,,,,,,, ATHEFI,D,7/1/2019,125.660,125.660,125.660,0.000,64766 ATHEFI,D,7/2/2019,125.420,125.420,125.420,0.000,64766 ATHEFI,D,7/3/2019,127.310,127.310,127.310,0.000,64766 ATHEFI,D,7/4/2019,128.740,128.740,128.740,0.000,64766 ATHEFI,D,7/5/2019,129.560,129.560,129.560,0.000,64766 ATHEFI,D,7/8/2019,127.170,127.170,127.170,0.000,64766 ATHEFI,D,7/9/2019,121.920,121.920,121.920,0.000,64766 ATHEFI,D,7/10/2019,124.910,124.910,124.910,0.000,64766 ATHEFI,D,7/11/2019,125.170,125.170,125.170,0.000,64766 ATHEFI,D,7/12/2019,124.620,124.620,124.620,0.000,64766 ATHEFI,D,7/15/2019,123.950,123.950,123.950,0.000,64766 ATHEFI,D,7/16/2019,125.260,125.260,125.260,0.000,63772 ATHEFI,D,7/17/2019,126.720,126.720,126.720,0.000,63772 ATHEFI,D,7/18/2019,127.110,127.110,127.110,0.000,62657 ATHEFI,D,7/19/2019,126.870,126.870,126.870,0.000,62657 ATHEFI,D,7/22/2019,126.360,126.360,126.360,0.000,62657 ATHEFI,D,7/23/2019,126.370,126.370,126.370,0.000,62657 ATHEFI,D,7/24/2019,127.200,127.200,127.200,0.000,62657 ATHEFI,D,7/25/2019,128.620,128.620,128.620,0.000,62657 ATHEFI,D,7/26/2019,129.200,129.200,129.200,0.000,62657 ATHEFI,D,7/29/2019,129.600,129.600,129.600,0.000,62657 ATHEFI,D,7/30/2019,129.010,129.010,129.010,0.000,62657 ATHEFI,D,7/31/2019,130.540,130.540,130.540,0.000,62657 ATHEFI,D,8/1/2019,129.880,129.880,129.880,0.000,62657 ATHEFI,D,8/5/2019,123.800,123.800,123.800,0.000,62657 ATHEFI,D,8/6/2019,122.790,122.790,122.790,0.000,62007 ATHEFI,D,8/7/2019,121.590,121.590,121.590,0.000,62007 ATHEFI,D,8/8/2019,122.950,122.950,122.950,0.000,62007 ATHEFI,D,8/9/2019,122.280,122.280,122.280,0.000,62007 ATHEFI,D,8/12/2019,120.700,120.700,120.700,0.000,62007 ATHEFI,D,8/13/2019,118.720,118.720,118.720,0.000,62007 ATHEFI,D,8/14/2019,116.500,116.500,116.500,0.000,62007 ATHEFI,D,8/16/2019,115.680,115.680,115.680,0.000,62007 ATHEFI,D,8/19/2019,120.490,120.490,120.490,0.000,62007 ATHEFI,D,8/20/2019,120.590,120.590,120.590,0.000,62007 ATHEFI,D,8/21/2019,121.350,121.350,121.350,0.000,62007 ATHEFI,D,8/22/2019,123.370,123.370,123.370,0.000,62007 ATHEFI,D,8/23/2019,121.670,121.670,121.670,0.000,62007 ATHEFI,D,8/26/2019,121.390,121.390,121.390,0.000,62007 ATHEFI,D,8/27/2019,121.660,121.660,121.660,0.000,62007 ATHEFI,D,8/28/2019,122.710,122.710,122.710,0.000,62007 ATHEFI,D,8/29/2019,124.570,124.570,124.570,0.000,62007 ATHEFI,D,8/30/2019,125.800,125.800,125.800,0.000,62007 ATHEFI,D,9/2/2019,124.470,124.470,124.470,0.000,62007 ATHEFI,D,9/3/2019,123.450,123.450,123.450,0.000,62248 ATHEFI,D,9/4/2019,123.540,123.540,123.540,0.000,62248 ATHEFI,D,9/5/2019,125.890,125.890,125.890,0.000,62248 ATHEFI,D,9/6/2019,125.140,125.140,125.140,0.000,62248 ATHEFI,D,9/9/2019,123.890,123.890,123.890,0.000,62248 ATHEFI,D,9/10/2019,123.170,123.170,123.170,0.000,62248 ATHEFI,D,9/11/2019,124.360,124.360,124.360,0.000,62248 ATHEFI,D,9/12/2019,123.510,123.510,123.510,0.000,62248 ATHEFI,D,9/13/2019,124.900,124.900,124.900,0.000,62248 ATHEFI,D,9/16/2019,126.000,126.000,126.000,0.000,62584 ATHEFI,D,9/17/2019,125.020,125.020,125.020,0.000,62584 ATHEFI,D,9/18/2019,126.210,126.210,126.210,0.000,62584 ATHEFI,D,9/19/2019,126.290,126.290,126.290,0.000,62584 ATHEFI,D,9/20/2019,126.540,126.540,126.540,0.000,62584 ATHEFI,D,9/23/2019,124.630,124.630,124.630,0.000,62584 ATHEFI,D,9/24/2019,125.410,125.410,125.410,0.000,62584 ATHEFI,D,9/25/2019,124.310,124.310,124.310,0.000,62584 ATHEFI,D,9/26/2019,124.710,124.710,124.710,0.000,62584 ATHEFI,D,9/27/2019,125.200,125.200,125.200,0.000,62584 ATHEFI,D,9/30/2019,125.200,125.200,125.200,0.000,62584 ATHEFI,D,10/1/2019,124.600,124.600,124.600,0.000,62584 ATHEFI,D,10/2/2019,121.060,121.060,121.060,0.000,62584 ATHEFI,D,10/3/2019,119.320,119.320,119.320,0.000,62584 ATHEFI,D,10/4/2019,119.550,119.550,119.550,0.000,62584 ATHEFI,D,10/7/2019,120.120,120.120,120.120,0.000,62584 ATHEFI,D,10/8/2019,119.330,119.330,119.330,0.000,62584 ATHEFI,D,10/9/2019,120.190,120.190,120.190,0.000,62584 ATHEFI,D,10/10/2019,121.000,121.000,121.000,0.000,62584 ATHEFI,D,10/11/2019,122.990,122.990,122.990,0.000,62584 ATHEFI,D,10/14/2019,122.800,122.800,122.800,0.000,62584 ATHEFI,D,10/15/2019,123.400,123.400,123.400,0.000,62584 ATHEFI,D,10/16/2019,123.700,123.700,123.700,0.000,62584 ATHEFI,D,10/17/2019,124.130,124.130,124.130,0.000,62584 ATHEFI,D,10/18/2019,124.330,124.330,124.330,0.000,62584 ATHEFI,D,10/21/2019,124.780,124.780,124.780,0.000,62584 ATHEFI,D,10/22/2019,125.670,125.670,125.670,0.000,62584 ATHEFI,D,10/23/2019,125.580,125.580,125.580,0.000,62584 ATHEFI,D,10/24/2019,125.430,125.430,125.430,0.000,62584 ATHEFI,D,10/25/2019,125.310,125.310,125.310,0.000,62584 ATHEFI,D,10/29/2019,125.300,125.300,125.300,0.000,62584 ATHEFI,D,10/30/2019,125.690,125.690,125.690,0.000,62584 ATHEFI,D,10/31/2019,126.280,126.280,126.280,0.000,62584 ATHEFI,D,11/1/2019,126.120,126.120,126.120,0.000,62584 ATHEFI,D,11/4/2019,125.860,125.860,125.860,0.000,62584 ATHEFI,D,11/5/2019,125.040,125.040,125.040,0.000,62584 ATHEFI,D,11/6/2019,123.270,123.270,123.270,0.000,62584 ATHEFI,D,11/7/2019,124.510,124.510,124.510,0.000,62584 ATHEFI,D,11/8/2019,123.970,123.970,123.970,0.000,62584 ATHEFI,D,11/11/2019,123.000,123.000,123.000,0.000,62584 ATHEFI,D,11/12/2019,123.980,123.980,123.980,0.000,62584 ATHEFI,D,11/13/2019,124.390,124.390,124.390,0.000,62584 ATHEFI,D,11/14/2019,126.350,126.350,126.350,0.000,62584 ATHEFI,D,11/15/2019,125.930,125.930,125.930,0.000,62584 ATHEFI,D,11/18/2019,126.430,126.430,126.430,0.000,62584 ATHEFI,D,11/19/2019,127.100,127.100,127.100,0.000,62584 ATHEFI,D,11/20/2019,126.870,126.870,126.870,0.000,62584 ATHEFI,D,11/21/2019,126.170,126.170,126.170,0.000,62584 ATHEFI,D,11/22/2019,127.060,127.060,127.060,0.000,62584 ATHEFI,D,11/25/2019,127.500,127.500,127.500,0.000,62584 ATHEFI,D,11/26/2019,126.810,126.810,126.810,0.000,62584 ATHEFI,D,11/27/2019,127.370,127.370,127.370,0.000,62584 ATHEFI,D,11/28/2019,128.100,128.100,128.100,0.000,62584 ATHEFI,D,11/29/2019,128.500,128.500,128.500,0.000,62584 ATHEFI,D,12/2/2019,127.520,127.520,127.520,0.000,62584 ATHEFI,D,12/3/2019,126.120,126.120,126.120,0.000,62584 ATHEFI,D,12/4/2019,126.760,126.760,126.760,0.000,62584 ATHEFI,D,12/5/2019,125.720,125.720,125.720,0.000,62584 ATHEFI,D,12/6/2019,125.240,125.240,125.240,0.000,62584 ATHEFI,D,12/9/2019,123.880,123.880,123.880,0.000,62584 ATHEFI,D,12/10/2019,123.770,123.770,123.770,0.000,62584 ATHEFI,D,12/11/2019,126.460,126.460,126.460,0.000,62584 ATHEFI,D,12/12/2019,126.290,126.290,126.290,0.000,62584 ATHEFI,D,12/13/2019,127.120,127.120,127.120,0.000,62584 ATHEFI,D,12/16/2019,125.860,125.860,125.860,0.000,62584 ATHEFI,D,12/17/2019,127.280,127.280,127.280,0.000,62584 ATHEFI,D,12/18/2019,128.280,128.280,128.280,0.000,62584 ATHEFI,D,12/19/2019,128.250,128.250,128.250,0.000,62584 ATHEFI,D,12/20/2019,127.100,127.100,127.100,0.000,62584 ATHEFI,D,12/23/2019,129.820,129.820,129.820,0.000,62584 ATHEFI,D,12/24/2019,129.820,129.820,129.820,0.000,62584 ATHEFI,D,12/27/2019,130.750,130.750,130.750,0.000,62584 ATHEFI,D,12/30/2019,130.290,130.290,130.290,0.000,62584 ATHEFI,D,12/31/2019,130.570,130.570,130.570,0.000,62584 ATHEFI,D,1/1/2020,130.570,130.570,130.570,0.000,62584 ATHEFI,D,1/3/2020,130.520,130.520,130.520,0.000,62584 ATHEFI,D,1/7/2020,131.110,131.110,131.110,0.000,62584 ATHEFI,D,1/8/2020,130.010,130.010,130.010,0.000,62584 ATHEFI,D,1/10/2020,131.820,131.820,131.820,0.000,62584 ATHEFI,D,1/13/2020,131.140,131.140,131.140,0.000,62584 ATHEFI,D,1/14/2020,131.590,131.590,131.590,0.000,62584 ATHEFI,D,1/15/2020,132.400,132.400,132.400,0.000,62584 ATHEFI,D,1/16/2020,133.200,133.200,133.200,0.000,62584 ATHEFI,D,1/17/2020,133.650,133.650,133.650,0.000,62584 ATHEFI,D,1/20/2020,134.390,134.390,134.390,0.000,62584 ATHEFI,D,1/21/2020,134.820,134.820,134.820,0.000,62584 ATHEFI,D,1/22/2020,135.240,135.240,135.240,0.000,63237 ATHEFI,D,1/23/2020,134.620,134.620,134.620,0.000,63237 ATHEFI,D,1/24/2020,136.410,136.410,136.410,0.000,63237 ATHEFI,D,1/27/2020,134.590,134.590,134.590,0.000,63237 ATHEFI,D,1/28/2020,134.500,134.500,134.500,0.000,63549 ATHEFI,D,1/29/2020,134.510,134.510,134.510,0.000,63549 ATHEFI,D,1/30/2020,132.840,132.840,132.840,0.000,63757 ATHEFI,D,1/31/2020,130.970,130.970,130.970,0.000,63757 ATHEFI,D,2/3/2020,130.180,130.180,130.180,0.000,63757 ATHEFI,D,2/4/2020,131.830,131.830,131.830,0.000,63757 ATHEFI,D,2/5/2020,132.710,132.710,132.710,0.000,63757 ATHEFI,D,2/6/2020,132.350,132.350,132.350,0.000,63757 ATHEFI,D,2/7/2020,130.990,130.990,130.990,0.000,63757 ATHEFI,D,2/10/2020,130.220,130.220,130.220,0.000,63757 ATHEFI,D,2/11/2020,132.030,132.030,132.030,0.000,63757 ATHEFI,D,2/12/2020,132.620,132.620,132.620,0.000,63757 ATHEFI,D,2/13/2020,132.020,132.020,132.020,0.000,63757 ATHEFI,D,2/14/2020,132.540,132.540,132.540,0.000,63757 ATHEFI,D,2/17/2020,131.850,131.850,131.850,0.000,63757 ATHEFI,D,2/18/2020,130.420,130.420,130.420,0.000,63757 ATHEFI,D,2/19/2020,130.910,130.910,130.910,0.000,63757 ATHEFI,D,2/20/2020,130.690,130.690,130.690,0.000,63757 ATHEFI,D,2/21/2020,127.880,127.880,127.880,0.000,63757 ATHEFI,D,2/24/2020,117.150,117.150,117.150,0.000,63757 ATHEFI,D,2/25/2020,119.200,119.200,119.200,0.000,63757 ATHEFI,D,2/26/2020,115.800,115.800,115.800,0.000,63757 ATHEFI,D,2/27/2020,110.360,110.360,110.360,0.000,63757 ATHEFI,D,2/28/2020,104.250,104.250,104.250,0.000,63757 ATHEFI,D,3/3/2020,109.640,109.640,109.640,0.000,63757 ATHEFI,D,3/4/2020,110.850,110.850,110.850,0.000,63757 ATHEFI,D,3/5/2020,104.610,104.610,104.610,0.000,63757 ATHEFI,D,3/6/2020,98.400,98.400,98.400,0.000,63757 ATHEFI,D,3/9/2020,85.180,85.180,85.180,0.000,63757 ATHEFI,D,3/10/2020,91.200,91.200,91.200,0.000,62207 ATHEFI,D,3/11/2020,87.800,87.800,87.800,0.000,62207 ATHEFI,D,3/12/2020,80.830,80.830,80.830,0.000,62207 ATHEFI,D,3/13/2020,81.910,81.910,81.910,0.000,62207 ATHEFI,D,3/16/2020,74.030,74.030,74.030,0.000,62207 ATHEFI,D,3/17/2020,75.320,75.320,75.320,0.000,62207 ATHEFI,D,3/18/2020,74.280,74.280,74.280,0.000,62207 ATHEFI,D,3/19/2020,77.930,77.930,77.930,0.000,62207 ATHEFI,D,3/20/2020,82.400,82.400,82.400,0.000,62207 ATHEFI,D,3/23/2020,77.290,77.290,77.290,0.000,60341 ATHEFI,D,3/24/2020,81.060,81.060,81.060,0.000,60341 ATHEFI,D,3/26/2020,83.340,83.340,83.340,0.000,61698 ATHEFI,D,3/27/2020,81.240,81.240,81.240,0.000,61698 ATHEFI,D,3/30/2020,81.100,81.100,81.100,0.000,61698 ATHEFI,D,3/31/2020,81.190,81.190,81.190,0.000,61698 ATHEFI,D,4/1/2020,78.620,78.620,78.620,0.000,61698 ATHEFI,D,4/2/2020,79.040,79.040,79.040,0.000,61698 ATHEFI,D,4/3/2020,78.850,78.850,78.850,0.000,61698 ATHEFI,D,4/6/2020,83.300,83.300,83.300,0.000,61698 ATHEFI,D,4/7/2020,86.610,86.610,86.610,0.000,61698 ATHEFI,D,4/8/2020,86.600,86.600,86.600,0.000,61698 ATHEFI,D,4/9/2020,86.480,86.480,86.480,0.000,61698 ATHEFI,D,4/10/2020,86.470,86.470,86.470,0.000,61698 ATHEFI,D,4/13/2020,86.470,86.470,86.470,0.000,61698 ATHEFI,D,4/14/2020,88.870,88.870,88.870,0.000,61698 ATHEFI,D,4/15/2020,86.790,86.790,86.790,0.000,61698 ATHEFI,D,4/16/2020,87.100,87.100,87.100,0.000,61698 ATHEFI,D,4/21/2020,85.960,85.960,85.960,0.000,61698 ATHEFI,D,4/22/2020,86.730,86.730,86.730,0.000,61698 ATHEFI,D,4/23/2020,89.280,89.280,89.280,0.000,61698 ATHEFI,D,4/24/2020,88.820,88.820,88.820,0.000,61698 ATHEFI,D,4/27/2020,91.220,91.220,91.220,0.000,61698 ATHEFI,D,4/28/2020,92.130,92.130,92.130,0.000,61698 ATHEFI,D,4/29/2020,92.790,92.790,92.790,0.000,61698 ATHEFI,D,4/30/2020,91.180,91.180,91.180,0.000,61698 ATHEFI,D,5/4/2020,88.650,88.650,88.650,0.000,61698 ATHEFI,D,5/5/2020,88.900,88.900,88.900,0.000,61698 ATHEFI,D,5/6/2020,87.920,87.920,87.920,0.000,61698 ATHEFI,D,5/7/2020,88.440,88.440,88.440,0.000,61698 ATHEFI,D,5/8/2020,89.100,89.100,89.100,0.000,61698 ATHEFI,D,5/11/2020,88.090,88.090,88.090,0.000,61698 ATHEFI,D,5/12/2020,88.080,88.080,88.080,0.000,61698 ATHEFI,D,5/13/2020,87.230,87.230,87.230,0.000,61698 ATHEFI,D,5/14/2020,86.770,86.770,86.770,0.000,61698 ATHEFI,D,5/15/2020,87.210,87.210,87.210,0.000,61698 ATHEFI,D,5/18/2020,88.780,88.780,88.780,0.000,61698 ATHEFI,D,5/19/2020,87.950,87.950,87.950,0.000,61698 ATHEFI,D,5/20/2020,88.580,88.580,88.580,0.000,61698 ATHEFI,D,5/21/2020,88.870,88.870,88.870,0.000,61698 ATHEFI,D,5/22/2020,89.020,89.020,89.020,0.000,61698 ATHEFI,D,5/25/2020,90.260,90.260,90.260,0.000,61698 ATHEFI,D,5/26/2020,91.900,91.900,91.900,0.000,61698 ATHEFI,D,5/27/2020,94.690,94.690,94.690,0.000,61698 ATHEFI,D,5/28/2020,95.300,95.300,95.300,0.000,61698 ATHEFI,D,5/29/2020,93.290,93.290,93.290,0.000,61698 ATHEFI,D,6/1/2020,93.870,93.870,93.870,0.000,61698 ATHEFI,D,6/2/2020,95.760,95.760,95.760,0.000,61698 ATHEFI,D,6/3/2020,96.040,96.040,96.040,0.000,61698 ATHEFI,D,6/4/2020,95.820,95.820,95.820,0.000,61698 ATHEFI,D,6/5/2020,97.820,97.820,97.820,0.000,61698 ATHEFI,D,6/9/2020,97.030,97.030,97.030,0.000,61698 ATHEFI,D,6/10/2020,94.730,94.730,94.730,0.000,61698 ATHEFI,D,6/11/2020,92.600,92.600,92.600,0.000,61698 ATHEFI,D,6/12/2020,92.740,92.740,92.740,0.000,61698 ATHEFI,D,6/15/2020,92.710,92.710,92.710,0.000,61698 ATHEFI,D,6/16/2020,96.220,96.220,96.220,0.000,61698 ATHEFI,D,6/17/2020,96.160,96.160,96.160,0.000,61698 ATHEFI,D,6/18/2020,95.010,95.010,95.010,0.000,61698 ATHEFI,D,6/19/2020,96.040,96.040,96.040,0.000,61698 ATHEFI,D,6/22/2020,96.170,96.170,96.170,0.000,61698 ATHEFI,D,6/23/2020,96.870,96.870,96.870,0.000,61698 ATHEFI,D,6/24/2020,96.220,96.220,96.220,0.000,61698 ATHEFI,D,6/25/2020,94.610,94.610,94.610,0.000,61698 ATHEFI,D,6/26/2020,93.100,93.100,93.100,0.000,61698 ATHEFI,D,6/29/2020,92.590,92.590,92.590,0.000,61698 ATHEFI,D,6/30/2020,93.030,93.030,93.030,0.000,61698 ATHEFI,D,7/1/2020,93.330,93.330,93.330,0.000,61698 ATHEFI,D,7/2/2020,96.240,96.240,96.240,0.000,61698 ATHEFI,D,7/3/2020,95.830,95.830,95.830,0.000,61698 ATHEFI,D,7/6/2020,95.690,95.690,95.690,0.000,61698 ATHEFI,D,7/7/2020,94.180,94.180,94.180,0.000,61698 ATHEFI,D,7/8/2020,93.610,93.610,93.610,0.000,61698 ATHEFI,D,7/9/2020,93.710,93.710,93.710,0.000,61698 ATHEFI,D,7/10/2020,92.920,92.920,92.920,0.000,61698 ATHEFI,D,7/13/2020,92.620,92.620,92.620,0.000,61698 ATHEFI,D,7/14/2020,92.360,92.360,92.360,0.000,61698 ATHEFI,D,7/15/2020,93.480,93.480,93.480,0.000,61698 ATHEFI,D,7/16/2020,93.770,93.770,93.770,0.000,61698 ATHEFI,D,7/17/2020,94.570,94.570,94.570,0.000,61698 ATHEFI,D,7/20/2020,95.790,95.790,95.790,0.000,61698 ATHEFI,D,7/21/2020,93.410,93.410,93.410,0.000,61698 ATHEFI,D,7/22/2020,94.830,94.830,94.830,0.000,61698 ATHEFI,D,7/23/2020,94.010,94.010,94.010,0.000,61698 ATHEFI,D,7/24/2020,93.480,93.480,93.480,0.000,61698 ATHEFI,D,7/27/2020,92.530,92.530,92.530,0.000,61698 ATHEFI,D,7/28/2020,93.440,93.440,93.440,0.000,61698 ATHEFI,D,7/29/2020,93.190,93.190,93.190,0.000,61698 ATHEFI,D,7/30/2020,91.520,91.520,91.520,0.000,61698 ATHEFI,D,7/31/2020,91.860,91.860,91.860,0.000,61698 ATHEFI,D,8/3/2020,91.840,91.840,91.840,0.000,61698 ATHEFI,D,8/4/2020,93.430,93.430,93.430,0.000,61698 ATHEFI,D,8/5/2020,95.020,95.020,95.020,0.000,61698 ATHEFI,D,8/6/2020,95.400,95.400,95.400,0.000,61698 ATHEFI,D,8/7/2020,94.480,94.480,94.480,0.000,61698 ATHEFI,D,8/10/2020,92.360,92.360,92.360,0.000,61698 ATHEFI,D,8/11/2020,93.490,93.490,93.490,0.000,61698 ATHEFI,D,8/12/2020,94.670,94.670,94.670,0.000,61698 ATHEFI,D,8/13/2020,95.000,95.000,95.000,0.000,61698 ATHEFI,D,8/14/2020,94.660,94.660,94.660,0.000,61698 ATHEFI,D,8/17/2020,94.660,94.660,94.660,0.000,61698 ATHEFI,D,8/18/2020,95.290,95.290,95.290,0.000,61698 ATHEFI,D,8/19/2020,95.370,95.370,95.370,0.000,61698 ATHEFI,D,8/20/2020,94.500,94.500,94.500,0.000,61698 ATHEFI,D,8/21/2020,94.090,94.090,94.090,0.000,61698 ATHEFI,D,8/24/2020,93.930,93.930,93.930,0.000,61698 ATHEFI,D,8/25/2020,93.590,93.590,93.590,0.000,61698 ATHEFI,D,8/26/2020,94.550,94.550,94.550,0.000,61698 ATHEFI,D,8/27/2020,94.020,94.020,94.020,0.000,61698 ATHEFI,D,8/28/2020,94.210,94.210,94.210,0.000,61698 ATHEFI,D,8/31/2020,94.540,94.540,94.540,0.000,61698 ATHEFI,D,9/1/2020,95.050,95.050,95.050,0.000,61698 ATHEFI,D,9/2/2020,95.200,95.200,95.200,0.000,61698 ATHEFI,D,9/3/2020,95.650,95.650,95.650,0.000,61698 ATHEFI,D,9/4/2020,95.080,95.080,95.080,0.000,61698 ATHEFI,D,9/7/2020,95.290,95.290,95.290,0.000,61698 ATHEFI,D,9/8/2020,93.840,93.840,93.840,0.000,61698 ATHEFI,D,9/9/2020,94.150,94.150,94.150,0.000,61698 ATHEFI,D,9/10/2020,95.320,95.320,95.320,0.000,61698 ATHEFI,D,9/11/2020,94.960,94.960,94.960,0.000,61698 ATHEFI,D,9/14/2020,98.090,98.090,98.090,0.000,61698 ATHEFI,D,9/15/2020,98.510,98.510,98.510,0.000,61698 ATHEFI,D,9/16/2020,98.800,98.800,98.800,0.000,61698 ATHEFI,D,9/17/2020,99.170,99.170,99.170,0.000,61698 ATHEFI,D,9/18/2020,98.660,98.660,98.660,0.000,61698 ATHEFI,D,9/21/2020,96.160,96.160,96.160,0.000,61698 ATHEFI,D,9/22/2020,95.400,95.400,95.400,0.000,61698 ATHEFI,D,9/23/2020,95.660,95.660,95.660,0.000,61698 ATHEFI,D,9/24/2020,95.130,95.130,95.130,0.000,61698 ATHEFI,D,9/25/2020,95.430,95.430,95.430,0.000,61698 ATHEFI,D,9/28/2020,96.030,96.030,96.030,0.000,61698 ATHEFI,D,9/29/2020,96.260,96.260,96.260,0.000,61698 ATHEFI,D,9/30/2020,96.580,96.580,96.580,0.000,61698 ATHEFI,D,10/1/2020,97.740,97.740,97.740,0.000,61698 ATHEFI,D,10/2/2020,97.260,97.260,97.260,0.000,61698 ATHEFI,D,10/5/2020,98.120,98.120,98.120,0.000,61698 ATHEFI,D,10/6/2020,99.490,99.490,99.490,0.000,61698 ATHEFI,D,10/7/2020,99.570,99.570,99.570,0.000,61698 ATHEFI,D,10/8/2020,100.370,100.370,100.370,0.000,61698 ATHEFI,D,10/9/2020,100.740,100.740,100.740,0.000,61698 ATHEFI,D,10/12/2020,98.950,98.950,98.950,0.000,61698 ATHEFI,D,10/13/2020,99.170,99.170,99.170,0.000,61698 ATHEFI,D,10/14/2020,98.800,98.800,98.800,0.000,61698 ATHEFI,D,10/15/2020,97.110,97.110,97.110,0.000,61698 ATHEFI,D,10/16/2020,97.240,97.240,97.240,0.000,61698 ATHEFI,D,10/19/2020,96.910,96.910,96.910,0.000,61698 ATHEFI,D,10/20/2020,97.460,97.460,97.460,0.000,61698 ATHEFI,D,10/21/2020,97.220,97.220,97.220,0.000,61698 ATHEFI,D,10/22/2020,95.820,95.820,95.820,0.000,61698 ATHEFI,D,10/23/2020,95.980,95.980,95.980,0.000,61698 ATHEFI,D,10/26/2020,94.380,94.380,94.380,0.000,61698 ATHEFI,D,10/27/2020,94.900,94.900,94.900,0.000,61698 ATHEFI,D,10/29/2020,90.630,90.630,90.630,0.000,61698 ATHEFI,D,10/30/2020,91.580,91.580,91.580,0.000,61698 ATHEFI,D,11/2/2020,92.270,92.270,92.270,0.000,61698 ATHEFI,D,11/3/2020,93.430,93.430,93.430,0.000,61698 ATHEFI,D,11/4/2020,93.840,93.840,93.840,0.000,61698 ATHEFI,D,11/5/2020,94.120,94.120,94.120,0.000,61698 ATHEFI,D,11/6/2020,94.100,94.100,94.100,0.000,61698 ATHEFI,D,11/9/2020,101.210,101.210,101.210,0.000,61698 ATHEFI,D,11/10/2020,101.200,101.200,101.200,0.000,61698 ATHEFI,D,11/11/2020,101.710,101.710,101.710,0.000,61698 ATHEFI,D,11/12/2020,101.410,101.410,101.410,0.000,61698 ATHEFI,D,11/13/2020,101.720,101.720,101.720,0.000,61698 ATHEFI,D,11/16/2020,105.640,105.640,105.640,0.000,61698 ATHEFI,D,11/17/2020,105.670,105.670,105.670,0.000,61698 ATHEFI,D,11/19/2020,107.670,107.670,107.670,0.000,61698 ATHEFI,D,11/20/2020,107.720,107.720,107.720,0.000,61698 ATHEFI,D,11/23/2020,108.190,108.190,108.190,0.000,61698 ATHEFI,D,11/24/2020,108.410,108.410,108.410,0.000,61698 ATHEFI,D,11/25/2020,109.220,109.220,109.220,0.000,61698 ATHEFI,D,11/26/2020,111.650,111.650,111.650,0.000,61698 ATHEFI,D,11/27/2020,112.800,112.800,112.800,0.000,61698 ATHEFI,D,11/30/2020,112.940,112.940,112.940,0.000,61698 ATHEFI,D,12/1/2020,115.420,115.420,115.420,0.000,61698 ATHEFI,D,12/2/2020,115.330,115.330,115.330,0.000,61698 ATHEFI,D,12/3/2020,116.870,116.870,116.870,0.000,61698 ATHEFI,D,12/4/2020,118.940,118.940,118.940,0.000,61698 ATHEFI,D,12/7/2020,119.950,119.950,119.950,0.000,61698 ATHEFI,D,12/8/2020,120.220,120.220,120.220,0.000,62254 ATHEFI,D,12/9/2020,121.250,121.250,121.250,0.000,62254 ATHEFI,D,12/10/2020,118.090,118.090,118.090,0.000,62873 ATHEFI,D,12/11/2020,119.590,119.590,119.590,0.000,62873 ATHEFI,D,12/14/2020,120.740,120.740,120.740,0.000,62873 ATHEFI,D,12/15/2020,120.940,120.940,120.940,0.000,62873 ATHEFI,D,12/16/2020,121.270,121.270,121.270,0.000,62873 ATHEFI,D,12/17/2020,121.300,121.300,121.300,0.000,62873 ATHEFI,D,12/18/2020,122.630,122.630,122.630,0.000,62873 ATHEFI,D,12/21/2020,118.660,118.660,118.660,0.000,62873 ATHEFI,D,12/22/2020,120.450,120.450,120.450,0.000,62873 ATHEFI,D,12/23/2020,121.040,121.040,121.040,0.000,62873 ATHEFI,D,12/24/2020,121.140,121.140,121.140,0.000,62873 ATHEFI,D,12/28/2020,124.360,124.360,124.360,0.000,62873 ATHEFI,D,12/29/2020,124.150,124.150,124.150,0.000,62873 ATHEFI,D,12/30/2020,124.610,124.610,124.610,0.000,63243 ATHEFI,D,12/31/2020,124.850,124.850,124.850,0.000,63243 ATHEFI,D,1/1/2021,124.850,124.850,124.850,0.000,63243 ATHEFI,D,1/5/2021,125.140,125.140,125.140,0.000,63243 ATHEFI,D,1/7/2021,126.000,126.000,126.000,0.000,63243 ATHEFI,D,1/8/2021,125.550,125.550,125.550,0.000,63243 ATHEFI,D,1/11/2021,123.120,123.120,123.120,0.000,63243 ATHEFI,D,1/12/2021,122.660,122.660,122.660,0.000,63243 ATHEFI,D,1/13/2021,123.730,123.730,123.730,0.000,63243 ATHEFI,D,1/14/2021,121.840,121.840,121.840,0.000,63243 ATHEFI,D,1/15/2021,121.440,121.440,121.440,0.000,63243 ATHEFI,D,1/18/2021,121.030,121.030,121.030,0.000,63243 ATHEFI,D,1/19/2021,122.910,122.910,122.910,0.000,63243 ATHEFI,D,1/20/2021,123.190,123.190,123.190,0.000,63243 ATHEFI,D,1/21/2021,122.760,122.760,122.760,0.000,63243 ATHEFI,D,1/22/2021,120.870,120.870,120.870,0.000,63243 ATHEFI,D,1/25/2021,118.460,118.460,118.460,0.000,63243 ATHEFI,D,1/26/2021,118.780,118.780,118.780,0.000,63243 ATHEFI,D,1/27/2021,115.620,115.620,115.620,0.000,63243 ATHEFI,D,1/28/2021,117.450,117.450,117.450,0.000,63243 ATHEFI,D,1/29/2021,116.970,116.970,116.970,0.000,62818 ATHEFI,D,2/1/2021,117.260,117.260,117.260,0.000,62818 ATHEFI,D,2/2/2021,118.510,118.510,118.510,0.000,62818 ATHEFI,D,2/3/2021,119.090,119.090,119.090,0.000,62818 ATHEFI,D,2/4/2021,118.220,118.220,118.220,0.000,62818 ATHEFI,D,2/5/2021,118.790,118.790,118.790,0.000,62818 ATHEFI,D,2/8/2021,121.040,121.040,121.040,0.000,62818 ATHEFI,D,2/9/2021,118.380,118.380,118.380,0.000,62818 ATHEFI,D,2/10/2021,119.630,119.630,119.630,0.000,62818 ATHEFI,D,2/11/2021,121.020,121.020,121.020,0.000,62818 ATHEFI,D,2/12/2021,121.550,121.550,121.550,0.000,62818 ATHEFI,D,2/15/2021,124.060,124.060,124.060,0.000,62818 ATHEFI,D,2/16/2021,124.230,124.230,124.230,0.000,62818 ATHEFI,D,2/17/2021,123.270,123.270,123.270,0.000,62818 ATHEFI,D,2/18/2021,122.480,122.480,122.480,0.000,62818 ATHEFI,D,2/19/2021,122.310,122.310,122.310,0.000,62818 ATHEFI,D,2/22/2021,122.490,122.490,122.490,0.000,62818 ATHEFI,D,2/23/2021,120.570,120.570,120.570,0.000,62818 ATHEFI,D,2/24/2021,121.110,121.110,121.110,0.000,62818 ATHEFI,D,2/25/2021,122.740,122.740,122.740,0.000,62818 ATHEFI,D,2/26/2021,123.270,123.270,123.270,0.000,62818 ATHEFI,D,3/1/2021,124.620,124.620,124.620,0.000,62818 ATHEFI,D,3/2/2021,126.640,126.640,126.640,0.000,62818 ATHEFI,D,3/3/2021,126.340,126.340,126.340,0.000,60118 ATHEFI,D,3/4/2021,126.920,126.920,126.920,0.000,60118 ATHEFI,D,3/5/2021,128.060,128.060,128.060,0.000,57418 ATHEFI,D,3/8/2021,128.720,128.720,128.720,0.000,57418 ATHEFI,D,3/9/2021,130.020,130.020,130.020,0.000,54739 ATHEFI,D,3/10/2021,130.520,130.520,130.520,0.000,54739 ATHEFI,D,3/11/2021,131.720,131.720,131.720,0.000,54739 ATHEFI,D,3/12/2021,131.630,131.630,131.630,0.000,54739 ATHEFI,D,3/16/2021,132.830,132.830,132.830,0.000,54739 ATHEFI,D,3/17/2021,132.880,132.880,132.880,0.000,54739 ATHEFI,D,3/19/2021,130.620,130.620,130.620,0.000,54739 ATHEFI,D,3/22/2021,130.640,130.640,130.640,0.000,54739 ATHEFI,D,3/23/2021,130.780,130.780,130.780,0.000,54739 ATHEFI,D,3/24/2021,131.720,131.720,131.720,0.000,54739 ATHEFI,D,3/26/2021,133.970,133.970,133.970,0.000,54739 ATHEFI,D,3/29/2021,135.050,135.050,135.050,0.000,54739 ATHEFI,D,3/30/2021,137.130,137.130,137.130,0.000,54739 ATHEFI,D,3/31/2021,136.150,136.150,136.150,0.000,54739 ATHEFI,D,4/1/2021,137.520,137.520,137.520,0.000,54739 ATHEFI,D,4/2/2021,137.570,137.570,137.570,0.000,54739 ATHEFI,D,4/5/2021,137.540,137.540,137.540,0.000,54739 ATHEFI,D,4/6/2021,137.770,137.770,137.770,0.000,54739 ATHEFI,D,4/7/2021,138.860,138.860,138.860,0.000,54739 ATHEFI,D,4/8/2021,139.210,139.210,139.210,0.000,54739 ATHEFI,D,4/9/2021,140.500,140.500,140.500,0.000,54739 ATHEFI,D,4/12/2021,141.470,141.470,141.470,0.000,54739 ATHEFI,D,4/13/2021,141.300,141.300,141.300,0.000,54739 ATHEFI,D,4/14/2021,142.100,142.100,142.100,0.000,54739 ATHEFI,D,4/15/2021,142.450,142.450,142.450,0.000,54739 ATHEFI,D,4/16/2021,141.850,141.850,141.850,0.000,54739 ATHEFI,D,4/19/2021,138.820,138.820,138.820,0.000,54739 ATHEFI,D,4/20/2021,139.140,139.140,139.140,0.000,54739 ATHEFI,D,4/21/2021,139.670,139.670,139.670,0.000,54739 ATHEFI,D,4/22/2021,142.620,142.620,142.620,0.000,54739 ATHEFI,D,4/23/2021,143.540,143.540,143.540,0.000,54739 ATHEFI,D,4/26/2021,145.390,145.390,145.390,0.000,54739 ATHEFI,D,4/27/2021,144.090,144.090,144.090,0.000,54739 ATHEFI,D,4/28/2021,144.910,144.910,144.910,0.000,54739 ATHEFI,D,4/29/2021,147.140,147.140,147.140,0.000,54739 ATHEFI,D,5/5/2021,147.730,147.730,147.730,0.000,54739 ATHEFI,D,5/6/2021,146.820,146.820,146.820,0.000,54739 ATHEFI,D,5/7/2021,146.690,146.690,146.690,0.000,54739 ATHEFI,D,5/10/2021,147.440,147.440,147.440,0.000,54739 ATHEFI,D,5/11/2021,146.400,146.400,146.400,0.000,54739 ATHEFI,D,5/12/2021,147.090,147.090,147.090,0.000,54739 ATHEFI,D,5/13/2021,147.430,147.430,147.430,0.000,54739 ATHEFI,D,5/14/2021,148.520,148.520,148.520,0.000,54739 ATHEFI,D,5/17/2021,148.310,148.310,148.310,0.000,54739 ATHEFI,D,5/18/2021,148.280,148.280,148.280,0.000,54739 ATHEFI,D,5/19/2021,144.770,144.770,144.770,0.000,54739 ATHEFI,D,5/20/2021,146.070,146.070,146.070,0.000,54739 ATHEFI,D,5/21/2021,142.490,142.490,142.490,0.000,54739 ATHEFI,D,5/24/2021,144.650,144.650,144.650,0.000,54739 ATHEFI,D,5/25/2021,143.220,143.220,143.220,0.000,54739 ATHEFI,D,5/26/2021,143.810,143.810,143.810,0.000,54739 ATHEFI,D,5/27/2021,145.240,145.240,145.240,0.000,54739 ATHEFI,D,5/28/2021,146.400,146.400,146.400,0.000,54739 ATHEFI,D,5/31/2021,147.520,147.520,147.520,0.000,54739 ATHEFI,D,6/1/2021,147.740,147.740,147.740,0.000,54739 ATHEFI,D,6/2/2021,148.230,148.230,148.230,0.000,54739 ATHEFI,D,6/3/2021,147.970,147.970,147.970,0.000,54739 ATHEFI,D,6/4/2021,148.820,148.820,148.820,0.000,54739 ATHEFI,D,6/7/2021,149.510,149.510,149.510,0.000,54739 ATHEFI,D,6/8/2021,150.800,150.800,150.800,0.000,54739 ATHEFI,D,6/9/2021,150.620,150.620,150.620,0.000,54739 ATHEFI,D,6/10/2021,152.050,152.050,152.050,0.000,54739 ATHEFI,D,6/14/2021,152.570,152.570,152.570,0.000,54739 ATHEFI,D,6/15/2021,151.760,151.760,151.760,0.000,54739 ATHEFI,D,6/16/2021,150.380,150.380,150.380,0.000,54739 ATHEFI,D,6/17/2021,150.820,150.820,150.820,0.000,54739 ATHEFI,D,6/18/2021,149.680,149.680,149.680,0.000,54739 ATHEFI,D,6/22/2021,149.450,149.450,149.450,0.000,54739 ATHEFI,D,6/23/2021,150.550,150.550,150.550,0.000,54739 ATHEFI,D,6/24/2021,150.570,150.570,150.570,0.000,54739 ATHEFI,D,6/25/2021,151.580,151.580,151.580,0.000,54739 ATHEFI,D,6/28/2021,150.630,150.630,150.630,0.000,54739 ATHEFI,D,6/29/2021,149.210,149.210,149.210,0.000,54739 ATHEFI,D,6/30/2021,148.350,148.350,148.350,0.000,54739 ATHEFI,D,7/1/2021,148.800,148.800,148.800,0.000,54739 ATHEFI,D,7/2/2021,149.150,149.150,149.150,0.000,54739 ATHEFI,D,7/5/2021,147.490,147.490,147.490,0.000,54739 ATHEFI,D,7/6/2021,147.850,147.850,147.850,0.000,54739 ATHEFI,D,7/7/2021,147.820,147.820,147.820,0.000,54739 ATHEFI,D,7/9/2021,147.560,147.560,147.560,0.000,54739 ATHEFI,D,7/12/2021,147.130,147.130,147.130,0.000,54739 ATHEFI,D,7/13/2021,146.870,146.870,146.870,0.000,54739 ATHEFI,D,7/14/2021,147.280,147.280,147.280,0.000,54739 ATHEFI,D,7/15/2021,146.340,146.340,146.340,0.000,54739 ATHEFI,D,7/16/2021,146.690,146.690,146.690,0.000,54739 ATHEFI,D,7/19/2021,141.270,141.270,141.270,0.000,54739 ATHEFI,D,7/20/2021,142.380,142.380,142.380,0.000,54739 ATHEFI,D,7/21/2021,145.160,145.160,145.160,0.000,54739 ATHEFI,D,7/22/2021,145.950,145.950,145.950,0.000,54739 ATHEFI,D,7/23/2021,146.790,146.790,146.790,0.000,54739 ATHEFI,D,7/26/2021,148.070,148.070,148.070,0.000,54739 ATHEFI,D,7/27/2021,148.840,148.840,148.840,0.000,54739 ATHEFI,D,7/28/2021,149.480,149.480,149.480,0.000,54739 ATHEFI,D,7/29/2021,149.830,149.830,149.830,0.000,54739 ATHEFI,D,7/30/2021,150.570,150.570,150.570,0.000,54739 ATHEFI,D,8/2/2021,151.860,151.860,151.860,0.000,54739 ATHEFI,D,8/3/2021,151.010,151.010,151.010,0.000,54739 ATHEFI,D,8/4/2021,151.240,151.240,151.240,0.000,54739 ATHEFI,D,8/5/2021,152.030,152.030,152.030,0.000,54739 ATHEFI,D,8/6/2021,150.760,150.760,150.760,0.000,54739 ATHEFI,D,8/10/2021,151.830,151.830,151.830,0.000,54739 ATHEFI,D,8/11/2021,152.200,152.200,152.200,0.000,54739 ATHEFI,D,8/13/2021,152.090,152.090,152.090,0.000,54739 ATHEFI,D,8/16/2021,152.700,152.700,152.700,0.000,54739 ATHEFI,D,8/17/2021,152.740,152.740,152.740,0.000,54739 ATHEFI,D,8/19/2021,149.950,149.950,149.950,0.000,54739 ATHEFI,D,8/20/2021,150.910,150.910,150.910,0.000,54739 ATHEFI,D,8/23/2021,153.010,153.010,153.010,0.000,54739 ATHEFI,D,8/24/2021,154.540,154.540,154.540,0.000,54739 ATHEFI,D,8/25/2021,155.640,155.640,155.640,0.000,54739 ATHEFI,D,8/26/2021,155.280,155.280,155.280,0.000,54739 ATHEFI,D,8/27/2021,155.270,155.270,155.270,0.000,54739 ATHEFI,D,8/30/2021,157.130,157.130,157.130,0.000,54739 ATHEFI,D,8/31/2021,156.640,156.640,156.640,0.000,54739 ATHEFI,D,9/1/2021,156.010,156.010,156.010,0.000,54739 ATHEFI,D,9/2/2021,155.850,155.850,155.850,0.000,54739 ATHEFI,D,9/3/2021,156.120,156.120,156.120,0.000,54739 ATHEFI,D,9/6/2021,155.970,155.970,155.970,0.000,54739 ATHEFI,D,9/7/2021,155.460,155.460,155.460,0.000,54739 ATHEFI,D,9/8/2021,155.070,155.070,155.070,0.000,54739 ATHEFI,D,9/9/2021,153.840,153.840,153.840,0.000,54739 ATHEFI,D,9/10/2021,153.410,153.410,153.410,0.000,54739 ATHEFI,D,9/13/2021,154.310,154.310,154.310,0.000,54739 ATHEFI,D,9/14/2021,154.390,154.390,154.390,0.000,54739 ATHEFI,D,9/16/2021,155.000,155.000,155.000,0.000,54739 ATHEFI,D,9/17/2021,155.010,155.010,155.010,0.000,54739 ATHEFI,D,9/20/2021,151.320,151.320,151.320,0.000,54739 ATHEFI,D,9/21/2021,151.400,151.400,151.400,0.000,54739 ATHEFI,D,9/22/2021,152.520,152.520,152.520,0.000,54739 ATHEFI,D,9/23/2021,150.030,150.030,150.030,0.000,54739 ATHEFI,D,9/24/2021,148.860,148.860,148.860,0.000,54739 ATHEFI,D,9/27/2021,148.390,148.390,148.390,0.000,54739 ATHEFI,D,9/28/2021,145.860,145.860,145.860,0.000,54739 ATHEFI,D,9/29/2021,146.320,146.320,146.320,0.000,54739 ATHEFI,D,9/30/2021,146.170,146.170,146.170,0.000,54739 ATHEFI,D,10/1/2021,147.130,147.130,147.130,0.000,54739 ATHEFI,D,10/4/2021,147.010,147.010,147.010,0.000,54739 ATHEFI,D,10/5/2021,149.420,149.420,149.420,0.000,54739 ATHEFI,D,10/6/2021,148.230,148.230,148.230,0.000,54739 ATHEFI,D,10/7/2021,150.220,150.220,150.220,0.000,54739 ATHEFI,D,10/8/2021,150.610,150.610,150.610,0.000,54739 ATHEFI,D,10/11/2021,149.570,149.570,149.570,0.000,54739 ATHEFI,D,10/12/2021,149.530,149.530,149.530,0.000,54739 ATHEFI,D,10/13/2021,149.220,149.220,149.220,0.000,54739 ATHEFI,D,10/14/2021,149.650,149.650,149.650,0.000,54739 ATHEFI,D,10/15/2021,150.920,150.920,150.920,0.000,54739 ATHEFI,D,10/18/2021,150.620,150.620,150.620,0.000,54739 ATHEFI,D,10/19/2021,151.930,151.930,151.930,0.000,54739 ATHEFI,D,10/20/2021,153.780,153.780,153.780,0.000,54739 ATHEFI,D,10/21/2021,153.680,153.680,153.680,0.000,54739 ATHEFI,D,10/22/2021,154.180,154.180,154.180,0.000,54739 ATHEFI,D,10/25/2021,153.560,153.560,153.560,0.000,54739 ATHEFI,D,10/26/2021,153.750,153.750,153.750,0.000,54739 ATHEFI,D,10/27/2021,154.350,154.350,154.350,0.000,54739 ATHEFI,D,10/29/2021,153.570,153.570,153.570,0.000,54739 ATHEFI,D,11/1/2021,154.270,154.270,154.270,0.000,54739 ATHEFI,D,11/2/2021,153.960,153.960,153.960,0.000,54739 ATHEFI,D,11/3/2021,154.600,154.600,154.600,0.000,54739 ATHEFI,D,11/4/2021,154.680,154.680,154.680,0.000,54739 ATHEFI,D,11/5/2021,154.620,154.620,154.620,0.000,54739 ATHEFI,D,11/8/2021,157.170,157.170,157.170,0.000,54739 ATHEFI,D,11/9/2021,156.900,156.900,156.900,0.000,54739 ATHEFI,D,11/10/2021,157.330,157.330,157.330,0.000,54739 ATHEFI,D,11/11/2021,156.690,156.690,156.690,0.000,54739 ATHEFI,D,11/12/2021,156.170,156.170,156.170,0.000,54739 ATHEFI,D,11/15/2021,156.220,156.220,156.220,0.000,54739 ATHEFI,D,11/16/2021,155.350,155.350,155.350,0.000,54739 ATHEFI,D,11/17/2021,157.020,157.020,157.020,0.000,54739 ATHEFI,D,11/18/2021,157.450,157.450,157.450,0.000,54739 ATHEFI,D,11/19/2021,156.410,156.410,156.410,0.000,54739 ATHEFI,D,11/22/2021,155.040,155.040,155.040,0.000,54739 ATHEFI,D,11/23/2021,152.390,152.390,152.390,0.000,54739 ATHEFI,D,11/24/2021,151.860,151.860,151.860,0.000,54739 ATHEFI,D,11/25/2021,153.830,153.830,153.830,0.000,54739 ATHEFI,D,11/26/2021,147.180,147.180,147.180,0.000,54739 ATHEFI,D,11/29/2021,149.650,149.650,149.650,0.000,54739 ATHEFI,D,11/30/2021,149.440,149.440,149.440,0.000,54739 ATHEFI,D,12/1/2021,150.910,150.910,150.910,0.000,54739 ATHEFI,D,12/2/2021,150.210,150.210,150.210,0.000,54739 ATHEFI,D,12/3/2021,150.610,150.610,150.610,0.000,54739 ATHEFI,D,12/6/2021,150.610,150.610,150.610,0.000,54739 ATHEFI,D,12/7/2021,152.470,152.470,152.470,0.000,54739 ATHEFI,D,12/8/2021,152.740,152.740,152.740,0.000,54739 ATHEFI,D,12/9/2021,153.130,153.130,153.130,0.000,54739 ATHEFI,D,12/10/2021,153.130,153.130,153.130,0.000,54739 ATHEFI,D,12/13/2021,151.410,151.410,151.410,0.000,54739 ATHEFI,D,12/14/2021,150.540,150.540,150.540,0.000,54739 ATHEFI,D,12/15/2021,150.600,150.600,150.600,0.000,54739 ATHEFI,D,12/16/2021,152.490,152.490,152.490,0.000,54739 ATHEFI,D,12/17/2021,151.270,151.270,151.270,0.000,54739 ATHEFI,D,12/20/2021,149.690,149.690,149.690,0.000,54739 ATHEFI,D,12/21/2021,150.400,150.400,150.400,0.000,54739 ATHEFI,D,12/22/2021,150.260,150.260,150.260,0.000,54739 ATHEFI,D,12/23/2021,152.140,152.140,152.140,0.000,54739 ATHEFI,D,12/24/2021,151.920,151.920,151.920,0.000,54739 ATHEFI,D,12/28/2021,152.240,152.240,152.240,0.000,54739 ATHEFI,D,12/29/2021,152.340,152.340,152.340,0.000,54739 ATHEFI,D,12/30/2021,152.350,152.350,152.350,0.000,54739 ATHEFI,D,12/31/2021,152.980,152.980,152.980,0.000,55000 ATHEFI,D,1/1/2022,152.980,152.980,152.980,0.000,55000 ATHEFI,D,1/3/2022,153.680,153.680,153.680,0.000,55000 ATHEFI,D,1/4/2022,154.550,154.550,154.550,0.000,55000 ATHEFI,D,1/5/2022,154.290,154.290,154.290,0.000,55000 ATHEFI,D,1/7/2022,154.700,154.700,154.700,0.000,55000 ATHEFI,D,1/10/2022,156.100,156.100,156.100,0.000,55000 ATHEFI,D,1/11/2022,158.230,158.230,158.230,0.000,55000 ATHEFI,D,1/12/2022,161.240,161.240,161.240,0.000,55000 ATHEFI,D,1/13/2022,161.740,161.740,161.740,0.000,55000 ATHEFI,D,1/14/2022,160.940,160.940,160.940,0.000,55000 ATHEFI,D,1/17/2022,162.140,162.140,162.140,0.000,55000 ATHEFI,D,1/18/2022,160.570,160.570,160.570,0.000,55000 ATHEFI,D,1/19/2022,161.450,161.450,161.450,0.000,55083 ATHEFI,D,1/20/2022,162.200,162.200,162.200,0.000,55083 ATHEFI,D,1/21/2022,159.690,159.690,159.690,0.000,55083 ATHEFI,D,1/25/2022,155.340,155.340,155.340,0.000,55083 ATHEFI,D,1/26/2022,158.400,158.400,158.400,0.000,55083 ATHEFI,D,1/27/2022,158.600,158.600,158.600,0.000,55083 ATHEFI,D,1/28/2022,157.160,157.160,157.160,0.000,55083 ATHEFI,D,1/31/2022,159.230,159.230,159.230,0.000,55083 ATHEFI,D,2/1/2022,161.230,161.230,161.230,0.000,55083 ATHEFI,D,2/2/2022,161.920,161.920,161.920,0.000,55083 ATHEFI,D,2/3/2022,160.630,160.630,160.630,0.000,55083 ATHEFI,D,2/4/2022,160.790,160.790,160.790,0.000,55083 ATHEFI,D,2/7/2022,159.370,159.370,159.370,0.000,55083 ATHEFI,D,2/8/2022,159.330,159.330,159.330,0.000,55083 ATHEFI,D,2/9/2022,161.700,161.700,161.700,0.000,55083 ATHEFI,D,2/10/2022,162.180,162.180,162.180,0.000,55083 ATHEFI,D,2/11/2022,163.410,163.410,163.410,0.000,55083 ATHEFI,D,2/14/2022,160.110,160.110,160.110,0.000,56613 ATHEFI,D,2/15/2022,162.050,162.050,162.050,0.000,56613 ATHEFI,D,2/16/2022,162.810,162.810,162.810,0.000,56613 ATHEFI,D,2/17/2022,161.300,161.300,161.300,0.000,56613 ATHEFI,D,2/18/2022,161.510,161.510,161.510,0.000,56613 ATHEFI,D,2/21/2022,160.950,160.950,160.950,0.000,56613 ATHEFI,D,2/22/2022,159.690,159.690,159.690,0.000,56613 ATHEFI,D,2/24/2022,149.730,149.730,149.730,0.000,56613 ATHEFI,D,2/25/2022,156.500,156.500,156.500,0.000,56613 ATHEFI,D,2/28/2022,151.120,151.120,151.120,0.000,56613 ATHEFI,D,3/1/2022,147.170,147.170,147.170,0.000,56613 ATHEFI,D,3/2/2022,145.080,145.080,145.080,0.000,56613 ATHEFI,D,3/3/2022,146.610,146.610,146.610,0.000,56613 ATHEFI,D,3/4/2022,140.730,140.730,140.730,0.000,56613 ATHEFI,D,3/8/2022,135.200,135.200,135.200,0.000,56613 ATHEFI,D,3/9/2022,140.950,140.950,140.950,0.000,56613 ATHEFI,D,3/10/2022,137.920,137.920,137.920,0.000,56613 ATHEFI,D,3/11/2022,141.740,141.740,141.740,0.000,56613 ATHEFI,D,3/14/2022,142.490,142.490,142.490,0.000,56613 ATHEFI,D,3/15/2022,141.980,141.980,141.980,0.000,56613 ATHEFI,D,3/16/2022,148.750,148.750,148.750,0.000,56613 ATHEFI,D,3/17/2022,146.780,146.780,146.780,0.000,56613 ATHEFI,D,3/18/2022,147.060,147.060,147.060,0.000,56613 ATHEFI,D,3/21/2022,146.590,146.590,146.590,0.000,56613 ATHEFI,D,3/22/2022,147.660,147.660,147.660,0.000,57364 ATHEFI,D,3/23/2022,145.850,145.850,145.850,0.000,57364 ATHEFI,D,3/24/2022,144.060,144.060,144.060,0.000,57364 ATHEFI,D,3/28/2022,146.540,146.540,146.540,0.000,57364 ATHEFI,D,3/29/2022,150.260,150.260,150.260,0.000,57364 ATHEFI,D,3/30/2022,149.650,149.650,149.650,0.000,57364 ATHEFI,D,3/31/2022,149.380,149.380,149.380,0.000,58500 ATHEFI,D,4/1/2022,150.990,150.990,150.990,0.000,58500 ATHEFI,D,4/4/2022,151.290,151.290,151.290,0.000,58500 ATHEFI,D,4/5/2022,150.970,150.970,150.970,0.000,58500 ATHEFI,D,4/6/2022,149.760,149.760,149.760,0.000,58500 ATHEFI,D,4/7/2022,150.770,150.770,150.770,0.000,58500 ATHEFI,D,4/8/2022,153.070,153.070,153.070,0.000,58500 ATHEFI,D,4/11/2022,154.290,154.290,154.290,0.000,58500 ATHEFI,D,4/12/2022,154.720,154.720,154.720,0.000,58500 ATHEFI,D,4/13/2022,155.280,155.280,155.280,0.000,58500 ATHEFI,D,4/14/2022,154.420,154.420,154.420,0.000,58500 ATHEFI,D,4/15/2022,154.420,154.420,154.420,0.000,58500 ATHEFI,D,4/18/2022,154.400,154.400,154.400,0.000,58500 ATHEFI,D,4/20/2022,157.150,157.150,157.150,0.000,58500 ATHEFI,D,4/21/2022,158.410,158.410,158.410,0.000,59406 ATHEFI,D,4/27/2022,153.330,153.330,153.330,0.000,59406 ATHEFI,D,4/28/2022,153.960,153.960,153.960,0.000,59406 ATHEFI,D,4/29/2022,153.640,153.640,153.640,0.000,59406 ATHEFI,D,5/3/2022,150.220,150.220,150.220,0.000,59406 ATHEFI,D,5/4/2022,149.960,149.960,149.960,0.000,59406 ATHEFI,D,5/5/2022,147.760,147.760,147.760,0.000,59406 ATHEFI,D,5/6/2022,144.440,144.440,144.440,0.000,59406 ATHEFI,D,5/9/2022,143.540,143.540,143.540,0.000,59406 ATHEFI,D,5/10/2022,143.260,143.260,143.260,0.000,59406 ATHEFI,D,5/11/2022,144.020,144.020,144.020,0.000,59298 ATHEFI,D,5/12/2022,140.320,140.320,140.320,0.000,59298 ATHEFI,D,5/13/2022,142.670,142.670,142.670,0.000,59298 ATHEFI,D,5/16/2022,141.900,141.900,141.900,0.000,59298 ATHEFI,D,5/17/2022,143.770,143.770,143.770,0.000,59298 ATHEFI,D,5/18/2022,144.170,144.170,144.170,0.000,59298 ATHEFI,D,5/19/2022,141.430,141.430,141.430,0.000,59298 ATHEFI,D,5/20/2022,143.380,143.380,143.380,0.000,59298 ATHEFI,D,5/23/2022,143.140,143.140,143.140,0.000,59298 ATHEFI,D,5/24/2022,143.950,143.950,143.950,0.000,59298 ATHEFI,D,5/25/2022,145.160,145.160,145.160,0.000,59298 ATHEFI,D,5/26/2022,147.350,147.350,147.350,0.000,59298 ATHEFI,D,5/27/2022,148.340,148.340,148.340,0.000,59298 ATHEFI,D,5/30/2022,148.530,148.530,148.530,0.000,59298 ATHEFI,D,5/31/2022,148.440,148.440,148.440,0.000,59298 ATHEFI,D,6/1/2022,149.480,149.480,149.480,0.000,59298 ATHEFI,D,6/2/2022,148.330,148.330,148.330,0.000,59298 ATHEFI,D,6/3/2022,149.440,149.440,149.440,0.000,59298 ATHEFI,D,6/6/2022,149.290,149.290,149.290,0.000,59298 ATHEFI,D,6/7/2022,148.040,148.040,148.040,0.000,59298 ATHEFI,D,6/8/2022,148.220,148.220,148.220,0.000,59298 ATHEFI,D,6/9/2022,147.130,147.130,147.130,0.000,59298 ATHEFI,D,6/10/2022,143.710,143.710,143.710,0.000,59298 ATHEFI,D,6/14/2022,137.440,137.440,137.440,0.000,59298 ATHEFI,D,6/15/2022,139.000,139.000,139.000,0.000,59298 ATHEFI,D,6/16/2022,135.270,135.270,135.270,0.000,59298 ATHEFI,D,6/17/2022,136.690,136.690,136.690,0.000,59298 ATHEFI,D,6/20/2022,137.270,137.270,137.270,0.000,59298 ATHEFI,D,6/21/2022,139.270,139.270,139.270,0.000,59298 ATHEFI,D,6/22/2022,138.590,138.590,138.590,0.000,59298 ATHEFI,D,6/23/2022,138.390,138.390,138.390,0.000,59298 ATHEFI,D,6/24/2022,138.260,138.260,138.260,0.000,59298 ATHEFI,D,6/27/2022,136.570,136.570,136.570,0.000,59298 ATHEFI,D,6/28/2022,136.600,136.600,136.600,0.000,59298 ATHEFI,D,6/29/2022,136.160,136.160,136.160,0.000,59298 ATHEFI,D,6/30/2022,134.420,134.420,134.420,0.000,59298 ATHEFI,D,7/4/2022,133.990,133.990,133.990,0.000,59298 ATHEFI,D,7/5/2022,129.870,129.870,129.870,0.000,59298 ATHEFI,D,7/6/2022,130.180,130.180,130.180,0.000,59298 ATHEFI,D,7/7/2022,133.640,133.640,133.640,0.000,59298 ATHEFI,D,7/8/2022,134.150,134.150,134.150,0.000,59298 ATHEFI,D,7/12/2022,132.890,132.890,132.890,0.000,59298 ATHEFI,D,7/13/2022,134.400,134.400,134.400,0.000,59298 ATHEFI,D,7/14/2022,133.190,133.190,133.190,0.000,59298 ATHEFI,D,7/15/2022,132.990,132.990,132.990,0.000,59298 ATHEFI,D,7/18/2022,134.490,134.490,134.490,0.000,59298 ATHEFI,D,7/19/2022,134.680,134.680,134.680,0.000,59298 ATHEFI,D,7/20/2022,136.120,136.120,136.120,0.000,59298 ATHEFI,D,7/21/2022,137.750,137.750,137.750,0.000,59298 ATHEFI,D,7/22/2022,138.540,138.540,138.540,0.000,59298 ATHEFI,D,7/25/2022,138.910,138.910,138.910,0.000,59298 ATHEFI,D,7/26/2022,139.130,139.130,139.130,0.000,59298 ATHEFI,D,7/27/2022,139.230,139.230,139.230,0.000,59298 ATHEFI,D,7/28/2022,139.870,139.870,139.870,0.000,59298 ATHEFI,D,7/29/2022,141.200,141.200,141.200,0.000,59298 ATHEFI,D,8/1/2022,143.050,143.050,143.050,0.000,59298 ATHEFI,D,8/2/2022,143.840,143.840,143.840,0.000,59298 ATHEFI,D,8/3/2022,144.120,144.120,144.120,0.000,59298 ATHEFI,D,8/4/2022,143.500,143.500,143.500,0.000,59298 ATHEFI,D,8/5/2022,141.380,141.380,141.380,0.000,59298 ATHEFI,D,8/8/2022,143.120,143.120,143.120,0.000,59298 ATHEFI,D,8/9/2022,143.130,143.130,143.130,0.000,59298 ATHEFI,D,8/10/2022,145.140,145.140,145.140,0.000,59298 ATHEFI,D,8/11/2022,145.620,145.620,145.620,0.000,59298 ATHEFI,D,8/12/2022,145.270,145.270,145.270,0.000,59298 ATHEFI,D,8/16/2022,147.080,147.080,147.080,0.000,59298 ATHEFI,D,8/17/2022,147.170,147.170,147.170,0.000,59298 ATHEFI,D,8/18/2022,147.620,147.620,147.620,0.000,59298 ATHEFI,D,8/19/2022,147.540,147.540,147.540,0.000,59298 ATHEFI,D,8/22/2022,148.540,148.540,148.540,0.000,59298 ATHEFI,D,8/23/2022,147.860,147.860,147.860,0.000,59298 ATHEFI,D,8/24/2022,147.950,147.950,147.950,0.000,59298 ATHEFI,D,8/25/2022,149.120,149.120,149.120,0.000,59298 ATHEFI,D,8/26/2022,149.300,149.300,149.300,0.000,59298 ATHEFI,D,8/29/2022,145.610,145.610,145.610,0.000,59298 ATHEFI,D,8/30/2022,143.650,143.650,143.650,0.000,59298 ATHEFI,D,8/31/2022,143.610,143.610,143.610,0.000,59298 ATHEFI,D,9/1/2022,141.970,141.970,141.970,0.000,59298 ATHEFI,D,9/2/2022,142.030,142.030,142.030,0.000,59298 ATHEFI,D,9/5/2022,139.670,139.670,139.670,0.000,59298 ATHEFI,D,9/6/2022,140.190,140.190,140.190,0.000,59298 ATHEFI,D,9/7/2022,138.850,138.850,138.850,0.000,59298 ATHEFI,D,9/8/2022,139.210,139.210,139.210,0.000,59298 ATHEFI,D,9/9/2022,141.100,141.100,141.100,0.000,59298 ATHEFI,D,9/13/2022,141.430,141.430,141.430,0.000,59298 ATHEFI,D,9/14/2022,141.050,141.050,141.050,0.000,59298 ATHEFI,D,9/15/2022,141.700,141.700,141.700,0.000,59298 ATHEFI,D,9/16/2022,140.790,140.790,140.790,0.000,59298 ATHEFI,D,9/19/2022,140.770,140.770,140.770,0.000,59298 ATHEFI,D,9/20/2022,141.110,141.110,141.110,0.000,59298 ATHEFI,D,9/21/2022,139.520,139.520,139.520,0.000,59298 ATHEFI,D,9/22/2022,138.470,138.470,138.470,0.000,59298 ATHEFI,D,9/23/2022,135.660,135.660,135.660,0.000,59298 ATHEFI,D,9/26/2022,134.140,134.140,134.140,0.000,59298 ATHEFI,D,9/27/2022,134.940,134.940,134.940,0.000,59298 ATHEFI,D,9/28/2022,134.670,134.670,134.670,0.000,59298 ATHEFI,D,9/29/2022,133.940,133.940,133.940,0.000,59298 ATHEFI,D,9/30/2022,134.200,134.200,134.200,0.000,59298 ATHEFI,D,10/3/2022,135.430,135.430,135.430,0.000,59298 ATHEFI,D,10/4/2022,137.840,137.840,137.840,0.000,59298 ATHEFI,D,10/5/2022,137.340,137.340,137.340,0.000,59298 ATHEFI,D,10/6/2022,136.900,136.900,136.900,0.000,59298 ATHEFI,D,10/7/2022,136.830,136.830,136.830,0.000,59298 ATHEFI,D,10/10/2022,136.480,136.480,136.480,0.000,59298 ATHEFI,D,10/11/2022,135.580,135.580,135.580,0.000,59298 ATHEFI,D,10/12/2022,136.780,136.780,136.780,0.000,59298 ATHEFI,D,10/13/2022,136.580,136.580,136.580,0.000,59298 ATHEFI,D,10/14/2022,138.550,138.550,138.550,0.000,59298 ATHEFI,D,10/17/2022,139.730,139.730,139.730,0.000,59298 ATHEFI,D,10/18/2022,141.080,141.080,141.080,0.000,59298 ATHEFI,D,10/19/2022,140.780,140.780,140.780,0.000,59298 ATHEFI,D,10/20/2022,141.930,141.930,141.930,0.000,59298 ATHEFI,D,10/21/2022,142.310,142.310,142.310,0.000,59298 ATHEFI,D,10/24/2022,143.830,143.830,143.830,0.000,59298 ATHEFI,D,10/25/2022,143.600,143.600,143.600,0.000,59298 ATHEFI,D,10/26/2022,143.780,143.780,143.780,0.000,59298 ATHEFI,D,10/27/2022,143.760,143.760,143.760,0.000,59298 ATHEFI,D,11/1/2022,144.560,144.560,144.560,0.000,59298 ATHEFI,D,11/2/2022,145.270,145.270,145.270,0.000,59298 ATHEFI,D,11/3/2022,144.040,144.040,144.040,0.000,59298 ATHEFI,D,11/4/2022,146.500,146.500,146.500,0.000,59298 ATHEFI,D,11/7/2022,147.170,147.170,147.170,0.000,59298 ATHEFI,D,11/8/2022,146.910,146.910,146.910,0.000,59298 ATHEFI,D,11/9/2022,147.500,147.500,147.500,0.000,59298 ATHEFI,D,11/10/2022,148.760,148.760,148.760,0.000,59298 ATHEFI,D,11/11/2022,149.170,149.170,149.170,0.000,59298 ATHEFI,D,11/14/2022,149.920,149.920,149.920,0.000,59298 ATHEFI,D,11/15/2022,150.330,150.330,150.330,0.000,59298 ATHEFI,D,11/16/2022,147.720,147.720,147.720,0.000,59298 ATHEFI,D,11/17/2022,147.390,147.390,147.390,0.000,59298 ATHEFI,D,11/18/2022,148.220,148.220,148.220,0.000,59298 ATHEFI,D,11/21/2022,148.780,148.780,148.780,0.000,59298 ATHEFI,D,11/22/2022,149.780,149.780,149.780,0.000,59298 ATHEFI,D,11/23/2022,150.820,150.820,150.820,0.000,59298 ATHEFI,D,11/24/2022,152.630,152.630,152.630,0.000,59298 ATHEFI,D,11/25/2022,152.500,152.500,152.500,0.000,59298 ATHEFI,D,11/28/2022,151.170,151.170,151.170,0.000,59298 ATHEFI,D,11/29/2022,151.810,151.810,151.810,0.000,59298 ATHEFI,D,11/30/2022,152.000,152.000,152.000,0.000,59298 ATHEFI,D,12/1/2022,153.330,153.330,153.330,0.000,59298 ATHEFI,D,12/2/2022,150.490,150.490,150.490,0.000,60185 ATHEFI,D,12/5/2022,150.530,150.530,150.530,0.000,60185 ATHEFI,D,12/6/2022,150.630,150.630,150.630,0.000,60185 ATHEFI,D,12/7/2022,151.520,151.520,151.520,0.000,60185 ATHEFI,D,12/8/2022,152.240,152.240,152.240,0.000,60185 ATHEFI,D,12/9/2022,152.750,152.750,152.750,0.000,60185 ATHEFI,D,12/12/2022,152.200,152.200,152.200,0.000,60185 ATHEFI,D,12/13/2022,153.460,153.460,153.460,0.000,60185 ATHEFI,D,12/14/2022,154.220,154.220,154.220,0.000,60185 ATHEFI,D,12/15/2022,153.240,153.240,153.240,0.000,60185 ATHEFI,D,12/16/2022,152.650,152.650,152.650,0.000,60185 ATHEFI,D,12/19/2022,153.100,153.100,153.100,0.000,60185 ATHEFI,D,12/20/2022,153.100,153.100,153.100,0.000,60185 ATHEFI,D,12/21/2022,154.520,154.520,154.520,0.000,60185 ATHEFI,D,12/22/2022,154.680,154.680,154.680,0.000,60185 ATHEFI,D,12/23/2022,155.050,155.050,155.050,0.000,60185 ATHEFI,D,12/27/2022,155.580,155.580,155.580,0.000,60185 ATHEFI,D,12/28/2022,155.670,155.670,155.670,0.000,60185 ATHEFI,D,12/29/2022,155.360,155.360,155.360,0.000,60185 ATHEFI,D,12/30/2022,156.550,156.550,156.550,0.000,60185 ATHEFI,D,1/2/2023,157.840,157.840,157.840,0.000,60185 ATHEFI,D,1/3/2023,158.870,158.870,158.870,0.000,60185 ATHEFI,D,1/4/2023,159.580,159.580,159.580,0.000,60185 ATHEFI,D,1/5/2023,160.500,160.500,160.500,0.000,60185 ATHEFI,D,1/9/2023,162.520,162.520,162.520,0.000,60185 ATHEFI,D,1/10/2023,162.180,162.180,162.180,0.000,60185 ATHEFI,D,1/11/2023,162.790,162.790,162.790,0.000,60185 ATHEFI,D,1/12/2023,163.160,163.160,163.160,0.000,60185 ATHEFI,D,1/13/2023,164.010,164.010,164.010,0.000,60185 ATHEFI,D,1/16/2023,166.070,166.070,166.070,0.000,60185 ATHEFI,D,1/17/2023,167.050,167.050,167.050,0.000,60185 ATHEFI,D,1/18/2023,167.390,167.390,167.390,0.000,60221 ATHEFI,D,1/19/2023,164.380,164.380,164.380,0.000,60338 ATHEFI,D,1/20/2023,166.250,166.250,166.250,0.000,60338 ATHEFI,D,1/23/2023,169.390,169.390,169.390,0.000,60338 ATHEFI,D,1/24/2023,168.680,168.680,168.680,0.000,60338 ATHEFI,D,1/25/2023,168.400,168.400,168.400,0.000,60338 ATHEFI,D,1/26/2023,170.240,170.240,170.240,0.000,60338 ATHEFI,D,1/27/2023,171.840,171.840,171.840,0.000,60338 ATHEFI,D,1/30/2023,173.350,173.350,173.350,0.000,60354 ATHEFI,D,1/31/2023,173.020,173.020,173.020,0.000,60354 ATHEFI,D,2/1/2023,173.680,173.680,173.680,0.000,60354 ATHEFI,D,2/2/2023,174.130,174.130,174.130,0.000,60354 ATHEFI,D,2/3/2023,174.840,174.840,174.840,0.000,60354 ATHEFI,D,2/6/2023,174.570,174.570,174.570,0.000,60417 ATHEFI,D,2/7/2023,175.740,175.740,175.740,0.000,60417 ATHEFI,D,2/8/2023,178.970,178.970,178.970,0.000,60417 ATHEFI,D,2/9/2023,180.850,180.850,180.850,0.000,60417 ATHEFI,D,2/10/2023,180.480,180.480,180.480,0.000,60417 ATHEFI,D,2/13/2023,183.910,183.910,183.910,0.000,60417 ATHEFI,D,2/14/2023,183.210,183.210,183.210,0.000,60417 ATHEFI,D,2/15/2023,182.760,182.760,182.760,0.000,60523 ATHEFI,D,2/16/2023,182.720,182.720,182.720,0.000,60523 ATHEFI,D,2/17/2023,184.860,184.860,184.860,0.000,60523 ATHEFI,D,2/20/2023,188.000,188.000,188.000,0.000,60523 ATHEFI,D,2/21/2023,187.820,187.820,187.820,0.000,60880 ATHEFI,D,2/22/2023,184.150,184.150,184.150,0.000,60880 ATHEFI,D,2/23/2023,186.920,186.920,186.920,0.000,60880 ATHEFI,D,2/24/2023,185.970,185.970,185.970,0.000,60880 ATHEFI,D,2/28/2023,188.500,188.500,188.500,0.000,60880 ATHEFI,D,3/1/2023,188.940,188.940,188.940,0.000,62339 ATHEFI,D,3/2/2023,186.570,186.570,186.570,0.000,62339 ATHEFI,D,3/3/2023,185.910,185.910,185.910,0.000,65185 ATHEFI,D,3/6/2023,180.630,180.630,180.630,0.000,65185 ATHEFI,D,3/7/2023,180.020,180.020,180.020,0.000,66015 ATHEFI,D,3/8/2023,179.420,179.420,179.420,0.000,66015 ATHEFI,D,3/9/2023,180.280,180.280,180.280,0.000,66015 ATHEFI,D,3/10/2023,176.640,176.640,176.640,0.000,66015 ATHEFI,D,3/13/2023,175.470,175.470,175.470,0.000,66015 ATHEFI,D,3/14/2023,179.480,179.480,179.480,0.000,66015 ATHEFI,D,3/15/2023,171.990,171.990,171.990,0.000,66015 ATHEFI,D,3/16/2023,172.710,172.710,172.710,0.000,66015 ATHEFI,D,3/17/2023,170.750,170.750,170.750,0.000,66015 ATHEFI,D,3/20/2023,172.020,172.020,172.020,0.000,66015 ATHEFI,D,3/21/2023,176.460,176.460,176.460,0.000,66015 ATHEFI,D,3/22/2023,175.710,175.710,175.710,0.000,66015 ATHEFI,D,3/23/2023,177.140,177.140,177.140,0.000,66015 ATHEFI,D,3/24/2023,172.380,172.380,172.380,0.000,66015 ATHEFI,D,3/27/2023,174.600,174.600,174.600,0.000,66015 ATHEFI,D,3/28/2023,172.810,172.810,172.810,0.000,66015 ATHEFI,D,3/29/2023,173.940,173.940,173.940,0.000,66015 ATHEFI,D,3/30/2023,176.040,176.040,176.040,0.000,66015 ATHEFI,D,3/31/2023,177.220,177.220,177.220,0.000,66015 ATHEFI,D,4/3/2023,178.890,178.890,178.890,0.000,66015 ATHEFI,D,4/4/2023,179.390,179.390,179.390,0.000,66015 ATHEFI,D,4/5/2023,179.440,179.440,179.440,0.000,66684 ATHEFI,D,4/6/2023,180.080,180.080,180.080,0.000,66684 ATHEFI,D,4/7/2023,180.080,180.080,180.080,0.000,66684 ATHEFI,D,4/10/2023,180.050,180.050,180.050,0.000,66684 ATHEFI,D,4/11/2023,183.170,183.170,183.170,0.000,66684 ATHEFI,D,4/12/2023,184.170,184.170,184.170,0.000,66684 ATHEFI,D,4/13/2023,185.470,185.470,185.470,0.000,66684 ATHEFI,D,4/18/2023,187.740,187.740,187.740,0.000,66684 ATHEFI,D,4/19/2023,186.290,186.290,186.290,0.000,66791 ATHEFI,D,4/20/2023,185.480,185.480,185.480,0.000,66791 ATHEFI,D,4/21/2023,186.470,186.470,186.470,0.000,66791 ATHEFI,D,4/24/2023,185.670,185.670,185.670,0.000,66791 ATHEFI,D,4/25/2023,183.200,183.200,183.200,0.000,66791 ATHEFI,D,4/26/2023,184.100,184.100,184.100,0.000,66791 ATHEFI,D,4/27/2023,184.260,184.260,184.260,0.000,66791 ATHEFI,D,4/28/2023,182.710,182.710,182.710,0.000,66791 ATHEFI,D,5/2/2023,183.050,183.050,183.050,0.000,66791 ATHEFI,D,5/3/2023,183.770,183.770,183.770,0.000,66791 ATHEFI,D,5/4/2023,183.640,183.640,183.640,0.000,66791 ATHEFI,D,5/5/2023,185.360,185.360,185.360,0.000,66791 ATHEFI,D,5/8/2023,187.380,187.380,187.380,0.000,67060 ATHEFI,D,5/9/2023,187.450,187.450,187.450,0.000,67060 ATHEFI,D,5/10/2023,188.390,188.390,188.390,0.000,67060 ATHEFI,D,5/11/2023,186.780,186.780,186.780,0.000,67060 ATHEFI,D,5/12/2023,187.020,187.020,187.020,0.000,67060 ATHEFI,D,5/15/2023,186.880,186.880,186.880,0.000,67060 ATHEFI,D,5/16/2023,189.400,189.400,189.400,0.000,67060 ATHEFI,D,5/17/2023,188.690,188.690,188.690,0.000,67060 ATHEFI,D,5/18/2023,187.760,187.760,187.760,0.000,67060 ATHEFI,D,5/19/2023,188.350,188.350,188.350,0.000,67060 ATHEFI,D,5/22/2023,199.610,199.610,199.610,0.000,67060 ATHEFI,D,5/23/2023,200.690,200.690,200.690,0.000,67060 ATHEFI,D,5/24/2023,199.180,199.180,199.180,0.000,67060 ATHEFI,D,5/25/2023,202.330,202.330,202.330,0.000,67060 ATHEFI,D,5/26/2023,204.910,204.910,204.910,0.000,67060 ATHEFI,D,5/29/2023,207.790,207.790,207.790,0.000,68412 ATHEFI,D,5/30/2023,205.890,205.890,205.890,0.000,68412 ATHEFI,D,5/31/2023,205.400,205.400,205.400,0.000,68412 ATHEFI,D,6/1/2023,203.970,203.970,203.970,0.000,68412 ATHEFI,D,6/2/2023,205.320,205.320,205.320,0.000,68412 ATHEFI,D,6/6/2023,210.040,210.040,210.040,0.000,68412 ATHEFI,D,6/7/2023,210.840,210.840,210.840,0.000,68412 ATHEFI,D,6/8/2023,212.510,212.510,212.510,0.000,69726 ATHEFI,D,6/9/2023,213.590,213.590,213.590,0.000,69726 ATHEFI,D,6/12/2023,213.400,213.400,213.400,0.000,69726 ATHEFI,D,6/13/2023,213.600,213.600,213.600,0.000,69726 ATHEFI,D,6/14/2023,214.950,214.950,214.950,0.000,69726 ATHEFI,D,6/15/2023,214.350,214.350,214.350,0.000,69726 ATHEFI,D,6/16/2023,215.660,215.660,215.660,0.000,69726 ATHEFI,D,6/19/2023,214.060,214.060,214.060,0.000,69726 ATHEFI,D,6/20/2023,213.090,213.090,213.090,0.000,68978 ATHEFI,D,6/21/2023,214.200,214.200,214.200,0.000,68978 ATHEFI,D,6/22/2023,212.420,212.420,212.420,0.000,68978 ATHEFI,D,6/23/2023,213.220,213.220,213.220,0.000,68978 ATHEFI,D,6/26/2023,208.160,208.160,208.160,0.000,68978 ATHEFI,D,6/27/2023,209.230,209.230,209.230,0.000,68978 ATHEFI,D,6/28/2023,211.630,211.630,211.630,0.000,68978 ATHEFI,D,6/29/2023,216.980,216.980,216.980,0.000,68978 ATHEFI,D,6/30/2023,217.100,217.100,217.100,0.000,68978 ATHEFI,D,7/3/2023,219.800,219.800,219.800,0.000,70360 ATHEFI,D,7/4/2023,221.250,221.250,221.250,0.000,70360 ATHEFI,D,7/5/2023,220.770,220.770,220.770,0.000,70812 ATHEFI,D,7/6/2023,218.690,218.690,218.690,0.000,70812 ATHEFI,D,7/7/2023,217.750,217.750,217.750,0.000,70812 ATHEFI,D,7/10/2023,220.020,220.020,220.020,0.000,70812 ATHEFI,D,7/11/2023,224.550,224.550,224.550,0.000,70812 ATHEFI,D,7/12/2023,225.610,225.610,225.610,0.000,70812 ATHEFI,D,7/13/2023,224.740,224.740,224.740,0.000,70812 ATHEFI,D,7/14/2023,225.490,225.490,225.490,0.000,70812 ATHEFI,D,7/17/2023,222.530,222.530,222.530,0.000,70812 ATHEFI,D,7/18/2023,224.650,224.650,224.650,0.000,70812 ATHEFI,D,7/19/2023,227.230,227.230,227.230,0.000,70812 ATHEFI,D,7/20/2023,228.330,228.330,228.330,0.000,70812 ATHEFI,D,7/21/2023,228.110,228.110,228.110,0.000,70812 ATHEFI,D,7/24/2023,228.060,228.060,228.060,0.000,70812 ATHEFI,D,7/25/2023,229.810,229.810,229.810,0.000,70812 ATHEFI,D,7/26/2023,229.440,229.440,229.440,0.000,70812 ATHEFI,D,7/27/2023,229.350,229.350,229.350,0.000,70812 ATHEFI,D,7/28/2023,227.640,227.640,227.640,0.000,70812 ATHEFI,D,7/31/2023,227.660,227.660,227.660,0.000,71603 ATHEFI,D,8/1/2023,225.890,225.890,225.890,0.000,71990 ATHEFI,D,8/2/2023,222.850,222.850,222.850,0.000,71990 ATHEFI,D,8/3/2023,224.490,224.490,224.490,0.000,71990 ATHEFI,D,8/4/2023,225.250,225.250,225.250,0.000,72880 ATHEFI,D,8/7/2023,225.380,225.380,225.380,0.000,72880 ATHEFI,D,8/8/2023,223.870,223.870,223.870,0.000,72880 ATHEFI,D,8/9/2023,224.540,224.540,224.540,0.000,72880 ATHEFI,D,8/10/2023,224.300,224.300,224.300,0.000,72880 ATHEFI,D,8/11/2023,219.630,219.630,219.630,0.000,72880 ATHEFI,D,8/14/2023,217.660,217.660,217.660,0.000,72880 ATHEFI,D,8/16/2023,218.060,218.060,218.060,0.000,72880 ATHEFI,D,8/17/2023,218.830,218.830,218.830,0.000,72880 ATHEFI,D,8/18/2023,215.080,215.080,215.080,0.000,72880 ATHEFI,D,8/21/2023,218.940,218.940,218.940,0.000,72880 ATHEFI,D,8/22/2023,221.920,221.920,221.920,0.000,72880 ATHEFI,D,8/23/2023,220.760,220.760,220.760,0.000,72880 ATHEFI,D,8/24/2023,221.390,221.390,221.390,0.000,72880 ATHEFI,D,8/25/2023,221.850,221.850,221.850,0.000,72880 ATHEFI,D,8/28/2023,224.470,224.470,224.470,0.000,72880 ATHEFI,D,8/29/2023,224.620,224.620,224.620,0.000,72880 ATHEFI,D,8/30/2023,224.180,224.180,224.180,0.000,72880 ATHEFI,D,8/31/2023,223.440,223.440,223.440,0.000,72880 ATHEFI,D,9/1/2023,221.260,221.260,221.260,0.000,72880 ATHEFI,D,9/4/2023,215.540,215.540,215.540,0.000,72880 ATHEFI,D,9/5/2023,217.140,217.140,217.140,0.000,72880 ATHEFI,D,9/6/2023,216.970,216.970,216.970,0.000,73111 ATHEFI,D,9/7/2023,212.120,212.120,212.120,0.000,73111 ATHEFI,D,9/8/2023,214.240,214.240,214.240,0.000,73111 ATHEFI,D,9/11/2023,212.350,212.350,212.350,0.000,73111 ATHEFI,D,9/12/2023,211.470,211.470,211.470,0.000,73111 ATHEFI,D,9/13/2023,207.740,207.740,207.740,0.000,73111 ATHEFI,D,9/14/2023,209.230,209.230,209.230,0.000,73111 ATHEFI,D,9/15/2023,212.950,212.950,212.950,0.000,73111 ATHEFI,D,9/18/2023,212.420,212.420,212.420,0.000,73111 ATHEFI,D,9/19/2023,207.700,207.700,207.700,0.000,73111 ATHEFI,D,9/20/2023,202.710,202.710,202.710,0.000,73111 ATHEFI,D,9/21/2023,203.070,203.070,203.070,0.000,73111 ATHEFI,D,9/22/2023,206.500,206.500,206.500,0.000,73111 ATHEFI,D,9/25/2023,206.260,206.260,206.260,0.000,73886 ATHEFI,D,9/26/2023,206.280,206.280,206.280,0.000,73886 ATHEFI,D,9/27/2023,203.350,203.350,203.350,0.000,73886 ATHEFI,D,9/28/2023,201.420,201.420,201.420,0.000,73886 ATHEFI,D,9/29/2023,204.210,204.210,204.210,0.000,73886 ATHEFI,D,10/2/2023,201.580,201.580,201.580,0.000,73886 ATHEFI,D,10/3/2023,197.590,197.590,197.590,0.000,73886 ATHEFI,D,10/4/2023,197.860,197.860,197.860,0.000,74174 ATHEFI,D,10/5/2023,195.490,195.490,195.490,0.000,71969 ATHEFI,D,10/6/2023,193.170,193.170,193.170,0.000,71969 ATHEFI,D,10/9/2023,188.770,188.770,188.770,0.000,71969 ATHEFI,D,10/10/2023,196.340,196.340,196.340,0.000,71969 ATHEFI,D,10/11/2023,199.440,199.440,199.440,0.000,71969 ATHEFI,D,10/12/2023,200.790,200.790,200.790,0.000,72721 ATHEFI,D,10/13/2023,198.710,198.710,198.710,0.000,72721 ATHEFI,D,10/16/2023,199.920,199.920,199.920,0.000,72721 ATHEFI,D,10/17/2023,199.260,199.260,199.260,0.000,72301 ATHEFI,D,10/18/2023,200.460,200.460,200.460,0.000,72301 ATHEFI,D,10/19/2023,200.340,200.340,200.340,0.000,72301 ATHEFI,D,10/20/2023,199.540,199.540,199.540,0.000,72301 ATHEFI,D,10/23/2023,199.680,199.680,199.680,0.000,72301 ATHEFI,D,10/24/2023,203.520,203.520,203.520,0.000,72301 ATHEFI,D,10/25/2023,201.650,201.650,201.650,0.000,72301 ATHEFI,D,10/26/2023,200.170,200.170,200.170,0.000,72301 ATHEFI,D,10/27/2023,200.460,200.460,200.460,0.000,72301 ATHEFI,D,10/30/2023,202.070,202.070,202.070,0.000,72301 ATHEFI,D,10/31/2023,203.180,203.180,203.180,0.000,72301 ATHEFI,D,11/1/2023,203.310,203.310,203.310,0.000,72301 ATHEFI,D,11/2/2023,207.760,207.760,207.760,0.000,72301 ATHEFI,D,11/3/2023,207.570,207.570,207.570,0.000,72301 ATHEFI,D,11/6/2023,210.680,210.680,210.680,0.000,72301 ATHEFI,D,11/7/2023,209.500,209.500,209.500,0.000,73725 ATHEFI,D,11/8/2023,209.580,209.580,209.580,0.000,73725 ATHEFI,D,11/10/2023,206.090,206.090,206.090,0.000,73725 ATHEFI,D,11/13/2023,206.500,206.500,206.500,0.000,73725 ATHEFI,D,11/14/2023,211.510,211.510,211.510,0.000,73725 ATHEFI,D,11/15/2023,212.210,212.210,212.210,0.000,73725 ATHEFI,D,11/16/2023,212.630,212.630,212.630,0.000,73725 ATHEFI,D,11/17/2023,214.450,214.450,214.450,0.000,73725 ATHEFI,D,11/20/2023,214.300,214.300,214.300,0.000,73725 ATHEFI,D,11/21/2023,212.430,212.430,212.430,0.000,73725 ATHEFI,D,11/22/2023,215.040,215.040,215.040,0.000,73725 ATHEFI,D,11/23/2023,215.910,215.910,215.910,0.000,73725 ATHEFI,D,11/24/2023,215.330,215.330,215.330,0.000,73725 ATHEFI,D,11/27/2023,216.530,216.530,216.530,0.000,73725 ATHEFI,D,11/28/2023,216.270,216.270,216.270,0.000,73725 ATHEFI,D,11/29/2023,217.160,217.160,217.160,0.000,73725 ATHEFI,D,11/30/2023,217.760,217.760,217.760,0.000,73725 ATHEFI,D,12/1/2023,218.620,218.620,218.620,0.000,73725 ATHEFI,D,12/4/2023,217.810,217.810,217.810,0.000,73725 ATHEFI,D,12/5/2023,216.830,216.830,216.830,0.000,73725 ATHEFI,D,12/6/2023,216.980,216.980,216.980,0.000,73725 ATHEFI,D,12/7/2023,216.740,216.740,216.740,0.000,73725 ATHEFI,D,12/8/2023,217.340,217.340,217.340,0.000,73725 ATHEFI,D,12/11/2023,217.660,217.660,217.660,0.000,73725 ATHEFI,D,12/12/2023,218.950,218.950,218.950,0.000,73725 ATHEFI,D,12/13/2023,220.460,220.460,220.460,0.000,73725 ATHEFI,D,12/14/2023,220.890,220.890,220.890,0.000,73725 ATHEFI,D,12/15/2023,219.940,219.940,219.940,0.000,73725 ATHEFI,D,12/18/2023,219.330,219.330,219.330,0.000,73725 ATHEFI,D,12/19/2023,221.460,221.460,221.460,0.000,73725 ATHEFI,D,12/20/2023,222.130,222.130,222.130,0.000,73725 ATHEFI,D,12/21/2023,221.580,221.580,221.580,0.000,73725 ATHEFI,D,12/22/2023,220.820,220.820,220.820,0.000,73725 ATHEFI,D,12/27/2023,221.000,221.000,221.000,0.000,73725 ATHEFI,D,12/28/2023,219.740,219.740,219.740,0.000,73725 ATHEFI,D,12/29/2023,220.860,220.860,220.860,0.000,73725 ATHEFI,D,12/31/2023,220.870,220.870,220.870,0.000,73725 ATHEFI,D,1/1/2024,220.870,220.870,220.870,0.000,73725 ATHEFI,D,1/2/2024,222.960,222.960,222.960,0.000,73725 ATHEFI,D,1/3/2024,221.900,221.900,221.900,0.000,73725 ATHEFI,D,1/4/2024,223.630,223.630,223.630,0.000,75528 ATHEFI,D,1/5/2024,223.620,223.620,223.620,0.000,75528 ATHEFI,D,1/8/2024,227.010,227.010,227.010,0.000,75528 ATHEFI,D,1/9/2024,228.430,228.430,228.430,0.000,75528 ATHEFI,D,1/10/2024,229.360,229.360,229.360,0.000,75528 ATHEFI,D,1/11/2024,229.270,229.270,229.270,0.000,77171 ATHEFI,D,1/12/2024,229.850,229.850,229.850,0.000,77171 ATHEFI,D,1/15/2024,229.700,229.700,229.700,0.000,77171 ATHEFI,D,1/16/2024,226.460,226.460,226.460,0.000,77171 ATHEFI,D,1/17/2024,226.220,226.220,226.220,0.000,77171 ATHEFI,D,1/18/2024,227.830,227.830,227.830,0.000,77171 ATHEFI,D,1/19/2024,227.350,227.350,227.350,0.000,77171 ATHEFI,D,1/22/2024,229.630,229.630,229.630,0.000,77171 ATHEFI,D,1/23/2024,230.240,230.240,230.240,0.000,77171 ATHEFI,D,1/24/2024,231.590,231.590,231.590,0.000,77171 ATHEFI,D,1/25/2024,230.140,230.140,230.140,0.000,77171 ATHEFI,D,1/26/2024,231.230,231.230,231.230,0.000,77171 ATHEFI,D,1/29/2024,229.550,229.550,229.550,0.000,77604 ATHEFI,D,1/30/2024,230.510,230.510,230.510,0.000,77604 ATHEFI,D,1/31/2024,232.580,232.580,232.580,0.000,77604 ATHEFI,D,2/1/2024,234.260,234.260,234.260,0.000,77604 ATHEFI,D,2/2/2024,235.690,235.690,235.690,0.000,77604 ATHEFI,D,2/5/2024,237.920,237.920,237.920,0.000,77943 ATHEFI,D,2/6/2024,239.390,239.390,239.390,0.000,77943 ATHEFI,D,2/7/2024,238.230,238.230,238.230,0.000,78804 ATHEFI,D,2/8/2024,239.810,239.810,239.810,0.000,78804 ATHEFI,D,2/9/2024,239.550,239.550,239.550,0.000,78804 ATHEFI,D,2/12/2024,238.210,238.210,238.210,0.000,79054 ATHEFI,D,2/13/2024,236.540,236.540,236.540,0.000,79054 ATHEFI,D,2/14/2024,238.600,238.600,238.600,0.000,79054 ATHEFI,D,2/15/2024,237.710,237.710,237.710,0.000,79054 ATHEFI,D,2/16/2024,237.480,237.480,237.480,0.000,79054 ATHEFI,D,2/19/2024,240.430,240.430,240.430,0.000,79273 ATHEFI,D,2/20/2024,240.310,240.310,240.310,0.000,79152 ATHEFI,D,2/21/2024,239.230,239.230,239.230,0.000,80446 ATHEFI,D,2/22/2024,239.160,239.160,239.160,0.000,80521 ATHEFI,D,2/23/2024,237.890,237.890,237.890,0.000,81128 ATHEFI,D,2/26/2024,237.950,237.950,237.950,0.000,81128 ATHEFI,D,2/27/2024,237.880,237.880,237.880,0.000,81304 ATHEFI,D,2/28/2024,237.470,237.470,237.470,0.000,81304 ATHEFI,D,2/29/2024,240.300,240.300,240.300,0.000,81304 ATHEFI,D,3/1/2024,240.740,240.740,240.740,0.000,88258 ATHEFI,D,3/4/2024,242.920,242.920,242.920,0.000,88549 ATHEFI,D,3/5/2024,242.300,242.300,242.300,0.000,89718 ATHEFI,D,3/6/2024,242.730,242.730,242.730,0.000,90131 ATHEFI,D,3/7/2024,241.630,241.630,241.630,0.000,90131 ATHEFI,D,3/8/2024,241.760,241.760,241.760,0.000,90131 ATHEFI,D,3/11/2024,235.700,235.700,235.700,0.000,90131 ATHEFI,D,3/12/2024,235.940,235.940,235.940,0.000,90266 ATHEFI,D,3/13/2024,236.570,236.570,236.570,0.000,90266 ATHEFI,D,3/14/2024,239.610,239.610,239.610,0.000,90499 ATHEFI,D,3/15/2024,240.130,240.130,240.130,0.000,90499 ATHEFI,D,3/19/2024,237.480,237.480,237.480,0.000,90499 ATHEFI,D,3/20/2024,239.740,239.740,239.740,0.000,90499 ATHEFI,D,3/21/2024,241.780,241.780,241.780,0.000,90499 ATHEFI,D,3/22/2024,241.050,241.050,241.050,0.000,90499 ATHEFI,D,3/26/2024,240.400,240.400,240.400,0.000,90694 ATHEFI,D,3/27/2024,239.530,239.530,239.530,0.000,90694 ATHEFI,D,3/28/2024,240.470,240.470,240.470,0.000,90694 ATHEFI,D,3/29/2024,240.460,240.460,240.460,0.000,90694 ATHEFI,D,4/1/2024,240.430,240.430,240.430,0.000,90694 ATHEFI,D,4/2/2024,236.020,236.020,236.020,0.000,90694 ATHEFI,D,4/3/2024,234.310,234.310,234.310,0.000,91012 ATHEFI,D,4/4/2024,235.020,235.020,235.020,0.000,90383 ATHEFI,D,4/5/2024,234.450,234.450,234.450,0.000,90383 ATHEFI,D,4/8/2024,237.820,237.820,237.820,0.000,90383 ATHEFI,D,4/9/2024,240.430,240.430,240.430,0.000,90593 ATHEFI,D,4/10/2024,240.670,240.670,240.670,0.000,90593 ATHEFI,D,4/11/2024,240.050,240.050,240.050,0.000,90593 ATHEFI,D,4/12/2024,236.720,236.720,236.720,0.000,90593 ATHEFI,D,4/15/2024,235.120,235.120,235.120,0.000,90593 ATHEFI,D,4/16/2024,229.900,229.900,229.900,0.000,89657 ATHEFI,D,4/17/2024,231.130,231.130,231.130,0.000,89657 ATHEFI,D,4/18/2024,233.900,233.900,233.900,0.000,89657 ATHEFI,D,4/19/2024,236.090,236.090,236.090,0.000,89657 ATHEFI,D,4/22/2024,241.080,241.080,241.080,0.000,89657 ATHEFI,D,4/23/2024,245.500,245.500,245.500,0.000,89657 ATHEFI,D,4/24/2024,245.090,245.090,245.090,0.000,89657 ATHEFI,D,4/25/2024,242.750,242.750,242.750,0.000,89657 ATHEFI,D,4/26/2024,246.360,246.360,246.360,0.000,89657 ATHEFI,D,4/29/2024,246.780,246.780,246.780,0.000,89657 ATHEFI,D,4/30/2024,245.590,245.590,245.590,0.000,89657 ATHEFI,D,5/1/2024,245.580,245.580,245.580,0.000,89657 ATHEFI,D,5/2/2024,245.620,245.620,245.620,0.000,89657 ATHEFI,D,5/8/2024,248.370,248.370,248.370,0.000,89657 ATHEFI,D,5/9/2024,249.420,249.420,249.420,0.000,90986 ATHEFI,D,5/10/2024,250.630,250.630,250.630,0.000,90986 ATHEFI,D,5/13/2024,249.460,249.460,249.460,0.000,90986 ATHEFI,D,5/14/2024,248.020,248.020,248.020,0.000,90986 ATHEFI,D,5/15/2024,251.280,251.280,251.280,0.000,91280 ATHEFI,D,5/16/2024,250.940,250.940,250.940,0.000,91280 ATHEFI,D,5/17/2024,250.500,250.500,250.500,0.000,91280 ATHEFI,D,5/20/2024,252.640,252.640,252.640,0.000,91520 ATHEFI,D,5/21/2024,252.060,252.060,252.060,0.000,91520 ATHEFI,D,5/22/2024,249.190,249.190,249.190,0.000,91520 ATHEFI,D,5/23/2024,249.610,249.610,249.610,0.000,91520 ATHEFI,D,5/24/2024,248.960,248.960,248.960,0.000,91520 ATHEFI,D,5/27/2024,249.250,249.250,249.250,0.000,91520 ATHEFI,D,5/28/2024,246.830,246.830,246.830,0.000,91921 ATHEFI,D,5/29/2024,242.570,242.570,242.570,0.000,91921 ATHEFI,D,5/30/2024,243.140,243.140,243.140,0.000,91921 ATHEFI,D,5/31/2024,242.120,242.120,242.120,0.000,91921 ATHEFI,D,6/3/2024,244.460,244.460,244.460,0.000,91921 ATHEFI,D,6/4/2024,240.940,240.940,240.940,0.000,91921 ATHEFI,D,6/5/2024,243.720,243.720,243.720,0.000,91921 ATHEFI,D,6/6/2024,244.760,244.760,244.760,0.000,92495 ATHEFI,D,6/7/2024,245.540,245.540,245.540,0.000,92495 ATHEFI,D,6/10/2024,245.810,245.810,245.810,0.000,92495 ATHEFI,D,6/11/2024,243.840,243.840,243.840,0.000,92495 ATHEFI,D,6/12/2024,244.580,244.580,244.580,0.000,92495 ATHEFI,D,6/13/2024,242.760,242.760,242.760,0.000,92495 ATHEFI,D,6/14/2024,236.960,236.960,236.960,0.000,92495 ATHEFI,D,6/17/2024,236.530,236.530,236.530,0.000,92495 ATHEFI,D,6/18/2024,239.440,239.440,239.440,0.000,92495 ATHEFI,D,6/19/2024,239.860,239.860,239.860,0.000,92495 ATHEFI,D,6/20/2024,239.510,239.510,239.510,0.000,92912 ATHEFI,D,6/21/2024,239.930,239.930,239.930,0.000,92912 ATHEFI,D,6/25/2024,239.600,239.600,239.600,0.000,92912 ATHEFI,D,6/26/2024,238.790,238.790,238.790,0.000,92912 ATHEFI,D,6/27/2024,237.870,237.870,237.870,0.000,92912