56613 ATHEFI,D,3/8/2022,135.200,135.200,135.200,0.000,56613 ATHEFI,D,3/9/2022,140.950,140.950,140.950,0.000,56613 ATHEFI,D,3/10/2022,137.920,137.920,137.920,0.000,56613 ATHEFI,D,3/11/2022,141.740,141.740,141.740,0.000,56613 ATHEFI,D,3/14/2022,142.490,142.490,142.490,0.000,56613 ATHEFI,D,3/15/2022,141.980,141.980,141.980,0.000,56613 ATHEFI,D,3/16/2022,148.750,148.750,148.750,0.000,56613 ATHEFI,D,3/17/2022,146.780,146.780,146.780,0.000,56613 ATHEFI,D,3/18/2022,147.060,147.060,147.060,0.000,56613 ATHEFI,D,3/21/2022,146.590,146.590,146.590,0.000,56613 ATHEFI,D,3/22/2022,147.660,147.660,147.660,0.000,57364 ATHEFI,D,3/23/2022,145.850,145.850,145.850,0.000,57364 ATHEFI,D,3/24/2022,144.060,144.060,144.060,0.000,57364 ATHEFI,D,3/28/2022,146.540,146.540,146.540,0.000,57364 ATHEFI,D,3/29/2022,150.260,150.260,150.260,0.000,57364 ATHEFI,D,3/30/2022,149.650,149.650,149.650,0.000,57364 ATHEFI,D,3/31/2022,149.380,149.380,149.380,0.000,58500 ATHEFI,D,4/1/2022,150.990,150.990,150.990,0.000,58500 ATHEFI,D,4/4/2022,151.290,151.290,151.290,0.000,58500 ATHEFI,D,4/5/2022,150.970,150.970,150.970,0.000,58500 ATHEFI,D,4/6/2022,149.760,149.760,149.760,0.000,58500 ATHEFI,D,4/7/2022,150.770,150.770,150.770,0.000,58500 ATHEFI,D,4/8/2022,153.070,153.070,153.070,0.000,58500 ATHEFI,D,4/11/2022,154.290,154.290,154.290,0.000,58500 ATHEFI,D,4/12/2022,154.720,154.720,154.720,0.000,58500 ATHEFI,D,4/13/2022,155.280,155.280,155.280,0.000,58500 ATHEFI,D,4/14/2022,154.420,154.420,154.420,0.000,58500 ATHEFI,D,4/15/2022,154.420,154.420,154.420,0.000,58500 ATHEFI,D,4/18/2022,154.400,154.400,154.400,0.000,58500 ATHEFI,D,4/20/2022,157.150,157.150,157.150,0.000,58500 ATHEFI,D,4/21/2022,158.410,158.410,158.410,0.000,59406 ATHEFI,D,4/27/2022,153.330,153.330,153.330,0.000,59406 ATHEFI,D,4/28/2022,153.960,153.960,153.960,0.000,59406 ATHEFI,D,4/29/2022,153.640,153.640,153.640,0.000,59406 ATHEFI,D,5/3/2022,150.220,150.220,150.220,0.000,59406 ATHEFI,D,5/4/2022,149.960,149.960,149.960,0.000,59406 ATHEFI,D,5/5/2022,147.760,147.760,147.760,0.000,59406 ATHEFI,D,5/6/2022,144.440,144.440,144.440,0.000,59406 ATHEFI,D,5/9/2022,143.540,143.540,143.540,0.000,59406 ATHEFI,D,5/10/2022,143.260,143.260,143.260,0.000,59406 ATHEFI,D,5/11/2022,144.020,144.020,144.020,0.000,59298 ATHEFI,D,5/12/2022,140.320,140.320,140.320,0.000,59298 ATHEFI,D,5/13/2022,142.670,142.670,142.670,0.000,59298 ATHEFI,D,5/16/2022,141.900,141.900,141.900,0.000,59298 ATHEFI,D,5/17/2022,143.770,143.770,143.770,0.000,59298 ATHEFI,D,5/18/2022,144.170,144.170,144.170,0.000,59298 ATHEFI,D,5/19/2022,141.430,141.430,141.430,0.000,59298 ATHEFI,D,5/20/2022,143.380,143.380,143.380,0.000,59298 ATHEFI,D,5/23/2022,143.140,143.140,143.140,0.000,59298 ATHEFI,D,5/24/2022,143.950,143.950,143.950,0.000,59298 ATHEFI,D,5/25/2022,145.160,145.160,145.160,0.000,59298 ATHEFI,D,5/26/2022,147.350,147.350,147.350,0.000,59298 ATHEFI,D,5/27/2022,148.340,148.340,148.340,0.000,59298 ATHEFI,D,5/30/2022,148.530,148.530,148.530,0.000,59298 ATHEFI,D,5/31/2022,148.440,148.440,148.440,0.000,59298 ATHEFI,D,6/1/2022,149.480,149.480,149.480,0.000,59298 ATHEFI,D,6/2/2022,148.330,148.330,148.330,0.000,59298 ATHEFI,D,6/3/2022,149.440,149.440,149.440,0.000,59298 ATHEFI,D,6/6/2022,149.290,149.290,149.290,0.000,59298 ATHEFI,D,6/7/2022,148.040,148.040,148.040,0.000,59298 ATHEFI,D,6/8/2022,148.220,148.220,148.220,0.000,59298 ATHEFI,D,6/9/2022,147.130,147.130,147.130,0.000,59298 ATHEFI,D,6/10/2022,143.710,143.710,143.710,0.000,59298 ATHEFI,D,6/14/2022,137.440,137.440,137.440,0.000,59298 ATHEFI,D,6/15/2022,139.000,139.000,139.000,0.000,59298 ATHEFI,D,6/16/2022,135.270,135.270,135.270,0.000,59298 ATHEFI,D,6/17/2022,136.690,136.690,136.690,0.000,59298 ATHEFI,D,6/20/2022,137.270,137.270,137.270,0.000,59298 ATHEFI,D,6/21/2022,139.270,139.270,139.270,0.000,59298 ATHEFI,D,6/22/2022,138.590,138.590,138.590,0.000,59298 ATHEFI,D,6/23/2022,138.390,138.390,138.390,0.000,59298 ATHEFI,D,6/24/2022,138.260,138.260,138.260,0.000,59298 ATHEFI,D,6/27/2022,136.570,136.570,136.570,0.000,59298 ATHEFI,D,6/28/2022,136.600,136.600,136.600,0.000,59298 ATHEFI,D,6/29/2022,136.160,136.160,136.160,0.000,59298 ATHEFI,D,6/30/2022,134.420,134.420,134.420,0.000,59298 ATHEFI,D,7/4/2022,133.990,133.990,133.990,0.000,59298 ATHEFI,D,7/5/2022,129.870,129.870,129.870,0.000,59298 ATHEFI,D,7/6/2022,130.180,130.180,130.180,0.000,59298 ATHEFI,D,7/7/2022,133.640,133.640,133.640,0.000,59298 ATHEFI,D,7/8/2022,134.150,134.150,134.150,0.000,59298 ATHEFI,D,7/12/2022,132.890,132.890,132.890,0.000,59298 ATHEFI,D,7/13/2022,134.400,134.400,134.400,0.000,59298 ATHEFI,D,7/14/2022,133.190,133.190,133.190,0.000,59298 ATHEFI,D,7/15/2022,132.990,132.990,132.990,0.000,59298 ATHEFI,D,7/18/2022,134.490,134.490,134.490,0.000,59298 ATHEFI,D,7/19/2022,134.680,134.680,134.680,0.000,59298 ATHEFI,D,7/20/2022,136.120,136.120,136.120,0.000,59298 ATHEFI,D,7/21/2022,137.750,137.750,137.750,0.000,59298 ATHEFI,D,7/22/2022,138.540,138.540,138.540,0.000,59298 ATHEFI,D,7/25/2022,138.910,138.910,138.910,0.000,59298 ATHEFI,D,7/26/2022,139.130,139.130,139.130,0.000,59298 ATHEFI,D,7/27/2022,139.230,139.230,139.230,0.000,59298 ATHEFI,D,7/28/2022,139.870,139.870,139.870,0.000,59298 ATHEFI,D,7/29/2022,141.200,141.200,141.200,0.000,59298 ATHEFI,D,8/1/2022,143.050,143.050,143.050,0.000,59298 ATHEFI,D,8/2/2022,143.840,143.840,143.840,0.000,59298 ATHEFI,D,8/3/2022,144.120,144.120,144.120,0.000,59298 ATHEFI,D,8/4/2022,143.500,143.500,143.500,0.000,59298 ATHEFI,D,8/5/2022,141.380,141.380,141.380,0.000,59298 ATHEFI,D,8/8/2022,143.120,143.120,143.120,0.000,59298 ATHEFI,D,8/9/2022,143.130,143.130,143.130,0.000,59298 ATHEFI,D,8/10/2022,145.140,145.140,145.140,0.000,59298 ATHEFI,D,8/11/2022,145.620,145.620,145.620,0.000,59298 ATHEFI,D,8/12/2022,145.270,145.270,145.270,0.000,59298 ATHEFI,D,8/16/2022,147.080,147.080,147.080,0.000,59298 ATHEFI,D,8/17/2022,147.170,147.170,147.170,0.000,59298 ATHEFI,D,8/18/2022,147.620,147.620,147.620,0.000,59298 ATHEFI,D,8/19/2022,147.540,147.540,147.540,0.000,59298 ATHEFI,D,8/22/2022,148.540,148.540,148.540,0.000,59298 ATHEFI,D,8/23/2022,147.860,147.860,147.860,0.000,59298 ATHEFI,D,8/24/2022,147.950,147.950,147.950,0.000,59298 ATHEFI,D,8/25/2022,149.120,149.120,149.120,0.000,59298 ATHEFI,D,8/26/2022,149.300,149.300,149.300,0.000,59298 ATHEFI,D,8/29/2022,145.610,145.610,145.610,0.000,59298 ATHEFI,D,8/30/2022,143.650,143.650,143.650,0.000,59298 ATHEFI,D,8/31/2022,143.610,143.610,143.610,0.000,59298 ATHEFI,D,9/1/2022,141.970,141.970,141.970,0.000,59298 ATHEFI,D,9/2/2022,142.030,142.030,142.030,0.000,59298 ATHEFI,D,9/5/2022,139.670,139.670,139.670,0.000,59298 ATHEFI,D,9/6/2022,140.190,140.190,140.190,0.000,59298 ATHEFI,D,9/7/2022,138.850,138.850,138.850,0.000,59298 ATHEFI,D,9/8/2022,139.210,139.210,139.210,0.000,59298 ATHEFI,D,9/9/2022,141.100,141.100,141.100,0.000,59298 ATHEFI,D,9/13/2022,141.430,141.430,141.430,0.000,59298 ATHEFI,D,9/14/2022,141.050,141.050,141.050,0.000,59298 ATHEFI,D,9/15/2022,141.700,141.700,141.700,0.000,59298 ATHEFI,D,9/16/2022,140.790,140.790,140.790,0.000,59298 ATHEFI,D,9/19/2022,140.770,140.770,140.770,0.000,59298 ATHEFI,D,9/20/2022,141.110,141.110,141.110,0.000,59298 ATHEFI,D,9/21/2022,139.520,139.520,139.520,0.000,59298 ATHEFI,D,9/22/2022,138.470,138.470,138.470,0.000,59298 ATHEFI,D,9/23/2022,135.660,135.660,135.660,0.000,59298 ATHEFI,D,9/26/2022,134.140,134.140,134.140,0.000,59298 ATHEFI,D,9/27/2022,134.940,134.940,134.940,0.000,59298 ATHEFI,D,9/28/2022,134.670,134.670,134.670,0.000,59298 ATHEFI,D,9/29/2022,133.940,133.940,133.940,0.000,59298 ATHEFI,D,9/30/2022,134.200,134.200,134.200,0.000,59298 ATHEFI,D,10/3/2022,135.430,135.430,135.430,0.000,59298 ATHEFI,D,10/4/2022,137.840,137.840,137.840,0.000,59298 ATHEFI,D,10/5/2022,137.340,137.340,137.340,0.000,59298 ATHEFI,D,10/6/2022,136.900,136.900,136.900,0.000,59298 ATHEFI,D,10/7/2022,136.830,136.830,136.830,0.000,59298 ATHEFI,D,10/10/2022,136.480,136.480,136.480,0.000,59298 ATHEFI,D,10/11/2022,135.580,135.580,135.580,0.000,59298 ATHEFI,D,10/12/2022,136.780,136.780,136.780,0.000,59298 ATHEFI,D,10/13/2022,136.580,136.580,136.580,0.000,59298 ATHEFI,D,10/14/2022,138.550,138.550,138.550,0.000,59298 ATHEFI,D,10/17/2022,139.730,139.730,139.730,0.000,59298 ATHEFI,D,10/18/2022,141.080,141.080,141.080,0.000,59298 ATHEFI,D,10/19/2022,140.780,140.780,140.780,0.000,59298 ATHEFI,D,10/20/2022,141.930,141.930,141.930,0.000,59298 ATHEFI,D,10/21/2022,142.310,142.310,142.310,0.000,59298 ATHEFI,D,10/24/2022,143.830,143.830,143.830,0.000,59298 ATHEFI,D,10/25/2022,143.600,143.600,143.600,0.000,59298 ATHEFI,D,10/26/2022,143.780,143.780,143.780,0.000,59298 ATHEFI,D,10/27/2022,143.760,143.760,143.760,0.000,59298 ATHEFI,D,11/1/2022,144.560,144.560,144.560,0.000,59298 ATHEFI,D,11/2/2022,145.270,145.270,145.270,0.000,59298 ATHEFI,D,11/3/2022,144.040,144.040,144.040,0.000,59298 ATHEFI,D,11/4/2022,146.500,146.500,146.500,0.000,59298 ATHEFI,D,11/7/2022,147.170,147.170,147.170,0.000,59298 ATHEFI,D,11/8/2022,146.910,146.910,146.910,0.000,59298 ATHEFI,D,11/9/2022,147.500,147.500,147.500,0.000,59298 ATHEFI,D,11/10/2022,148.760,148.760,148.760,0.000,59298 ATHEFI,D,11/11/2022,149.170,149.170,149.170,0.000,59298 ATHEFI,D,11/14/2022,149.920,149.920,149.920,0.000,59298 ATHEFI,D,11/15/2022,150.330,150.330,150.330,0.000,59298 ATHEFI,D,11/16/2022,147.720,147.720,147.720,0.000,59298 ATHEFI,D,11/17/2022,147.390,147.390,147.390,0.000,59298 ATHEFI,D,11/18/2022,148.220,148.220,148.220,0.000,59298 ATHEFI,D,11/21/2022,148.780,148.780,148.780,0.000,59298 ATHEFI,D,11/22/2022,149.780,149.780,149.780,0.000,59298 ATHEFI,D,11/23/2022,150.820,150.820,150.820,0.000,59298 ATHEFI,D,11/24/2022,152.630,152.630,152.630,0.000,59298 ATHEFI,D,11/25/2022,152.500,152.500,152.500,0.000,59298 ATHEFI,D,11/28/2022,151.170,151.170,151.170,0.000,59298 ATHEFI,D,11/29/2022,151.810,151.810,151.810,0.000,59298 ATHEFI,D,11/30/2022,152.000,152.000,152.000,0.000,59298 ATHEFI,D,12/1/2022,153.330,153.330,153.330,0.000,59298 ATHEFI,D,12/2/2022,150.490,150.490,150.490,0.000,60185 ATHEFI,D,12/5/2022,150.530,150.530,150.530,0.000,60185 ATHEFI,D,12/6/2022,150.630,150.630,150.630,0.000,60185 ATHEFI,D,12/7/2022,151.520,151.520,151.520,0.000,60185 ATHEFI,D,12/8/2022,152.240,152.240,152.240,0.000,60185 ATHEFI,D,12/9/2022,152.750,152.750,152.750,0.000,60185 ATHEFI,D,12/12/2022,152.200,152.200,152.200,0.000,60185 ATHEFI,D,12/13/2022,153.460,153.460,153.460,0.000,60185 ATHEFI,D,12/14/2022,154.220,154.220,154.220,0.000,60185 ATHEFI,D,12/15/2022,153.240,153.240,153.240,0.000,60185 ATHEFI,D,12/16/2022,152.650,152.650,152.650,0.000,60185 ATHEFI,D,12/19/2022,153.100,153.100,153.100,0.000,60185 ATHEFI,D,12/20/2022,153.100,153.100,153.100,0.000,60185 ATHEFI,D,12/21/2022,154.520,154.520,154.520,0.000,60185 ATHEFI,D,12/22/2022,154.680,154.680,154.680,0.000,60185 ATHEFI,D,12/23/2022,155.050,155.050,155.050,0.000,60185 ATHEFI,D,12/27/2022,155.580,155.580,155.580,0.000,60185 ATHEFI,D,12/28/2022,155.670,155.670,155.670,0.000,60185 ATHEFI,D,12/29/2022,155.360,155.360,155.360,0.000,60185 ATHEFI,D,12/30/2022,156.550,156.550,156.550,0.000,60185 ATHEFI,D,1/2/2023,157.840,157.840,157.840,0.000,60185 ATHEFI,D,1/3/2023,158.870,158.870,158.870,0.000,60185 ATHEFI,D,1/4/2023,159.580,159.580,159.580,0.000,60185 ATHEFI,D,1/5/2023,160.500,160.500,160.500,0.000,60185 ATHEFI,D,1/9/2023,162.520,162.520,162.520,0.000,60185 ATHEFI,D,1/10/2023,162.180,162.180,162.180,0.000,60185 ATHEFI,D,1/11/2023,162.790,162.790,162.790,0.000,60185 ATHEFI,D,1/12/2023,163.160,163.160,163.160,0.000,60185 ATHEFI,D,1/13/2023,164.010,164.010,164.010,0.000,60185 ATHEFI,D,1/16/2023,166.070,166.070,166.070,0.000,60185 ATHEFI,D,1/17/2023,167.050,167.050,167.050,0.000,60185 ATHEFI,D,1/18/2023,167.390,167.390,167.390,0.000,60221 ATHEFI,D,1/19/2023,164.380,164.380,164.380,0.000,60338 ATHEFI,D,1/20/2023,166.250,166.250,166.250,0.000,60338 ATHEFI,D,1/23/2023,169.390,169.390,169.390,0.000,60338 ATHEFI,D,1/24/2023,168.680,168.680,168.680,0.000,60338 ATHEFI,D,1/25/2023,168.400,168.400,168.400,0.000,60338 ATHEFI,D,1/26/2023,170.240,170.240,170.240,0.000,60338 ATHEFI,D,1/27/2023,171.840,171.840,171.840,0.000,60338 ATHEFI,D,1/30/2023,173.350,173.350,173.350,0.000,60354 ATHEFI,D,1/31/2023,173.020,173.020,173.020,0.000,60354 ATHEFI,D,2/1/2023,173.680,173.680,173.680,0.000,60354 ATHEFI,D,2/2/2023,174.130,174.130,174.130,0.000,60354 ATHEFI,D,2/3/2023,174.840,174.840,174.840,0.000,60354 ATHEFI,D,2/6/2023,174.570,174.570,174.570,0.000,60417 ATHEFI,D,2/7/2023,175.740,175.740,175.740,0.000,60417 ATHEFI,D,2/8/2023,178.970,178.970,178.970,0.000,60417 ATHEFI,D,2/9/2023,180.850,180.850,180.850,0.000,60417 ATHEFI,D,2/10/2023,180.480,180.480,180.480,0.000,60417 ATHEFI,D,2/13/2023,183.910,183.910,183.910,0.000,60417 ATHEFI,D,2/14/2023,183.210,183.210,183.210,0.000,60417 ATHEFI,D,2/15/2023,182.760,182.760,182.760,0.000,60523 ATHEFI,D,2/16/2023,182.720,182.720,182.720,0.000,60523 ATHEFI,D,2/17/2023,184.860,184.860,184.860,0.000,60523 ATHEFI,D,2/20/2023,188.000,188.000,188.000,0.000,60523 ATHEFI,D,2/21/2023,187.820,187.820,187.820,0.000,60880 ATHEFI,D,2/22/2023,184.150,184.150,184.150,0.000,60880 ATHEFI,D,2/23/2023,186.920,186.920,186.920,0.000,60880 ATHEFI,D,2/24/2023,185.970,185.970,185.970,0.000,60880 ATHEFI,D,2/28/2023,188.500,188.500,188.500,0.000,60880 ATHEFI,D,3/1/2023,188.940,188.940,188.940,0.000,62339 ATHEFI,D,3/2/2023,186.570,186.570,186.570,0.000,62339 ATHEFI,D,3/3/2023,185.910,185.910,185.910,0.000,65185 ATHEFI,D,3/6/2023,180.630,180.630,180.630,0.000,65185 ATHEFI,D,3/7/2023,180.020,180.020,180.020,0.000,66015 ATHEFI,D,3/8/2023,179.420,179.420,179.420,0.000,66015 ATHEFI,D,3/9/2023,180.280,180.280,180.280,0.000,66015 ATHEFI,D,3/10/2023,176.640,176.640,176.640,0.000,66015 ATHEFI,D,3/13/2023,175.470,175.470,175.470,0.000,66015 ATHEFI,D,3/14/2023,179.480,179.480,179.480,0.000,66015 ATHEFI,D,3/15/2023,171.990,171.990,171.990,0.000,66015 ATHEFI,D,3/16/2023,172.710,172.710,172.710,0.000,66015 ATHEFI,D,3/17/2023,170.750,170.750,170.750,0.000,66015 ATHEFI,D,3/20/2023,172.020,172.020,172.020,0.000,66015 ATHEFI,D,3/21/2023,176.460,176.460,176.460,0.000,66015 ATHEFI,D,3/22/2023,175.710,175.710,175.710,0.000,66015 ATHEFI,D,3/23/2023,177.140,177.140,177.140,0.000,66015 ATHEFI,D,3/24/2023,172.380,172.380,172.380,0.000,66015 ATHEFI,D,3/27/2023,174.600,174.600,174.600,0.000,66015 ATHEFI,D,3/28/2023,172.810,172.810,172.810,0.000,66015 ATHEFI,D,3/29/2023,173.940,173.940,173.940,0.000,66015 ATHEFI,D,3/30/2023,176.040,176.040,176.040,0.000,66015 ATHEFI,D,3/31/2023,177.220,177.220,177.220,0.000,66015 ATHEFI,D,4/3/2023,178.890,178.890,178.890,0.000,66015 ATHEFI,D,4/4/2023,179.390,179.390,179.390,0.000,66015 ATHEFI,D,4/5/2023,179.440,179.440,179.440,0.000,66684 ATHEFI,D,4/6/2023,180.080,180.080,180.080,0.000,66684 ATHEFI,D,4/7/2023,180.080,180.080,180.080,0.000,66684 ATHEFI,D,4/10/2023,180.050,180.050,180.050,0.000,66684 ATHEFI,D,4/11/2023,183.170,183.170,183.170,0.000,66684 ATHEFI,D,4/12/2023,184.170,184.170,184.170,0.000,66684 ATHEFI,D,4/13/2023,185.470,185.470,185.470,0.000,66684 ATHEFI,D,4/18/2023,187.740,187.740,187.740,0.000,66684 ATHEFI,D,4/19/2023,186.290,186.290,186.290,0.000,66791 ATHEFI,D,4/20/2023,185.480,185.480,185.480,0.000,66791 ATHEFI,D,4/21/2023,186.470,186.470,186.470,0.000,66791 ATHEFI,D,4/24/2023,185.670,185.670,185.670,0.000,66791 ATHEFI,D,4/25/2023,183.200,183.200,183.200,0.000,66791 ATHEFI,D,4/26/2023,184.100,184.100,184.100,0.000,66791 ATHEFI,D,4/27/2023,184.260,184.260,184.260,0.000,66791 ATHEFI,D,4/28/2023,182.710,182.710,182.710,0.000,66791 ATHEFI,D,5/2/2023,183.050,183.050,183.050,0.000,66791 ATHEFI,D,5/3/2023,183.770,183.770,183.770,0.000,66791 ATHEFI,D,5/4/2023,183.640,183.640,183.640,0.000,66791 ATHEFI,D,5/5/2023,185.360,185.360,185.360,0.000,66791 ATHEFI,D,5/8/2023,187.380,187.380,187.380,0.000,67060 ATHEFI,D,5/9/2023,187.450,187.450,187.450,0.000,67060 ATHEFI,D,5/10/2023,188.390,188.390,188.390,0.000,67060 ATHEFI,D,5/11/2023,186.780,186.780,186.780,0.000,67060 ATHEFI,D,5/12/2023,187.020,187.020,187.020,0.000,67060 ATHEFI,D,5/15/2023,186.880,186.880,186.880,0.000,67060 ATHEFI,D,5/16/2023,189.400,189.400,189.400,0.000,67060 ATHEFI,D,5/17/2023,188.690,188.690,188.690,0.000,67060 ATHEFI,D,5/18/2023,187.760,187.760,187.760,0.000,67060 ATHEFI,D,5/19/2023,188.350,188.350,188.350,0.000,67060 ATHEFI,D,5/22/2023,199.610,199.610,199.610,0.000,67060 ATHEFI,D,5/23/2023,200.690,200.690,200.690,0.000,67060 ATHEFI,D,5/24/2023,199.180,199.180,199.180,0.000,67060 ATHEFI,D,5/25/2023,202.330,202.330,202.330,0.000,67060 ATHEFI,D,5/26/2023,204.910,204.910,204.910,0.000,67060 ATHEFI,D,5/29/2023,207.790,207.790,207.790,0.000,68412 ATHEFI,D,5/30/2023,205.890,205.890,205.890,0.000,68412 ATHEFI,D,5/31/2023,205.400,205.400,205.400,0.000,68412 ATHEFI,D,6/1/2023,203.970,203.970,203.970,0.000,68412 ATHEFI,D,6/2/2023,205.320,205.320,205.320,0.000,68412 ATHEFI,D,6/6/2023,210.040,210.040,210.040,0.000,68412 ATHEFI,D,6/7/2023,210.840,210.840,210.840,0.000,68412 ATHEFI,D,6/8/2023,212.510,212.510,212.510,0.000,69726 ATHEFI,D,6/9/2023,213.590,213.590,213.590,0.000,69726 ATHEFI,D,6/12/2023,213.400,213.400,213.400,0.000,69726 ATHEFI,D,6/13/2023,213.600,213.600,213.600,0.000,69726 ATHEFI,D,6/14/2023,214.950,214.950,214.950,0.000,69726 ATHEFI,D,6/15/2023,214.350,214.350,214.350,0.000,69726 ATHEFI,D,6/16/2023,215.660,215.660,215.660,0.000,69726 ATHEFI,D,6/19/2023,214.060,214.060,214.060,0.000,69726 ATHEFI,D,6/20/2023,213.090,213.090,213.090,0.000,68978 ATHEFI,D,6/21/2023,214.200,214.200,214.200,0.000,68978 ATHEFI,D,6/22/2023,212.420,212.420,212.420,0.000,68978 ATHEFI,D,6/23/2023,213.220,213.220,213.220,0.000,68978 ATHEFI,D,6/26/2023,208.160,208.160,208.160,0.000,68978 ATHEFI,D,6/27/2023,209.230,209.230,209.230,0.000,68978 ATHEFI,D,6/28/2023,211.630,211.630,211.630,0.000,68978 ATHEFI,D,6/29/2023,216.980,216.980,216.980,0.000,68978 ATHEFI,D,6/30/2023,217.100,217.100,217.100,0.000,68978 ATHEFI,D,7/3/2023,219.800,219.800,219.800,0.000,70360 ATHEFI,D,7/4/2023,221.250,221.250,221.250,0.000,70360 ATHEFI,D,7/5/2023,220.770,220.770,220.770,0.000,70812 ATHEFI,D,7/6/2023,218.690,218.690,218.690,0.000,70812 ATHEFI,D,7/7/2023,217.750,217.750,217.750,0.000,70812 ATHEFI,D,7/10/2023,220.020,220.020,220.020,0.000,70812 ATHEFI,D,7/11/2023,224.550,224.550,224.550,0.000,70812 ATHEFI,D,7/12/2023,225.610,225.610,225.610,0.000,70812 ATHEFI,D,7/13/2023,224.740,224.740,224.740,0.000,70812 ATHEFI,D,7/14/2023,225.490,225.490,225.490,0.000,70812 ATHEFI,D,7/17/2023,222.530,222.530,222.530,0.000,70812 ATHEFI,D,7/18/2023,224.650,224.650,224.650,0.000,70812 ATHEFI,D,7/19/2023,227.230,227.230,227.230,0.000,70812 ATHEFI,D,7/20/2023,228.330,228.330,228.330,0.000,70812 ATHEFI,D,7/21/2023,228.110,228.110,228.110,0.000,70812 ATHEFI,D,7/24/2023,228.060,228.060,228.060,0.000,70812 ATHEFI,D,7/25/2023,229.810,229.810,229.810,0.000,70812 ATHEFI,D,7/26/2023,229.440,229.440,229.440,0.000,70812 ATHEFI,D,7/27/2023,229.350,229.350,229.350,0.000,70812 ATHEFI,D,7/28/2023,227.640,227.640,227.640,0.000,70812 ATHEFI,D,7/31/2023,227.660,227.660,227.660,0.000,71603 ATHEFI,D,8/1/2023,225.890,225.890,225.890,0.000,71990 ATHEFI,D,8/2/2023,222.850,222.850,222.850,0.000,71990 ATHEFI,D,8/3/2023,224.490,224.490,224.490,0.000,71990 ATHEFI,D,8/4/2023,225.250,225.250,225.250,0.000,72880 ATHEFI,D,8/7/2023,225.380,225.380,225.380,0.000,72880 ATHEFI,D,8/8/2023,223.870,223.870,223.870,0.000,72880 ATHEFI,D,8/9/2023,224.540,224.540,224.540,0.000,72880 ATHEFI,D,8/10/2023,224.300,224.300,224.300,0.000,72880 ATHEFI,D,8/11/2023,219.630,219.630,219.630,0.000,72880 ATHEFI,D,8/14/2023,217.660,217.660,217.660,0.000,72880 ATHEFI,D,8/16/2023,218.060,218.060,218.060,0.000,72880 ATHEFI,D,8/17/2023,218.830,218.830,218.830,0.000,72880 ATHEFI,D,8/18/2023,215.080,215.080,215.080,0.000,72880 ATHEFI,D,8/21/2023,218.940,218.940,218.940,0.000,72880 ATHEFI,D,8/22/2023,221.920,221.920,221.920,0.000,72880 ATHEFI,D,8/23/2023,220.760,220.760,220.760,0.000,72880 ATHEFI,D,8/24/2023,221.390,221.390,221.390,0.000,72880 ATHEFI,D,8/25/2023,221.850,221.850,221.850,0.000,72880 ATHEFI,D,8/28/2023,224.470,224.470,224.470,0.000,72880 ATHEFI,D,8/29/2023,224.620,224.620,224.620,0.000,72880 ATHEFI,D,8/30/2023,224.180,224.180,224.180,0.000,72880 ATHEFI,D,8/31/2023,223.440,223.440,223.440,0.000,72880 ATHEFI,D,9/1/2023,221.260,221.260,221.260,0.000,72880 ATHEFI,D,9/4/2023,215.540,215.540,215.540,0.000,72880 ATHEFI,D,9/5/2023,217.140,217.140,217.140,0.000,72880 ATHEFI,D,9/6/2023,216.970,216.970,216.970,0.000,73111 ATHEFI,D,9/7/2023,212.120,212.120,212.120,0.000,73111 ATHEFI,D,9/8/2023,214.240,214.240,214.240,0.000,73111 ATHEFI,D,9/11/2023,212.350,212.350,212.350,0.000,73111 ATHEFI,D,9/12/2023,211.470,211.470,211.470,0.000,73111 ATHEFI,D,9/13/2023,207.740,207.740,207.740,0.000,73111 ATHEFI,D,9/14/2023,209.230,209.230,209.230,0.000,73111 ATHEFI,D,9/15/2023,212.950,212.950,212.950,0.000,73111 ATHEFI,D,9/18/2023,212.420,212.420,212.420,0.000,73111 ATHEFI,D,9/19/2023,207.700,207.700,207.700,0.000,73111 ATHEFI,D,9/20/2023,202.710,202.710,202.710,0.000,73111 ATHEFI,D,9/21/2023,203.070,203.070,203.070,0.000,73111 ATHEFI,D,9/22/2023,206.500,206.500,206.500,0.000,73111 ATHEFI,D,9/25/2023,206.260,206.260,206.260,0.000,73886 ATHEFI,D,9/26/2023,206.280,206.280,206.280,0.000,73886 ATHEFI,D,9/27/2023,203.350,203.350,203.350,0.000,73886 ATHEFI,D,9/28/2023,201.420,201.420,201.420,0.000,73886 ATHEFI,D,9/29/2023,204.210,204.210,204.210,0.000,73886 ATHEFI,D,10/2/2023,201.580,201.580,201.580,0.000,73886 ATHEFI,D,10/3/2023,197.590,197.590,197.590,0.000,73886 ATHEFI,D,10/4/2023,197.860,197.860,197.860,0.000,74174 ATHEFI,D,10/5/2023,195.490,195.490,195.490,0.000,71969 ATHEFI,D,10/6/2023,193.170,193.170,193.170,0.000,71969 ATHEFI,D,10/9/2023,188.770,188.770,188.770,0.000,71969 ATHEFI,D,10/10/2023,196.340,196.340,196.340,0.000,71969 ATHEFI,D,10/11/2023,199.440,199.440,199.440,0.000,71969 ATHEFI,D,10/12/2023,200.790,200.790,200.790,0.000,72721 ATHEFI,D,10/13/2023,198.710,198.710,198.710,0.000,72721 ATHEFI,D,10/16/2023,199.920,199.920,199.920,0.000,72721 ATHEFI,D,10/17/2023,199.260,199.260,199.260,0.000,72301 ATHEFI,D,10/18/2023,200.460,200.460,200.460,0.000,72301 ATHEFI,D,10/19/2023,200.340,200.340,200.340,0.000,72301 ATHEFI,D,10/20/2023,199.540,199.540,199.540,0.000,72301 ATHEFI,D,10/23/2023,199.680,199.680,199.680,0.000,72301 ATHEFI,D,10/24/2023,203.520,203.520,203.520,0.000,72301 ATHEFI,D,10/25/2023,201.650,201.650,201.650,0.000,72301 ATHEFI,D,10/26/2023,200.170,200.170,200.170,0.000,72301 ATHEFI,D,10/27/2023,200.460,200.460,200.460,0.000,72301 ATHEFI,D,10/30/2023,202.070,202.070,202.070,0.000,72301 ATHEFI,D,10/31/2023,203.180,203.180,203.180,0.000,72301 ATHEFI,D,11/1/2023,203.310,203.310,203.310,0.000,72301 ATHEFI,D,11/2/2023,207.760,207.760,207.760,0.000,72301 ATHEFI,D,11/3/2023,207.570,207.570,207.570,0.000,72301 ATHEFI,D,11/6/2023,210.680,210.680,210.680,0.000,72301 ATHEFI,D,11/7/2023,209.500,209.500,209.500,0.000,73725 ATHEFI,D,11/8/2023,209.580,209.580,209.580,0.000,73725 ATHEFI,D,11/10/2023,206.090,206.090,206.090,0.000,73725 ATHEFI,D,11/13/2023,206.500,206.500,206.500,0.000,73725 ATHEFI,D,11/14/2023,211.510,211.510,211.510,0.000,73725 ATHEFI,D,11/15/2023,212.210,212.210,212.210,0.000,73725 ATHEFI,D,11/16/2023,212.630,212.630,212.630,0.000,73725 ATHEFI,D,11/17/2023,214.450,214.450,214.450,0.000,73725 ATHEFI,D,11/20/2023,214.300,214.300,214.300,0.000,73725 ATHEFI,D,11/21/2023,212.430,212.430,212.430,0.000,73725 ATHEFI,D,11/22/2023,215.040,215.040,215.040,0.000,73725 ATHEFI,D,11/23/2023,215.910,215.910,215.910,0.000,73725 ATHEFI,D,11/24/2023,215.330,215.330,215.330,0.000,73725 ATHEFI,D,11/27/2023,216.530,216.530,216.530,0.000,73725 ATHEFI,D,11/28/2023,216.270,216.270,216.270,0.000,73725 ATHEFI,D,11/29/2023,217.160,217.160,217.160,0.000,73725 ATHEFI,D,11/30/2023,217.760,217.760,217.760,0.000,73725 ATHEFI,D,12/1/2023,218.620,218.620,218.620,0.000,73725 ATHEFI,D,12/4/2023,217.810,217.810,217.810,0.000,73725 ATHEFI,D,12/5/2023,216.830,216.830,216.830,0.000,73725 ATHEFI,D,12/6/2023,216.980,216.980,216.980,0.000,73725 ATHEFI,D,12/7/2023,216.740,216.740,216.740,0.000,73725 ATHEFI,D,12/8/2023,217.340,217.340,217.340,0.000,73725 ATHEFI,D,12/11/2023,217.660,217.660,217.660,0.000,73725 ATHEFI,D,12/12/2023,218.950,218.950,218.950,0.000,73725 ATHEFI,D,12/13/2023,220.460,220.460,220.460,0.000,73725 ATHEFI,D,12/14/2023,220.890,220.890,220.890,0.000,73725 ATHEFI,D,12/15/2023,219.940,219.940,219.940,0.000,73725 ATHEFI,D,12/18/2023,219.330,219.330,219.330,0.000,73725 ATHEFI,D,12/19/2023,221.460,221.460,221.460,0.000,73725 ATHEFI,D,12/20/2023,222.130,222.130,222.130,0.000,73725 ATHEFI,D,12/21/2023,221.580,221.580,221.580,0.000,73725 ATHEFI,D,12/22/2023,220.820,220.820,220.820,0.000,73725 ATHEFI,D,12/27/2023,221.000,221.000,221.000,0.000,73725 ATHEFI,D,12/28/2023,219.740,219.740,219.740,0.000,73725 ATHEFI,D,12/29/2023,220.860,220.860,220.860,0.000,73725 ATHEFI,D,12/31/2023,220.870,220.870,220.870,0.000,73725 ATHEFI,D,1/1/2024,220.870,220.870,220.870,0.000,73725 ATHEFI,D,1/2/2024,222.960,222.960,222.960,0.000,73725 ATHEFI,D,1/3/2024,221.900,221.900,221.900,0.000,73725 ATHEFI,D,1/4/2024,223.630,223.630,223.630,0.000,75528 ATHEFI,D,1/5/2024,223.620,223.620,223.620,0.000,75528 ATHEFI,D,1/8/2024,227.010,227.010,227.010,0.000,75528 ATHEFI,D,1/9/2024,228.430,228.430,228.430,0.000,75528 ATHEFI,D,1/10/2024,229.360,229.360,229.360,0.000,75528 ATHEFI,D,1/11/2024,229.270,229.270,229.270,0.000,77171 ATHEFI,D,1/12/2024,229.850,229.850,229.850,0.000,77171 ATHEFI,D,1/15/2024,229.700,229.700,229.700,0.000,77171 ATHEFI,D,1/16/2024,226.460,226.460,226.460,0.000,77171 ATHEFI,D,1/17/2024,226.220,226.220,226.220,0.000,77171 ATHEFI,D,1/18/2024,227.830,227.830,227.830,0.000,77171 ATHEFI,D,1/19/2024,227.350,227.350,227.350,0.000,77171 ATHEFI,D,1/22/2024,229.630,229.630,229.630,0.000,77171 ATHEFI,D,1/23/2024,230.240,230.240,230.240,0.000,77171 ATHEFI,D,1/24/2024,231.590,231.590,231.590,0.000,77171 ATHEFI,D,1/25/2024,230.140,230.140,230.140,0.000,77171 ATHEFI,D,1/26/2024,231.230,231.230,231.230,0.000,77171 ATHEFI,D,1/29/2024,229.550,229.550,229.550,0.000,77604 ATHEFI,D,1/30/2024,230.510,230.510,230.510,0.000,77604 ATHEFI,D,1/31/2024,232.580,232.580,232.580,0.000,77604 ATHEFI,D,2/1/2024,234.260,234.260,234.260,0.000,77604 ATHEFI,D,2/2/2024,235.690,235.690,235.690,0.000,77604 ATHEFI,D,2/5/2024,237.920,237.920,237.920,0.000,77943 ATHEFI,D,2/6/2024,239.390,239.390,239.390,0.000,77943 ATHEFI,D,2/7/2024,238.230,238.230,238.230,0.000,78804 ATHEFI,D,2/8/2024,239.810,239.810,239.810,0.000,78804 ATHEFI,D,2/9/2024,239.550,239.550,239.550,0.000,78804 ATHEFI,D,2/12/2024,238.210,238.210,238.210,0.000,79054 ATHEFI,D,2/13/2024,236.540,236.540,236.540,0.000,79054 ATHEFI,D,2/14/2024,238.600,238.600,238.600,0.000,79054 ATHEFI,D,2/15/2024,237.710,237.710,237.710,0.000,79054 ATHEFI,D,2/16/2024,237.480,237.480,237.480,0.000,79054 ATHEFI,D,2/19/2024,240.430,240.430,240.430,0.000,79273 ATHEFI,D,2/20/2024,240.310,240.310,240.310,0.000,79152 ATHEFI,D,2/21/2024,239.230,239.230,239.230,0.000,80446 ATHEFI,D,2/22/2024,239.160,239.160,239.160,0.000,80521 ATHEFI,D,2/23/2024,237.890,237.890,237.890,0.000,81128 ATHEFI,D,2/26/2024,237.950,237.950,237.950,0.000,81128 ATHEFI,D,2/27/2024,237.880,237.880,237.880,0.000,81304 ATHEFI,D,2/28/2024,237.470,237.470,237.470,0.000,81304 ATHEFI,D,2/29/2024,240.300,240.300,240.300,0.000,81304 ATHEFI,D,3/1/2024,240.740,240.740,240.740,0.000,88258 ATHEFI,D,3/4/2024,242.920,242.920,242.920,0.000,88549 ATHEFI,D,3/5/2024,242.300,242.300,242.300,0.000,89718 ATHEFI,D,3/6/2024,242.730,242.730,242.730,0.000,90131 ATHEFI,D,3/7/2024,241.630,241.630,241.630,0.000,90131 ATHEFI,D,3/8/2024,241.760,241.760,241.760,0.000,90131 ATHEFI,D,3/11/2024,235.700,235.700,235.700,0.000,90131 ATHEFI,D,3/12/2024,235.940,235.940,235.940,0.000,90266 ATHEFI,D,3/13/2024,236.570,236.570,236.570,0.000,90266 ATHEFI,D,3/14/2024,239.610,239.610,239.610,0.000,90499 ATHEFI,D,3/15/2024,240.130,240.130,240.130,0.000,90499 ATHEFI,D,3/19/2024,237.480,237.480,237.480,0.000,90499 ATHEFI,D,3/20/2024,239.740,239.740,239.740,0.000,90499 ATHEFI,D,3/21/2024,241.780,241.780,241.780,0.000,90499 ATHEFI,D,3/22/2024,241.050,241.050,241.050,0.000,90499 ATHEFI,D,3/26/2024,240.400,240.400,240.400,0.000,90694 ATHEFI,D,3/27/2024,239.530,239.530,239.530,0.000,90694 ATHEFI,D,3/28/2024,240.470,240.470,240.470,0.000,90694 ATHEFI,D,3/29/2024,240.460,240.460,240.460,0.000,90694 ATHEFI,D,4/1/2024,240.430,240.430,240.430,0.000,90694 ATHEFI,D,4/2/2024,236.020,236.020,236.020,0.000,90694 ATHEFI,D,4/3/2024,234.310,234.310,234.310,0.000,91012 ATHEFI,D,4/4/2024,235.020,235.020,235.020,0.000,90383 ATHEFI,D,4/5/2024,234.450,234.450,234.450,0.000,90383 ATHEFI,D,4/8/2024,237.820,237.820,237.820,0.000,90383 ATHEFI,D,4/9/2024,240.430,240.430,240.430,0.000,90593 ATHEFI,D,4/10/2024,240.670,240.670,240.670,0.000,90593 ATHEFI,D,4/11/2024,240.050,240.050,240.050,0.000,90593 ATHEFI,D,4/12/2024,236.720,236.720,236.720,0.000,90593 ATHEFI,D,4/15/2024,235.120,235.120,235.120,0.000,90593 ATHEFI,D,4/16/2024,229.900,229.900,229.900,0.000,89657 ATHEFI,D,4/17/2024,231.130,231.130,231.130,0.000,89657 ATHEFI,D,4/18/2024,233.900,233.900,233.900,0.000,89657 ATHEFI,D,4/19/2024,236.090,236.090,236.090,0.000,89657 ATHEFI,D,4/22/2024,241.080,241.080,241.080,0.000,89657 ATHEFI,D,4/23/2024,245.500,245.500,245.500,0.000,89657 ATHEFI,D,4/24/2024,245.090,245.090,245.090,0.000,89657 ATHEFI,D,4/25/2024,242.750,242.750,242.750,0.000,89657 ATHEFI,D,4/26/2024,246.360,246.360,246.360,0.000,89657 ATHEFI,D,4/29/2024,246.780,246.780,246.780,0.000,89657 ATHEFI,D,4/30/2024,245.590,245.590,245.590,0.000,89657 ATHEFI,D,5/1/2024,245.580,245.580,245.580,0.000,89657 ATHEFI,D,5/2/2024,245.620,245.620,245.620,0.000,89657 ATHEFI,D,5/8/2024,248.370,248.370,248.370,0.000,89657 ATHEFI,D,5/9/2024,249.420,249.420,249.420,0.000,90986 ATHEFI,D,5/10/2024,250.630,250.630,250.630,0.000,90986 ATHEFI,D,5/13/2024,249.460,249.460,249.460,0.000,90986 ATHEFI,D,5/14/2024,248.020,248.020,248.020,0.000,90986 ATHEFI,D,5/15/2024,251.280,251.280,251.280,0.000,91280 ATHEFI,D,5/16/2024,250.940,250.940,250.940,0.000,91280 ATHEFI,D,5/17/2024,250.500,250.500,250.500,0.000,91280 ATHEFI,D,5/20/2024,252.640,252.640,252.640,0.000,91520 ATHEFI,D,5/21/2024,252.060,252.060,252.060,0.000,91520 ATHEFI,D,5/22/2024,249.190,249.190,249.190,0.000,91520 ATHEFI,D,5/23/2024,249.610,249.610,249.610,0.000,91520 ATHEFI,D,5/24/2024,248.960,248.960,248.960,0.000,91520 ATHEFI,D,5/27/2024,249.250,249.250,249.250,0.000,91520 ATHEFI,D,5/28/2024,246.830,246.830,246.830,0.000,91921 ATHEFI,D,5/29/2024,242.570,242.570,242.570,0.000,91921 ATHEFI,D,5/30/2024,243.140,243.140,243.140,0.000,91921 ATHEFI,D,5/31/2024,242.120,242.120,242.120,0.000,91921 ATHEFI,D,6/3/2024,244.460,244.460,244.460,0.000,91921 ATHEFI,D,6/4/2024,240.940,240.940,240.940,0.000,91921 ATHEFI,D,6/5/2024,243.720,243.720,243.720,0.000,91921 ATHEFI,D,6/6/2024,244.760,244.760,244.760,0.000,92495 ATHEFI,D,6/7/2024,245.540,245.540,245.540,0.000,92495 ATHEFI,D,6/10/2024,245.810,245.810,245.810,0.000,92495 ATHEFI,D,6/11/2024,243.840,243.840,243.840,0.000,92495 ATHEFI,D,6/12/2024,244.580,244.580,244.580,0.000,92495 ATHEFI,D,6/13/2024,242.760,242.760,242.760,0.000,92495 ATHEFI,D,6/14/2024,236.960,236.960,236.960,0.000,92495 ATHEFI,D,6/17/2024,236.530,236.530,236.530,0.000,92495 ATHEFI,D,6/18/2024,239.440,239.440,239.440,0.000,92495 ATHEFI,D,6/19/2024,239.860,239.860,239.860,0.000,92495 ATHEFI,D,6/20/2024,239.510,239.510,239.510,0.000,92912 ATHEFI,D,6/21/2024,239.930,239.930,239.930,0.000,92912 ATHEFI,D,6/25/2024,239.600,239.600,239.600,0.000,92912 ATHEFI,D,6/26/2024,238.790,238.790,238.790,0.000,92912 ATHEFI,D,6/27/2024,237.870,237.870,237.870,0.000,92912 ATHEFI,D,6/28/2024,239.100,239.100,239.100,0.000,92912 ATHEFI,D,7/1/2024,241.690,241.690,241.690,0.000,92912 ATHEFI,D,7/2/2024,239.540,239.540,239.540,0.000,92912 ATHEFI,D,7/3/2024,241.890,241.890,241.890,0.000,93538 ATHEFI,D,7/4/2024,244.280,244.280,244.280,0.000,93538 ATHEFI,D,7/5/2024,245.300,245.300,245.300,0.000,94009 ATHEFI,D,7/8/2024,247.110,247.110,247.110,0.000,94009 ATHEFI,D,7/9/2024,247.120,247.120,247.120,0.000,94009 ATHEFI,D,7/10/2024,246.960,246.960,246.960,0.000,94414 ATHEFI,D,7/11/2024,247.740,247.740,247.740,0.000,94414 ATHEFI,D,7/12/2024,248.320,248.320,248.320,0.000,94414 ATHEFI,D,7/15/2024,249.720,249.720,249.720,0.000,94414 ATHEFI,D,7/16/2024,248.190,248.190,248.190,0.000,94414 ATHEFI,D,7/17/2024,247.260,247.260,247.260,0.000,94414 ATHEFI,D,7/18/2024,248.700,248.700,248.700,0.000,94414 ATHEFI,D,7/19/2024,249.810,249.810,249.810,0.000,94414 ATHEFI,D,7/22/2024,252.940,252.940,252.940,0.000,94414 ATHEFI,D,7/23/2024,252.640,252.640,252.640,0.000,94414 ATHEFI,D,7/24/2024,250.120,250.120,250.120,0.000,94691 ATHEFI,D,7/25/2024,249.750,249.750,249.750,0.000,94691 ATHEFI,D,7/26/2024,250.890,250.890,250.890,0.000,94691 ATHEFI,D,7/29/2024,251.330,251.330,251.330,0.000,94691 ATHEFI,D,7/30/2024,250.680,250.680,250.680,0.000,94691 ATHEFI,D,7/31/2024,253.040,253.040,253.040,0.000,94691 ATHEFI,D,8/1/2024,252.730,252.730,252.730,0.000,94691 ATHEFI,D,8/2/2024,245.480,245.480,245.480,0.000,94691 ATHEFI,D,8/5/2024,230.220,230.220,230.220,0.000,94691 ATHEFI,D,8/6/2024,234.990,234.990,234.990,0.000,95473 ATHEFI,D,8/7/2024,240.450,240.450,240.450,0.000,95473 ATHEFI,D,8/8/2024,238.320,238.320,238.320,0.000,95473 ATHEFI,D,8/9/2024,238.780,238.780,238.780,0.000,95473 ATHEFI,D,8/12/2024,240.760,240.760,240.760,0.000,95473 ATHEFI,D,8/13/2024,241.460,241.460,241.460,0.000,95473 ATHEFI,D,8/14/2024,244.740,244.740,244.740,0.000,95473 ATHEFI,D,8/16/2024,245.990,245.990,245.990,0.000,95473 ATHEFI,D,8/19/2024,245.760,245.760,245.760,0.000,95473 ATHEFI,D,8/20/2024,245.190,245.190,245.190,0.000,95473 ATHEFI,D,8/21/2024,246.310,246.310,246.310,0.000,95473 ATHEFI,D,8/22/2024,246.920,246.920,246.920,0.000,95473 ATHEFI,D,8/23/2024,246.270,246.270,246.270,0.000,95473 ATHEFI,D,8/26/2024,247.350,247.350,247.350,0.000,95473 ATHEFI,D,8/27/2024,245.690,245.690,245.690,0.000,95473 ATHEFI,D,8/28/2024,243.910,243.910,243.910,0.000,95473 ATHEFI,D,8/29/2024,244.310,244.310,244.310,0.000,95473 ATHEFI,D,8/30/2024,244.860,244.860,244.860,0.000,95473 ATHEFI,D,9/2/2024,247.350,247.350,247.350,0.000,95473 ATHEFI,D,9/3/2024,247.700,247.700,247.700,0.000,96362 ATHEFI,D,9/4/2024,245.600,245.600,245.600,0.000,96362 ATHEFI,D,9/5/2024,247.680,247.680,247.680,0.000,96362 ATHEFI,D,9/6/2024,247.220,247.220,247.220,0.000,96362 ATHEFI,D,9/9/2024,245.850,245.850,245.850,0.000,96362 ATHEFI,D,9/10/2024,243.880,243.880,243.880,0.000,96769 ATHEFI,D,9/11/2024,242.210,242.210,242.210,0.000,96769 ATHEFI,D,9/12/2024,241.100,241.100,241.100,0.000,96769 ATHEFI,D,9/13/2024,243.080,243.080,243.080,0.000,96769 ATHEFI,D,9/16/2024,243.490,243.490,243.490,0.000,96769 ATHEFI,D,9/17/2024,244.920,244.920,244.920,0.000,96769 ATHEFI,D,9/18/2024,243.360,243.360,243.360,0.000,96769 ATHEFI,D,9/19/2024,245.020,245.020,245.020,0.000,96769 ATHEFI,D,9/20/2024,244.770,244.770,244.770,0.000,96769 ATHEFI,D,9/23/2024,247.300,247.300,247.300,0.000,96769 ATHEFI,D,9/24/2024,249.490,249.490,249.490,0.000,97331 ATHEFI,D,9/25/2024,250.610,250.610,250.610,0.000,97331 ATHEFI,D,9/26/2024,252.490,252.490,252.490,0.000,97650 ATHEFI,D,9/27/2024,251.680,251.680,251.680,0.000,98217 ATHEFI,D,9/30/2024,249.260,249.260,249.260,0.000,98217 ATHEFI,D,10/1/2024,248.190,248.190,248.190,0.000,98217 ATHEFI,D,10/2/2024,244.350,244.350,244.350,0.000,98217 ATHEFI,D,10/3/2024,242.900,242.900,242.900,0.000,98217 ATHEFI,D,10/4/2024,246.000,246.000,246.000,0.000,98217 ATHEFI,D,10/7/2024,244.050,244.050,244.050,0.000,98217 ATHEFI,D,10/8/2024,243.490,243.490,243.490,0.000,98217 ATHEFI,D,10/9/2024,242.860,242.860,242.860,0.000,98217 ATHEFI,D,10/10/2024,241.070,241.070,241.070,0.000,98217 ATHEFI,D,10/11/2024,242.200,242.200,242.200,0.000,98880 ATHEFI,D,10/14/2024,241.310,241.310,241.310,0.000,98880 ATHEFI,D,10/15/2024,243.320,243.320,243.320,0.000,98880 ATHEFI,D,10/16/2024,244.840,244.840,244.840,0.000,98880 ATHEFI,D,10/17/2024,246.180,246.180,246.180,0.000,98880 ATHEFI,D,10/18/2024,247.340,247.340,247.340,0.000,98880 ATHEFI,D,10/21/2024,246.840,246.840,246.840,0.000,98880 ATHEFI,D,10/22/2024,242.730,242.730,242.730,0.000,98880 ATHEFI,D,10/23/2024,240.890,240.890,240.890,0.000,98880 ATHEFI,D,10/24/2024,240.510,240.510,240.510,0.000,98880 ATHEFI,D,10/25/2024,238.030,238.030,238.030,0.000,98880 ATHEFI,D,10/29/2024,240.170,240.170,240.170,0.000,98880 ATHEFI,D,10/30/2024,236.980,236.980,236.980,0.000,98880 ATHEFI,D,10/31/2024,237.530,237.530,237.530,0.000,98880 ATHEFI,D,11/1/2024,238.980,238.980,238.980,0.000,98880 ATHEFI,D,11/4/2024,239.290,239.290,239.290,0.000,98880 ATHEFI,D,11/5/2024,240.370,240.370,240.370,0.000,98880 ATHEFI,D,11/6/2024,242.070,242.070,242.070,0.000,98880 ATHEFI,D,11/7/2024,241.560,241.560,241.560,0.000,98880 ATHEFI,D,11/8/2024,242.880,242.880,242.880,0.000,98880 ATHEFI,D,11/11/2024,244.450,244.450,244.450,0.000,98880 ATHEFI,D,11/12/2024,245.470,245.470,245.470,0.000,98880 ATHEFI,D,11/13/2024,243.510,243.510,243.510,0.000,99675 ATHEFI,D,11/14/2024,243.090,243.090,243.090,0.000,99675 ATHEFI,D,11/15/2024,240.950,240.950,240.950,0.000,99675 ATHEFI,D,11/18/2024,238.470,238.470,238.470,0.000,99675 ATHEFI,D,11/19/2024,233.660,233.660,233.660,0.000,98707 ATHEFI,D,11/20/2024,237.100,237.100,237.100,0.000,99135 ATHEFI,D,11/21/2024,239.780,239.780,239.780,0.000,99135 ATHEFI,D,11/25/2024,240.830,240.830,240.830,0.000,99135 ATHEFI,D,11/26/2024,241.410,241.410,241.410,0.000,99135 ATHEFI,D,11/27/2024,240.510,240.510,240.510,0.000,99135 ATHEFI,D,11/28/2024,241.250,241.250,241.250,0.000,99135 ATHEFI,D,11/29/2024,239.930,239.930,239.930,0.000,99135 ATHEFI,D,12/2/2024,244.620,244.620,244.620,0.000,99135 ATHEFI,D,12/3/2024,244.950,244.950,244.950,0.000,99135 ATHEFI,D,12/4/2024,246.890,246.890,246.890,0.000,99135 ATHEFI,D,12/5/2024,249.300,249.300,249.300,0.000,99135 ATHEFI,D,12/6/2024,249.360,249.360,249.360,0.000,99135 ATHEFI,D,12/9/2024,250.960,250.960,250.960,0.000,99135 ATHEFI,D,12/10/2024,249.670,249.670,249.670,0.000,99135 ATHEFI,D,12/11/2024,249.470,249.470,249.470,0.000,99135 ATHEFI,D,12/12/2024,250.430,250.430,250.430,0.000,100097 ATHEFI,D,12/13/2024,251.640,251.640,251.640,0.000,100097 ATHEFI,D,12/16/2024,251.000,251.000,251.000,0.000,100097 ATHEFI,D,12/17/2024,249.440,249.440,249.440,0.000,100097 ATHEFI,D,12/18/2024,250.050,250.050,250.050,0.000,100097 ATHEFI,D,12/19/2024,250.300,250.300,250.300,0.000,100097 ATHEFI,D,12/20/2024,249.410,249.410,249.410,0.000,100097 ATHEFI,D,12/23/2024,248.970,248.970,248.970,0.000,100097 ATHEFI,D,12/24/2024,248.910,248.910,248.910,0.000,100097 ATHEFI,D,12/27/2024,250.010,250.010,250.010,0.000,100097 ATHEFI,D,12/30/2024,249.680,249.680,249.680,0.000,100097 ATHEFI,D,12/31/2024,251.990,251.990,251.990,0.000,100097 ATHEFI,D,1/1/2025,251.990,251.990,251.990,0.000,100097 ATHEFI,D,1/2/2025,254.420,254.420,254.420,0.000,100097 ATHEFI,D,1/3/2025,255.570,255.570,255.570,0.000,100686 ATHEFI,D,1/7/2025,258.870,258.870,258.870,0.000,100686 ATHEFI,D,1/8/2025,258.930,258.930,258.930,0.000,101459 ATHEFI,D,1/9/2025,259.440,259.440,259.440,0.000,101459 ATHEFI,D,1/10/2025,258.380,258.380,258.380,0.000,101459 ATHEFI,D,1/13/2025,256.200,256.200,256.200,0.000,101459 ATHEFI,D,1/14/2025,256.900,256.900,256.900,0.000,101459 ATHEFI,D,1/15/2025,258.660,258.660,258.660,0.000,101459 ATHEFI,D,1/16/2025,258.480,258.480,258.480,0.000,101459 ATHEFI,D,1/17/2025,261.530,261.530,261.530,0.000,101459 ATHEFI,D,1/20/2025,262.300,262.300,262.300,0.000,101459 ATHEFI,D,1/21/2025,263.820,263.820,263.820,0.000,102412 ATHEFI,D,1/22/2025,262.730,262.730,262.730,0.000,102412 ATHEFI,D,1/23/2025,262.940,262.940,262.940,0.000,102412 ATHEFI,D,1/24/2025,265.610,265.610,265.610,0.000,102412 ATHEFI,D,1/27/2025,264.550,264.550,264.550,0.000,102412 ATHEFI,D,1/28/2025,264.920,264.920,264.920,0.000,102412 ATHEFI,D,1/29/2025,265.360,265.360,265.360,0.000,102412 ATHEFI,D,1/30/2025,266.180,266.180,266.180,0.000,102412 ATHEFI,D,2/3/2025,257.100,257.100,257.100,0.000,102412 ATHEFI,D,2/4/2025,259.220,259.220,259.220,0.000,102412 ATHEFI,D,2/5/2025,258.970,258.970,258.970,0.000,102412 ATHEFI,D,2/6/2025,262.820,262.820,262.820,0.000,102412 ATHEFI,D,2/7/2025,264.400,264.400,264.400,0.000,102412 ATHEFI,D,2/10/2025,263.790,263.790,263.790,0.000,102412 ATHEFI,D,2/11/2025,263.880,263.880,263.880,0.000,103189 ATHEFI,D,2/12/2025,266.260,266.260,266.260,0.000,103189 ATHEFI,D,2/13/2025,270.850,270.850,270.850,0.000,103189 ATHEFI,D,2/14/2025,271.660,271.660,271.660,0.000,103189 ATHEFI,D,2/17/2025,273.040,273.040,273.040,0.000,103189 ATHEFI,D,2/18/2025,273.470,273.470,273.470,0.000,103555 ATHEFI,D,2/19/2025,271.580,271.580,271.580,0.000,104279 ATHEFI,D,2/20/2025,272.580,272.580,272.580,0.000,104279 ATHEFI,D,2/21/2025,272.800,272.800,272.800,0.000,104279 ATHEFI,D,2/24/2025,269.480,269.480,269.480,0.000,104279 ATHEFI,D,2/25/2025,267.650,267.650,267.650,0.000,104279 ATHEFI,D,2/26/2025,267.700,267.700,267.700,0.000,104279 ATHEFI,D,2/27/2025,267.070,267.070,267.070,0.000,104279 ATHEFI,D,2/28/2025,267.840,267.840,267.840,0.000,104279 ATHEFI,D,3/6/2025,270.540,270.540,270.540,0.000,104279 ATHEFI,D,3/7/2025,271.110,271.110,271.110,0.000,103859 ATHEFI,D,3/10/2025,270.850,270.850,270.850,0.000,103859 ATHEFI,D,3/11/2025,269.980,269.980,269.980,0.000,103859 ATHEFI,D,3/12/2025,276.740,276.740,276.740,0.000,103859 ATHEFI,D,3/13/2025,277.750,277.750,277.750,0.000,103859 ATHEFI,D,3/14/2025,281.300,281.300,281.300,0.000,103859 ATHEFI,D,3/17/2025,282.070,282.070,282.070,0.000,103859 ATHEFI,D,3/18/2025,283.730,283.730,283.730,0.000,104922 ATHEFI,D,3/19/2025,283.620,283.620,283.620,0.000,104922 ATHEFI,D,3/20/2025,283.640,283.640,283.640,0.000,104922 ATHEFI,D,3/21/2025,282.040,282.040,282.040,0.000,104922 ATHEFI,D,3/24/2025,287.090,287.090,287.090,0.000,104922 ATHEFI,D,3/26/2025,290.830,290.830,290.830,0.000,104922 ATHEFI,D,3/27/2025,290.640,290.640,290.640,0.000,104922 ATHEFI,D,3/28/2025,289.020,289.020,289.020,0.000,104922 ATHEFI,D,3/31/2025,280.350,280.350,280.350,0.000,104922 ATHEFI,D,4/1/2025,282.330,282.330,282.330,0.000,104922 ATHEFI,D,4/2/2025,283.830,283.830,283.830,0.000,104922 ATHEFI,D,4/3/2025,277.810,277.810,277.810,0.000,104922 ATHEFI,D,4/4/2025,264.790,264.790,264.790,0.000,104922 ATHEFI,D,4/8/2025,260.350,260.350,260.350,0.000,103062 ATHEFI,D,4/9/2025,252.970,252.970,252.970,0.000,103062 ATHEFI,D,4/10/2025,261.860,261.860,261.860,0.000,103062 ATHEFI,D,4/11/2025,261.760,261.760,261.760,0.000,103062 ATHEFI,D,4/15/2025,272.540,272.540,272.540,0.000,103062 ATHEFI,D,4/16/2025,271.830,271.830,271.830,0.000,103062 ATHEFI,D,4/17/2025,269.700,269.700,269.700,0.000,103062 ATHEFI,D,4/22/2025,273.820,273.820,273.820,0.000,103062 ATHEFI,D,4/23/2025,278.850,278.850,278.850,0.000,103062 ATHEFI,D,4/24/2025,278.720,278.720,278.720,0.000,103062 ATHEFI,D,4/25/2025,279.000,279.000,279.000,0.000,103062 ATHEFI,D,4/28/2025,278.370,278.370,278.370,0.000,103062 ATHEFI,D,4/29/2025,279.410,279.410,279.410,0.000,103062 ATHEFI,D,4/30/2025,276.870,276.870,276.870,0.000,103062 ATHEFI,D,5/2/2025,280.920,280.920,280.920,0.000,103062 ATHEFI,D,5/6/2025,280.680,280.680,280.680,0.000,104124 ATHEFI,D,5/7/2025,282.970,282.970,282.970,0.000,104124 ATHEFI,D,5/8/2025,282.300,282.300,282.300,0.000,104124 ATHEFI,D,5/9/2025,286.680,286.680,286.680,0.000,104124 ATHEFI,D,5/12/2025,291.410,291.410,291.410,0.000,104124 ATHEFI,D,5/13/2025,293.040,293.040,293.040,0.000,104124 ATHEFI,D,5/14/2025,293.860,293.860,293.860,0.000,104124 ATHEFI,D,5/15/2025,293.140,293.140,293.140,0.000,104124 ATHEFI,D,5/16/2025,295.700,295.700,295.700,0.000,104124 ATHEFI,D,5/19/2025,296.670,296.670,296.670,0.000,104124 ATHEFI,D,5/20/2025,299.130,299.130,299.130,0.000,104124 ATHEFI,D,5/21/2025,300.380,300.380,300.380,0.000,104124 ATHEFI,D,5/22/2025,299.010,299.010,299.010,0.000,104124 ATHEFI,D,5/23/2025,294.430,294.430,294.430,0.000,104124 ATHEFI,D,5/26/2025,300.730,300.730,300.730,0.000,104124 ATHEFI,D,5/27/2025,303.450,303.450,303.450,0.000,104124 ATHEFI,D,5/28/2025,307.350,307.350,307.350,0.000,104124 ATHEFI,D,5/29/2025,305.780,305.780,305.780,0.000,104124 ATHEFI,D,5/30/2025,301.170,301.170,301.170,0.000,104500 ATHEFI,D,6/2/2025,298.890,298.890,298.890,0.000,104500 ATHEFI,D,6/3/2025,300.130,300.130,300.130,0.000,104500 ATHEFI,D,6/4/2025,301.930,301.930,301.930,0.000,104500 ATHEFI,D,6/5/2025,302.800,302.800,302.800,0.000,104500 ATHEFI,D,6/6/2025,303.210,303.210,303.210,0.000,104500 ATHEFI,D,6/10/2025,305.500,305.500,305.500,0.000,104500 ATHEFI,D,6/11/2025,306.750,306.750,306.750,0.000,104500 ATHEFI,D,6/12/2025,305.490,305.490,305.490,0.000,104500 ATHEFI,D,6/13/2025,302.070,302.070,302.070,0.000,104500 ATHEFI,D,6/16/2025,301.690,301.690,301.690,0.000,104500 ATHEFI,D,6/17/2025,299.390,299.390,299.390,0.000,104500 ATHEFI,D,6/18/2025,295.920,295.920,295.920,0.000,104500 ATHEFI,D,6/19/2025,292.470,292.470,292.470,0.000,104500 ATHEFI,D,6/20/2025,295.700,295.700,295.700,0.000,104500 ATHEFI,D,6/23/2025,298.890,298.890,298.890,0.000,104500 ATHEFI,D,6/24/2025,305.770,305.770,305.770,0.000,104500 ATHEFI,D,6/25/2025,307.620,307.620,307.620,0.000,104500 ATHEFI,D,6/26/2025,311.100,311.100,311.100,0.000,104500 ATHEFI,D,6/27/2025,310.810,310.810,310.810,0.000,104500 ATHEFI,D,6/30/2025,310.030,310.030,310.030,0.000,104500 ATHEFI,D,7/1/2025,311.600,311.600,311.600,0.000,104500 ATHEFI,D,7/2/2025,314.030,314.030,314.030,0.000,104500 ATHEFI,D,7/3/2025,317.210,317.210,317.210,0.000,106729 ATHEFI,D,7/4/2025,317.780,317.780,317.780,0.000,106729 ATHEFI,D,7/7/2025,318.580,318.580,318.580,0.000,109246 ATHEFI,D,7/8/2025,323.400,323.400,323.400,0.000,109246 ATHEFI,D,7/9/2025,326.070,326.070,326.070,0.000,109246 ATHEFI,D,7/10/2025,327.190,327.190,327.190,0.000,109246 ATHEFI,D,7/11/2025,325.980,325.980,325.980,0.000,109246 ATHEFI,D,7/14/2025,324.610,324.610,324.610,0.000,109246 ATHEFI,D,7/15/2025,327.270,327.270,327.270,0.000,109246 ATHEFI,D,7/16/2025,326.360,326.360,326.360,0.000,109246 ATHEFI,D,7/17/2025,329.900,329.900,329.900,0.000,109246 ATHEFI,D,7/18/2025,331.240,331.240,331.240,0.000,109246 ATHEFI,D,7/22/2025,327.050,327.050,327.050,0.000,110454 ATHEFI,D,7/23/2025,328.320,328.320,328.320,0.000,110454 ATHEFI,D,7/24/2025,328.780,328.780,328.780,0.000,110454 ATHEFI,D,7/25/2025,328.990,328.990,328.990,0.000,111391 ATHEFI,D,7/28/2025,325.850,325.850,325.850,0.000,111391 ATHEFI,D,7/29/2025,329.680,329.680,329.680,0.000,111391 ATHEFI,D,7/30/2025,329.790,329.790,329.790,0.000,111391 ATHEFI,D,7/31/2025,331.500,331.500,331.500,0.000,111391 ATHEFI,D,8/1/2025,325.690,325.690,325.690,0.000,111391 ATHEFI,D,8/4/2025,333.370,333.370,333.370,0.000,111391 ATHEFI,D,8/5/2025,338.130,338.130,338.130,0.000,111391 ATHEFI,D,8/6/2025,340.120,340.120,340.120,0.000,111391 ATHEFI,D,8/7/2025,344.730,344.730,344.730,0.000,111391 ATHEFI,D,8/8/2025,345.370,345.370,345.370,0.000,111391 ATHEFI,D,8/11/2025,351.160,351.160,351.160,0.000,111391 ATHEFI,D,8/12/2025,351.730,351.730,351.730,0.000,111391 ATHEFI,D,8/13/2025,355.010,355.010,355.010,0.000,111391 ATHEFI,D,8/14/2025,355.690,355.690,355.690,0.000,111391 ATHEFI,D,8/18/2025,350.110,350.110,350.110,0.000,111391 ATHEFI,D,8/19/2025,351.190,351.190,351.190,0.000,111391 ATHEFI,D,8/20/2025,351.570,351.570,351.570,0.000,111391 ATHEFI,D,8/21/2025,352.300,352.300,352.300,0.000,111391 ATHEFI,D,8/22/2025,353.900,353.900,353.900,0.000,111391 ATHEFI,D,8/25/2025,356.290,356.290,356.290,0.000,111391 ATHEFI,D,8/26/2025,350.560,350.560,350.560,0.000,111391 ATHEFI,D,8/27/2025,349.230,349.230,349.230,0.000,111391 ATHEFI,D,8/28/2025,344.840,344.840,344.840,0.000,111391 ATHEFI,D,8/29/2025,341.530,341.530,341.530,0.000,111391 ATHEFI,D,9/1/2025,342.500,342.500,342.500,0.000,111391 ATHEFI,D,9/2/2025,336.880,336.880,336.880,0.000,112293 ATHEFI,D,9/3/2025,341.870,341.870,341.870,0.000,112293 ATHEFI,D,9/4/2025,341.450,341.450,341.450,0.000,112293 ATHEFI,D,9/5/2025,340.060,340.060,340.060,0.000,112293 ATHEFI,D,9/8/2025,339.620,339.620,339.620,0.000,112293 ATHEFI,D,9/9/2025,338.970,338.970,338.970,0.000,112293 ATHEFI,D,9/10/2025,341.530,341.530,341.530,0.000,112293 ATHEFI,D,9/11/2025,343.700,343.700,343.700,0.000,112293 ATHEFI,D,9/12/2025,347.810,347.810,347.810,0.000,112293 ATHEFI,D,9/15/2025,347.350,347.350,347.350,0.000,112293 ATHEFI,D,9/16/2025,343.810,343.810,343.810,0.000,112293 ATHEFI,D,9/17/2025,341.330,341.330,341.330,0.000,112293 ATHEFI,D,9/18/2025,342.510,342.510,342.510,0.000,112293 ATHEFI,D,9/19/2025,343.830,343.830,343.830,0.000,112293 ATHEFI,D,9/22/2025,345.600,345.600,345.600,0.000,112293 ATHEFI,D,9/23/2025,348.900,348.900,348.900,0.000,112293 ATHEFI,D,9/24/2025,350.000,350.000,350.000,0.000,112293 ATHEFI,D,9/25/2025,345.110,345.110,345.110,0.000,112293 ATHEFI,D,9/26/2025,345.480,345.480,345.480,0.000,112293 ATHEFI,D,9/29/2025,346.820,346.820,346.820,0.000,112293 ATHEFI,D,9/30/2025,346.580,346.580,346.580,0.000,112293 ATHEFI,D,10/1/2025,349.980,349.980,349.980,0.000,112293 ATHEFI,D,10/2/2025,350.580,350.580,350.580,0.000,113151 ATHEFI,D,10/3/2025,354.390,354.390,354.390,0.000,113151 ATHEFI,D,10/6/2025,350.780,350.780,350.780,0.000,113151 ATHEFI,D,10/7/2025,353.460,353.460,353.460,0.000,113151 ATHEFI,D,10/8/2025,355.560,355.560,355.560,0.000,113151 ATHEFI,D,10/9/2025,358.340,358.340,358.340,0.000,113151 ATHEFI,D,10/10/2025,360.200,360.200,360.200,0.000,113151 ATHEFI,D,10/13/2025,356.400,356.400,356.400,0.000,113151 ATHEFI,D,10/14/2025,351.760,351.760,351.760,0.000,113151 ATHEFI,D,10/15/2025,349.930,349.930,349.930,0.000,113151 ATHEFI,D,10/16/2025,344.090,344.090,344.090,0.000,113151 ATHEFI,D,10/17/2025,338.830,338.830,338.830,0.000,113151 ATHEFI,D,10/20/2025,340.050,340.050,340.050,0.000,113151 ATHEFI,D,10/21/2025,344.130,344.130,344.130,0.000,113151 ATHEFI,D,10/22/2025,346.910,346.910,346.910,0.000,114604 ATHEFI,D,10/23/2025,348.760,348.760,348.760,0.000,114604 ATHEFI,D,10/24/2025,345.070,345.070,345.070,0.000,114604 ATHEFI,D,10/27/2025,343.980,343.980,343.980,0.000,114604 ATHEFI,D,10/29/2025,347.720,347.720,347.720,0.000,114604 ATHEFI,D,10/30/2025,344.250,344.250,344.250,0.000,114057 ATHEFI,D,10/31/2025,342.330,342.330,342.330,0.000,114057 ATHEFI,D,11/3/2025,347.340,347.340,347.340,0.000,114057 ATHEFI,D,11/4/2025,344.970,344.970,344.970,0.000,114057 ATHEFI,D,11/5/2025,345.340,345.340,345.340,0.000,114057 ATHEFI,D,11/6/2025,344.860,344.860,344.860,0.000,114057 ATHEFI,D,11/7/2025,341.740,341.740,341.740,0.000,114057 ATHEFI,D,11/10/2025,347.470,347.470,347.470,0.000,114057 ATHEFI,D,11/11/2025,348.800,348.800,348.800,0.000,114057 ATHEFI,D,11/12/2025,353.470,353.470,353.470,0.000,114057 ATHEFI,D,11/13/2025,357.100,357.100,357.100,0.000,114057 ATHEFI,D,11/14/2025,354.800,354.800,354.800,0.000,114057 ATHEFI,D,11/17/2025,354.930,354.930,354.930,0.000,114057 ATHEFI,D,11/18/2025,347.340,347.340,347.340,0.000,114057 ATHEFI,D,11/19/2025,351.010,351.010,351.010,0.000,114057 ATHEFI,D,11/20/2025,354.740,354.740,354.740,0.000,114057 ATHEFI,D,11/21/2025,355.490,355.490,355.490,0.000,114057 ATHEFI,D,11/24/2025,356.870,356.870,356.870,0.000,114057 ATHEFI,D,11/25/2025,359.180,359.180,359.180,0.000,114057 ATHEFI,D,11/26/2025,362.770,362.770,362.770,0.000,114057 ATHEFI,D,11/27/2025,361.440,361.440,361.440,0.000,114057 ATHEFI,D,11/28/2025,358.680,358.680,358.680,0.000,114057 ATHEFI,D,12/1/2025,360.980,360.980,360.980,0.000,114057 ATHEFI,D,12/2/2025,362.880,362.880,362.880,0.000,114057 ATHEFI,D,12/3/2025,360.430,360.430,360.430,0.000,114057 ATHEFI,D,12/4/2025,360.930,360.930,360.930,0.000,114057 ATHEFI,D,12/5/2025,363.200,363.200,363.200,0.000,114057 ATHEFI,D,12/8/2025,365.160,365.160,365.160,0.000,116397 ATHEFI,D,12/9/2025,361.950,361.950,361.950,0.000,116397 ATHEFI,D,12/10/2025,362.770,362.770,362.770,0.000,116397 ATHEFI,D,12/11/2025,365.260,365.260,365.260,0.000,116397 ATHEFI,D,12/12/2025,365.800,365.800,365.800,0.000,116781 ATHEFI,D,12/15/2025,365.990,365.990,365.990,0.000,116781 ATHEFI,D,12/16/2025,363.620,363.620,363.620,0.000,116781 ATHEFI,D,12/17/2025,362.980,362.980,362.980,0.000,116781 ATHEFI,D,12/18/2025,365.050,365.050,365.050,0.000,116781 ATHEFI,D,12/19/2025,366.940,366.940,366.940,0.000,117191 ATHEFI,D,12/22/2025,370.300,370.300,370.300,0.000,117191 ATHEFI,D,12/23/2025,370.060,370.060,370.060,0.000,117191 ATHEFI,D,12/24/2025,370.130,370.130,370.130,0.000,117191 ATHEFI,D,12/29/2025,369.450,369.450,369.450,0.000,117191 ATHEFI,D,12/30/2025,369.220,369.220,369.220,0.000,117191 ATHEFI,D,12/31/2025,369.060,369.060,369.060,0.000,117191 ATHEFI,D,1/1/2026,369.060,369.060,369.060,0.000,117191 ATHEFI,D,1/2/2026,376.500,376.500,376.500,0.000,117191 ATHEFI,D,1/5/2026,376.630,376.630,376.630,0.000,117191 ATHEFI,D,1/7/2026,378.160,378.160,378.160,0.000,117191 ATHEFI,D,1/8/2026,382.570,382.570,382.570,0.000,117191 ATHEFI,D,1/9/2026,384.240,384.240,384.240,0.000,118498 ATHEFI,D,1/12/2026,385.310,385.310,385.310,0.000,118498 ATHEFI,D,1/13/2026,384.400,384.400,384.400,0.000,118498 ATHEFI,D,1/14/2026,386.990,386.990,386.990,0.000,118498 ATHEFI,D,1/15/2026,391.560,391.560,391.560,0.000,118757 ATHEFI,D,1/16/2026,392.350,392.350,392.350,0.000,118757 ATHEFI,D,1/19/2026,394.060,394.060,394.060,0.000,118757 ATHEFI,D,1/20/2026,387.540,387.540,387.540,0.000,118757 ATHEFI,D,1/21/2026,390.520,390.520,390.520,0.000,119918 ATHEFI,D,1/22/2026,399.320,399.320,399.320,0.000,119918 ATHEFI,D,1/23/2026,397.970,397.970,397.970,0.000,119918 ATHEFI,D,1/26/2026,401.650,401.650,401.650,0.000,119918 ATHEFI,D,1/27/2026,408.100,408.100,408.100,0.000,119918 ATHEFI,D,1/28/2026,413.560,413.560,413.560,0.000,119918 ATHEFI,D,1/29/2026,411.780,411.780,411.780,0.000,119918 ATHEFI,D,1/30/2026,408.480,408.480,408.480,0.000,119918 ATHEFI,D,2/2/2026,413.120,413.120,413.120,0.000,119918 ATHEFI,D,2/3/2026,417.780,417.780,417.780,0.000,119918 ATHEFI,D,2/4/2026,422.910,422.910,422.910,0.000,120636 ATHEFI,D,2/5/2026,416.850,416.850,416.850,0.000,120636 ATHEFI,D,2/6/2026,416.630,416.630,416.630,0.000,120636 ATHEFI,D,2/9/2026,411.220,411.220,411.220,0.000,120636 ATHEFI,D,2/10/2026,412.860,412.860,412.860,0.000,120636 ATHEFI,D,2/11/2026,412.570,412.570,412.570,0.000,119374 ATHEFI,D,2/12/2026,414.000,414.000,414.000,0.000,119374 ATHEFI,D,2/13/2026,402.210,402.210,402.210,0.000,119374 ATHEFI,D,2/17/2026,395.720,395.720,395.720,0.000,119374 ATHEFI,D,2/18/2026,409.870,409.870,409.870,0.000,119374 ATHEFI,D,2/19/2026,400.480,400.480,400.480,0.000,119374 ATHEFI,D,2/20/2026,399.870,399.870,399.870,0.000,119374 ATHEFI,D,2/24/2026,399.490,399.490,399.490,0.000,119374 ATHEFI,D,2/25/2026,403.120,403.120,403.120,0.000,119374 ATHEFI,D,2/26/2026,406.370,406.370,406.370,0.000,119374 ATHEFI,D,2/27/2026,403.130,403.130,403.130,0.000,119374 ATHEFI,D,3/3/2026,366.180,366.180,366.180,0.000,119374 ATHEFI,D,3/4/2026,381.650,381.650,381.650,0.000,119374 ATHEFI,D,3/5/2026,382.540,382.540,382.540,0.000,119374 ATHEFI,D,3/6/2026,374.470,374.470,374.470,0.000,119374 ATHEFI,D,3/10/2026,381.950,381.950,381.950,0.000,123447 ATHEFI,D,3/11/2026,383.730,383.730,383.730,0.000,123447 ATHEFI,D,3/12/2026,374.840,374.840,374.840,0.000,123447 ATHEFI,D,3/13/2026,375.290,375.290,375.290,0.000,123447 ATHEFI,D,3/16/2026,375.250,375.250,375.250,0.000,123447 ATHEFI,D,3/17/2026,377.140,377.140,377.140,0.000,122347 ATHEFI,D,3/18/2026,375.160,375.160,375.160,0.000,122347 ATHEFI,D,3/19/2026,367.160,367.160,367.160,0.000,122347 ATHEFI,D,3/20/2026,364.220,364.220,364.220,0.000,122347 ATHEFI,D,3/23/2026,369.600,369.600,369.600,0.000,122347 ATHEFI,D,3/24/2026,364.110,364.110,364.110,0.000,122347 ATHEFI,D,3/26/2026,363.110,363.110,363.110,0.000,122347 ATHEFI,D,3/27/2026,357.420,357.420,357.420,0.000,122347 ATHEFI,D,3/30/2026,354.430,354.430,354.430,0.000,122347 ATHEFI,D,3/31/2026,364.690,364.690,364.690,0.000,122347 ATHEFI,D,4/1/2026,375.670,375.670,375.670,0.000,122347 ATHEFI,D,4/2/2026,372.930,372.930,372.930,0.000,122347 ATHEFI,D,4/3/2026,373.090,373.090,373.090,0.000,122347 ATHEFI,D,4/6/2026,373.010,373.010,373.010,0.000,122347 ATHEFI,D,4/7/2026,376.450,376.450,376.450,0.000,122347 ATHEFI,D,4/8/2026,398.560,398.560,398.560,0.000,122347 ATHEFI,D,4/9/2026,390.950,390.950,390.950,0.000,122347 ATHEFI,D,4/14/2026,400.560,400.560,400.560,0.000,122347 ATHEFI,D,4/15/2026,401.540,401.540,401.540,0.000,122347 ATHEFI,D,4/16/2026,400.470,400.470,400.470,0.000,122347 ATHEFI,D,4/17/2026,406.040,406.040,406.040,0.000,122347 ATHEFI,D,4/20/2026,398.300,398.300,398.300,0.000,122347 ATHEFI,D,4/21/2026,398.920,398.920,398.920,0.000,122347 ATHEFI,D,4/22/2026,395.230,395.230,395.230,0.000,122347 ATHEFI,D,4/23/2026,395.810,395.810,395.810,0.000,122347 ATHEFI,D,4/24/2026,393.800,393.800,393.800,0.000,122347 ATHEFI,D,4/27/2026,394.870,394.870,394.870,0.000,122347 ATHEFI,D,4/28/2026,391.170,391.170,391.170,0.000,122347 ATHEFI,D,4/29/2026,392.310,392.310,392.310,0.000,122347 ATHEFI,D,4/30/2026,390.330,390.330,390.330,0.000,122347 ATHEFI,D,5/4/2026,393.230,393.230,393.230,0.000,122347 ATHEFI,D,5/5/2026,397.200,397.200,397.200,0.000,122347 ATHEFI,D,5/6/2026,408.780,408.780,408.780,0.000,122347 ATHEFI,D,5/7/2026,411.090,411.090,411.090,0.000,124060 ATHEFI,D,5/8/2026,406.390,406.390,406.390,0.000,124060 ATHEFI,D,5/12/2026,405.120,405.120,405.120,0.000,125290 ATHEFI,D,5/13/2026,404.790,404.790,404.790,0.000,125290 ATHEFI,D,5/14/2026,410.990,410.990,410.990,0.000,126278 ATHEFI,D,5/15/2026,403.280,403.280,403.280,0.000,126278 ATHEFI,D,5/18/2026,400.660,400.660,400.660,0.000,126278 ATHEFI,D,5/19/2026,395.840,395.840,395.840,0.000,126278 ATHEFI,D,5/20/2026,397.830,397.830,397.830,0.000,126278 ATHEFI,D,5/21/2026,404.490,404.490,404.490,0.000,126278 ATHEFI,D,5/22/2026,405.790,405.790,405.790,0.000,126278 ATHEFI,D,5/25/2026,414.680,414.680,414.680,0.000,126278 ATHEFI,D,5/26/2026,419.070,419.070,419.070,0.000,126881 ATHEFI,D,5/27/2026,423.210,423.210,423.210,0.000,126881 ATHEFI,D,5/28/2026,420.870,420.870,420.870,0.000,126881 ATHEFI,D,5/29/2026,425.100,425.100,425.100,0.000,126881 ATHEFI,D,6/2/2026,426.060,426.060,426.060,0.000,126881 ATHEFI,D,6/3/2026,422.250,422.250,422.250,0.000,128524 ATHEFI,D,6/4/2026,419.620,419.620,419.620,0.000,128524 ATHEFI,D,6/5/2026,421.650,421.650,421.650,0.000,128524 ATHEFI,D,6/8/2026,420.740,420.740,420.740,0.000,129473 ATHEFI,D,6/9/2026,424.410,424.410,424.410,0.000,129473 ATHEFI,D,6/10/2026,422.890,422.890,422.890,0.000,129473 ATHEFI,D,6/11/2026,425.500,425.500,425.500,0.000,129473